8/25/2011	10:05:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	10:05:29 AM	Recipe started at 10:05 AM
8/25/2011	10:05:29 AM	Helium valve closed
8/25/2011	10:05:29 AM	H2 valve closed
8/25/2011	10:05:29 AM	BCl3 valve closed
8/25/2011	10:05:29 AM	PH3 valve closed
8/25/2011	10:05:29 AM	SiCl4 pre valve closed
8/25/2011	10:05:29 AM	SiCl4 post valve closed
8/25/2011	10:05:29 AM	Main Vac valve closed
8/25/2011	10:05:29 AM	Bypass valve closed
8/25/2011	10:05:29 AM	Bubbler valve closed
8/25/2011	10:05:29 AM	Helium MFC set to  0.000000
8/25/2011	10:05:29 AM	H2 MFC set to  0.000000
8/25/2011	10:05:29 AM	BCl3 MFC set to  0.000000
8/25/2011	10:05:29 AM	PHl3 MFC set to  0.000000
8/25/2011	10:05:29 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:05:29 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:05:29 AM	Tube furnace set to 0
8/25/2011	10:05:32 AM	H2 valve closed
8/25/2011	10:05:32 AM	BCl3 valve closed
8/25/2011	10:05:32 AM	PH3 valve closed
8/25/2011	10:05:32 AM	SiCl4 pre valve closed
8/25/2011	10:05:32 AM	SiCl4 post valve closed
8/25/2011	10:05:32 AM	Main Vac valve closed
8/25/2011	10:05:32 AM	Bypass valve closed
8/25/2011	10:05:32 AM	Bubbler valve closed
8/25/2011	10:05:32 AM	Helium valve opened
8/25/2011	10:05:32 AM	Helium MFC set to  500.000000
8/25/2011	10:05:32 AM	H2 MFC set to  0.000000
8/25/2011	10:05:32 AM	BCl3 MFC set to  0.000000
8/25/2011	10:05:32 AM	PHl3 MFC set to  0.000000
8/25/2011	10:05:32 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:05:32 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:05:32 AM	Tube furnace set to 0
8/25/2011	10:06:33 AM	Helium valve closed
8/25/2011	10:06:33 AM	H2 valve closed
8/25/2011	10:06:33 AM	BCl3 valve closed
8/25/2011	10:06:33 AM	PH3 valve closed
8/25/2011	10:06:33 AM	SiCl4 pre valve closed
8/25/2011	10:06:33 AM	SiCl4 post valve closed
8/25/2011	10:06:33 AM	Main Vac valve closed
8/25/2011	10:06:33 AM	Bypass valve closed
8/25/2011	10:06:33 AM	Bubbler valve closed
8/25/2011	10:06:33 AM	Helium MFC set to  0.000000
8/25/2011	10:06:33 AM	H2 MFC set to  0.000000
8/25/2011	10:06:33 AM	BCl3 MFC set to  0.000000
8/25/2011	10:06:33 AM	PHl3 MFC set to  0.000000
8/25/2011	10:06:33 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:06:33 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:06:33 AM	Tube furnace set to 0
8/25/2011	10:06:34 AM	Run finished at 10:06 AM
8/25/2011	10:06:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	10:06:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:06:37 AM	Recipe started at 10:06 AM
8/25/2011	10:06:37 AM	Helium valve closed
8/25/2011	10:06:37 AM	H2 valve closed
8/25/2011	10:06:37 AM	BCl3 valve closed
8/25/2011	10:06:37 AM	PH3 valve closed
8/25/2011	10:06:37 AM	SiCl4 pre valve closed
8/25/2011	10:06:37 AM	SiCl4 post valve closed
8/25/2011	10:06:37 AM	Main Vac valve closed
8/25/2011	10:06:37 AM	Bubbler valve closed
8/25/2011	10:06:37 AM	Bypass valve opened
8/25/2011	10:06:37 AM	Helium MFC set to  0.000000
8/25/2011	10:06:37 AM	H2 MFC set to  0.000000
8/25/2011	10:06:37 AM	BCl3 MFC set to  0.000000
8/25/2011	10:06:37 AM	PHl3 MFC set to  0.000000
8/25/2011	10:06:37 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:06:37 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:06:37 AM	Tube furnace set to 0
8/25/2011	10:07:33 AM	Helium valve closed
8/25/2011	10:07:33 AM	H2 valve closed
8/25/2011	10:07:33 AM	BCl3 valve closed
8/25/2011	10:07:33 AM	PH3 valve closed
8/25/2011	10:07:33 AM	SiCl4 pre valve closed
8/25/2011	10:07:33 AM	SiCl4 post valve closed
8/25/2011	10:07:33 AM	Main Vac valve closed
8/25/2011	10:07:33 AM	Bubbler valve closed
8/25/2011	10:07:33 AM	Bypass valve opened
8/25/2011	10:07:33 AM	Helium MFC set to  0.000000
8/25/2011	10:07:33 AM	H2 MFC set to  0.000000
8/25/2011	10:07:33 AM	BCl3 MFC set to  0.000000
8/25/2011	10:07:33 AM	PHl3 MFC set to  0.000000
8/25/2011	10:07:33 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:07:33 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:07:33 AM	Tube furnace set to 0
8/25/2011	10:08:05 AM	Helium valve closed
8/25/2011	10:08:05 AM	H2 valve closed
8/25/2011	10:08:05 AM	BCl3 valve closed
8/25/2011	10:08:05 AM	PH3 valve closed
8/25/2011	10:08:05 AM	SiCl4 pre valve closed
8/25/2011	10:08:05 AM	SiCl4 post valve closed
8/25/2011	10:08:05 AM	Bypass valve closed
8/25/2011	10:08:05 AM	Bubbler valve closed
8/25/2011	10:08:05 AM	Main Vac valve opened
8/25/2011	10:08:05 AM	Helium MFC set to  0.000000
8/25/2011	10:08:05 AM	H2 MFC set to  0.000000
8/25/2011	10:08:05 AM	BCl3 MFC set to  0.000000
8/25/2011	10:08:05 AM	PHl3 MFC set to  0.000000
8/25/2011	10:08:05 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:08:05 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:08:06 AM	Tube furnace set to 0
8/25/2011	10:08:07 AM	Run finished at 10:08 AM
8/25/2011	10:08:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:15:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	10:15:36 AM	Recipe started at 10:15 AM
8/25/2011	10:15:36 AM	Helium valve closed
8/25/2011	10:15:36 AM	H2 valve closed
8/25/2011	10:15:36 AM	BCl3 valve closed
8/25/2011	10:15:36 AM	PH3 valve closed
8/25/2011	10:15:36 AM	SiCl4 pre valve closed
8/25/2011	10:15:36 AM	SiCl4 post valve closed
8/25/2011	10:15:36 AM	Main Vac valve closed
8/25/2011	10:15:36 AM	Bypass valve closed
8/25/2011	10:15:36 AM	Bubbler valve closed
8/25/2011	10:15:36 AM	Helium MFC set to  0.000000
8/25/2011	10:15:36 AM	H2 MFC set to  0.000000
8/25/2011	10:15:36 AM	BCl3 MFC set to  0.000000
8/25/2011	10:15:36 AM	PHl3 MFC set to  0.000000
8/25/2011	10:15:36 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:15:36 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:15:36 AM	Tube furnace set to 0
8/25/2011	10:15:39 AM	H2 valve closed
8/25/2011	10:15:39 AM	BCl3 valve closed
8/25/2011	10:15:39 AM	PH3 valve closed
8/25/2011	10:15:39 AM	SiCl4 pre valve closed
8/25/2011	10:15:39 AM	SiCl4 post valve closed
8/25/2011	10:15:39 AM	Main Vac valve closed
8/25/2011	10:15:39 AM	Bypass valve closed
8/25/2011	10:15:39 AM	Bubbler valve closed
8/25/2011	10:15:39 AM	Helium valve opened
8/25/2011	10:15:39 AM	Helium MFC set to  500.000000
8/25/2011	10:15:39 AM	H2 MFC set to  0.000000
8/25/2011	10:15:39 AM	BCl3 MFC set to  0.000000
8/25/2011	10:15:39 AM	PHl3 MFC set to  0.000000
8/25/2011	10:15:39 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:15:39 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:15:39 AM	Tube furnace set to 0
8/25/2011	10:16:46 AM	Helium valve closed
8/25/2011	10:16:46 AM	H2 valve closed
8/25/2011	10:16:46 AM	BCl3 valve closed
8/25/2011	10:16:46 AM	PH3 valve closed
8/25/2011	10:16:46 AM	SiCl4 pre valve closed
8/25/2011	10:16:46 AM	SiCl4 post valve closed
8/25/2011	10:16:46 AM	Main Vac valve closed
8/25/2011	10:16:46 AM	Bypass valve closed
8/25/2011	10:16:46 AM	Bubbler valve closed
8/25/2011	10:16:46 AM	Helium MFC set to  0.000000
8/25/2011	10:16:46 AM	H2 MFC set to  0.000000
8/25/2011	10:16:46 AM	BCl3 MFC set to  0.000000
8/25/2011	10:16:46 AM	PHl3 MFC set to  0.000000
8/25/2011	10:16:46 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:16:46 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:16:46 AM	Tube furnace set to 0
8/25/2011	10:16:47 AM	Run finished at 10:16 AM
8/25/2011	10:16:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	10:19:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:19:13 AM	Recipe started at 10:19 AM
8/25/2011	10:19:13 AM	Helium valve closed
8/25/2011	10:19:13 AM	H2 valve closed
8/25/2011	10:19:13 AM	BCl3 valve closed
8/25/2011	10:19:13 AM	PH3 valve closed
8/25/2011	10:19:13 AM	SiCl4 pre valve closed
8/25/2011	10:19:13 AM	SiCl4 post valve closed
8/25/2011	10:19:13 AM	Main Vac valve closed
8/25/2011	10:19:13 AM	Bubbler valve closed
8/25/2011	10:19:13 AM	Bypass valve opened
8/25/2011	10:19:13 AM	Helium MFC set to  0.000000
8/25/2011	10:19:13 AM	H2 MFC set to  0.000000
8/25/2011	10:19:13 AM	BCl3 MFC set to  0.000000
8/25/2011	10:19:13 AM	PHl3 MFC set to  0.000000
8/25/2011	10:19:13 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:19:13 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:19:13 AM	Tube furnace set to 0
8/25/2011	10:20:17 AM	Helium valve closed
8/25/2011	10:20:17 AM	H2 valve closed
8/25/2011	10:20:17 AM	BCl3 valve closed
8/25/2011	10:20:17 AM	PH3 valve closed
8/25/2011	10:20:17 AM	SiCl4 pre valve closed
8/25/2011	10:20:17 AM	SiCl4 post valve closed
8/25/2011	10:20:17 AM	Main Vac valve closed
8/25/2011	10:20:17 AM	Bubbler valve closed
8/25/2011	10:20:17 AM	Bypass valve opened
8/25/2011	10:20:17 AM	Helium MFC set to  0.000000
8/25/2011	10:20:17 AM	H2 MFC set to  0.000000
8/25/2011	10:20:17 AM	BCl3 MFC set to  0.000000
8/25/2011	10:20:17 AM	PHl3 MFC set to  0.000000
8/25/2011	10:20:17 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:20:17 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:20:17 AM	Tube furnace set to 0
8/25/2011	10:20:32 AM	Helium valve closed
8/25/2011	10:20:32 AM	H2 valve closed
8/25/2011	10:20:32 AM	BCl3 valve closed
8/25/2011	10:20:32 AM	PH3 valve closed
8/25/2011	10:20:32 AM	SiCl4 pre valve closed
8/25/2011	10:20:32 AM	SiCl4 post valve closed
8/25/2011	10:20:32 AM	Bypass valve closed
8/25/2011	10:20:32 AM	Bubbler valve closed
8/25/2011	10:20:32 AM	Main Vac valve opened
8/25/2011	10:20:32 AM	Helium MFC set to  0.000000
8/25/2011	10:20:32 AM	H2 MFC set to  0.000000
8/25/2011	10:20:32 AM	BCl3 MFC set to  0.000000
8/25/2011	10:20:32 AM	PHl3 MFC set to  0.000000
8/25/2011	10:20:32 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:20:32 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:20:33 AM	Tube furnace set to 0
8/25/2011	10:20:34 AM	Run finished at 10:20 AM
8/25/2011	10:20:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:24:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	10:24:51 AM	Recipe started at 10:24 AM
8/25/2011	10:24:51 AM	Helium valve closed
8/25/2011	10:24:51 AM	H2 valve closed
8/25/2011	10:24:51 AM	BCl3 valve closed
8/25/2011	10:24:51 AM	PH3 valve closed
8/25/2011	10:24:51 AM	SiCl4 pre valve closed
8/25/2011	10:24:51 AM	SiCl4 post valve closed
8/25/2011	10:24:51 AM	Main Vac valve closed
8/25/2011	10:24:51 AM	Bubbler valve closed
8/25/2011	10:24:51 AM	Bypass valve opened
8/25/2011	10:24:51 AM	Helium MFC set to  0.000000
8/25/2011	10:24:51 AM	H2 MFC set to  0.000000
8/25/2011	10:24:51 AM	BCl3 MFC set to  0.000000
8/25/2011	10:24:51 AM	PHl3 MFC set to  0.000000
8/25/2011	10:24:51 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:24:51 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:24:51 AM	Tube furnace set to 0
8/25/2011	10:24:51 AM	Helium valve closed
8/25/2011	10:24:51 AM	H2 valve closed
8/25/2011	10:24:51 AM	BCl3 valve closed
8/25/2011	10:24:51 AM	PH3 valve closed
8/25/2011	10:24:51 AM	SiCl4 pre valve closed
8/25/2011	10:24:51 AM	SiCl4 post valve closed
8/25/2011	10:24:51 AM	Main Vac valve closed
8/25/2011	10:24:51 AM	Bubbler valve closed
8/25/2011	10:24:51 AM	Bypass valve opened
8/25/2011	10:24:51 AM	Helium MFC set to  0.000000
8/25/2011	10:24:51 AM	H2 MFC set to  0.000000
8/25/2011	10:24:51 AM	BCl3 MFC set to  0.000000
8/25/2011	10:24:51 AM	PHl3 MFC set to  0.000000
8/25/2011	10:24:51 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:24:51 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:24:51 AM	Tube furnace set to 0
8/25/2011	10:25:21 AM	Helium valve closed
8/25/2011	10:25:21 AM	H2 valve closed
8/25/2011	10:25:21 AM	BCl3 valve closed
8/25/2011	10:25:21 AM	PH3 valve closed
8/25/2011	10:25:21 AM	SiCl4 pre valve closed
8/25/2011	10:25:21 AM	SiCl4 post valve closed
8/25/2011	10:25:21 AM	Bypass valve closed
8/25/2011	10:25:21 AM	Bubbler valve closed
8/25/2011	10:25:21 AM	Main Vac valve opened
8/25/2011	10:25:21 AM	Helium MFC set to  0.000000
8/25/2011	10:25:21 AM	H2 MFC set to  0.000000
8/25/2011	10:25:21 AM	BCl3 MFC set to  0.000000
8/25/2011	10:25:21 AM	PHl3 MFC set to  0.000000
8/25/2011	10:25:21 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:25:21 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:25:21 AM	Tube furnace set to 0
8/25/2011	10:25:51 AM	H2 valve closed
8/25/2011	10:25:51 AM	BCl3 valve closed
8/25/2011	10:25:51 AM	PH3 valve closed
8/25/2011	10:25:51 AM	SiCl4 pre valve closed
8/25/2011	10:25:51 AM	SiCl4 post valve closed
8/25/2011	10:25:51 AM	Bypass valve closed
8/25/2011	10:25:51 AM	Bubbler valve closed
8/25/2011	10:25:51 AM	Helium valve opened
8/25/2011	10:25:51 AM	Main Vac valve opened
8/25/2011	10:25:51 AM	Helium MFC set to  20.000000
8/25/2011	10:25:51 AM	H2 MFC set to  0.000000
8/25/2011	10:25:52 AM	BCl3 MFC set to  0.000000
8/25/2011	10:25:52 AM	PHl3 MFC set to  0.000000
8/25/2011	10:25:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:25:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:25:52 AM	Tube furnace set to 0
8/25/2011	10:26:22 AM	Helium valve closed
8/25/2011	10:26:22 AM	H2 valve closed
8/25/2011	10:26:22 AM	BCl3 valve closed
8/25/2011	10:26:22 AM	PH3 valve closed
8/25/2011	10:26:22 AM	SiCl4 pre valve closed
8/25/2011	10:26:22 AM	SiCl4 post valve closed
8/25/2011	10:26:22 AM	Bypass valve closed
8/25/2011	10:26:22 AM	Bubbler valve closed
8/25/2011	10:26:22 AM	Main Vac valve opened
8/25/2011	10:26:22 AM	Helium MFC set to  0.000000
8/25/2011	10:26:22 AM	H2 MFC set to  0.000000
8/25/2011	10:26:22 AM	BCl3 MFC set to  0.000000
8/25/2011	10:26:22 AM	PHl3 MFC set to  0.000000
8/25/2011	10:26:22 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:26:22 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:26:22 AM	Tube furnace set to 0
8/25/2011	10:26:52 AM	H2 valve closed
8/25/2011	10:26:52 AM	BCl3 valve closed
8/25/2011	10:26:52 AM	PH3 valve closed
8/25/2011	10:26:52 AM	SiCl4 pre valve closed
8/25/2011	10:26:52 AM	SiCl4 post valve closed
8/25/2011	10:26:52 AM	Bypass valve closed
8/25/2011	10:26:52 AM	Bubbler valve closed
8/25/2011	10:26:52 AM	Helium valve opened
8/25/2011	10:26:52 AM	Main Vac valve opened
8/25/2011	10:26:52 AM	Helium MFC set to  20.000000
8/25/2011	10:26:52 AM	H2 MFC set to  0.000000
8/25/2011	10:26:52 AM	BCl3 MFC set to  0.000000
8/25/2011	10:26:52 AM	PHl3 MFC set to  0.000000
8/25/2011	10:26:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:26:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:26:52 AM	Tube furnace set to 0
8/25/2011	10:27:22 AM	Helium valve closed
8/25/2011	10:27:22 AM	H2 valve closed
8/25/2011	10:27:22 AM	BCl3 valve closed
8/25/2011	10:27:22 AM	PH3 valve closed
8/25/2011	10:27:22 AM	SiCl4 pre valve closed
8/25/2011	10:27:22 AM	SiCl4 post valve closed
8/25/2011	10:27:22 AM	Bypass valve closed
8/25/2011	10:27:22 AM	Bubbler valve closed
8/25/2011	10:27:22 AM	Main Vac valve opened
8/25/2011	10:27:22 AM	Helium MFC set to  0.000000
8/25/2011	10:27:22 AM	H2 MFC set to  0.000000
8/25/2011	10:27:22 AM	BCl3 MFC set to  0.000000
8/25/2011	10:27:22 AM	PHl3 MFC set to  0.000000
8/25/2011	10:27:22 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:27:22 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:27:22 AM	Tube furnace set to 0
8/25/2011	10:27:52 AM	H2 valve closed
8/25/2011	10:27:52 AM	BCl3 valve closed
8/25/2011	10:27:52 AM	PH3 valve closed
8/25/2011	10:27:52 AM	SiCl4 pre valve closed
8/25/2011	10:27:52 AM	SiCl4 post valve closed
8/25/2011	10:27:52 AM	Bypass valve closed
8/25/2011	10:27:52 AM	Bubbler valve closed
8/25/2011	10:27:52 AM	Helium valve opened
8/25/2011	10:27:52 AM	Main Vac valve opened
8/25/2011	10:27:52 AM	Helium MFC set to  20.000000
8/25/2011	10:27:52 AM	H2 MFC set to  0.000000
8/25/2011	10:27:52 AM	BCl3 MFC set to  0.000000
8/25/2011	10:27:52 AM	PHl3 MFC set to  0.000000
8/25/2011	10:27:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:27:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:27:52 AM	Tube furnace set to 0
8/25/2011	10:28:22 AM	Helium valve closed
8/25/2011	10:28:22 AM	H2 valve closed
8/25/2011	10:28:22 AM	BCl3 valve closed
8/25/2011	10:28:22 AM	PH3 valve closed
8/25/2011	10:28:22 AM	SiCl4 pre valve closed
8/25/2011	10:28:22 AM	SiCl4 post valve closed
8/25/2011	10:28:22 AM	Bypass valve closed
8/25/2011	10:28:22 AM	Bubbler valve closed
8/25/2011	10:28:22 AM	Main Vac valve opened
8/25/2011	10:28:22 AM	Helium MFC set to  0.000000
8/25/2011	10:28:22 AM	H2 MFC set to  0.000000
8/25/2011	10:28:22 AM	BCl3 MFC set to  0.000000
8/25/2011	10:28:22 AM	PHl3 MFC set to  0.000000
8/25/2011	10:28:22 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:28:22 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:28:23 AM	Tube furnace set to 0
8/25/2011	10:28:53 AM	H2 valve closed
8/25/2011	10:28:53 AM	BCl3 valve closed
8/25/2011	10:28:53 AM	PH3 valve closed
8/25/2011	10:28:53 AM	SiCl4 pre valve closed
8/25/2011	10:28:53 AM	SiCl4 post valve closed
8/25/2011	10:28:53 AM	Bypass valve closed
8/25/2011	10:28:53 AM	Bubbler valve closed
8/25/2011	10:28:53 AM	Helium valve opened
8/25/2011	10:28:53 AM	Main Vac valve opened
8/25/2011	10:28:53 AM	Helium MFC set to  20.000000
8/25/2011	10:28:53 AM	H2 MFC set to  0.000000
8/25/2011	10:28:53 AM	BCl3 MFC set to  0.000000
8/25/2011	10:28:53 AM	PHl3 MFC set to  0.000000
8/25/2011	10:28:53 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:28:53 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:28:53 AM	Tube furnace set to 0
8/25/2011	10:29:23 AM	Helium valve closed
8/25/2011	10:29:23 AM	H2 valve closed
8/25/2011	10:29:23 AM	BCl3 valve closed
8/25/2011	10:29:23 AM	PH3 valve closed
8/25/2011	10:29:23 AM	SiCl4 pre valve closed
8/25/2011	10:29:23 AM	SiCl4 post valve closed
8/25/2011	10:29:23 AM	Bypass valve closed
8/25/2011	10:29:23 AM	Bubbler valve closed
8/25/2011	10:29:23 AM	Main Vac valve opened
8/25/2011	10:29:23 AM	Helium MFC set to  0.000000
8/25/2011	10:29:23 AM	H2 MFC set to  0.000000
8/25/2011	10:29:23 AM	BCl3 MFC set to  0.000000
8/25/2011	10:29:23 AM	PHl3 MFC set to  0.000000
8/25/2011	10:29:23 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:29:23 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:29:23 AM	Tube furnace set to 0
8/25/2011	10:29:53 AM	H2 valve closed
8/25/2011	10:29:53 AM	BCl3 valve closed
8/25/2011	10:29:53 AM	PH3 valve closed
8/25/2011	10:29:53 AM	SiCl4 pre valve closed
8/25/2011	10:29:53 AM	SiCl4 post valve closed
8/25/2011	10:29:53 AM	Bypass valve closed
8/25/2011	10:29:53 AM	Bubbler valve closed
8/25/2011	10:29:53 AM	Helium valve opened
8/25/2011	10:29:53 AM	Main Vac valve opened
8/25/2011	10:29:53 AM	Helium MFC set to  20.000000
8/25/2011	10:29:53 AM	H2 MFC set to  0.000000
8/25/2011	10:29:53 AM	BCl3 MFC set to  0.000000
8/25/2011	10:29:53 AM	PHl3 MFC set to  0.000000
8/25/2011	10:29:53 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:29:53 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:29:53 AM	Tube furnace set to 0
8/25/2011	10:30:23 AM	Helium valve closed
8/25/2011	10:30:23 AM	H2 valve closed
8/25/2011	10:30:23 AM	BCl3 valve closed
8/25/2011	10:30:23 AM	PH3 valve closed
8/25/2011	10:30:23 AM	SiCl4 pre valve closed
8/25/2011	10:30:23 AM	SiCl4 post valve closed
8/25/2011	10:30:23 AM	Bypass valve closed
8/25/2011	10:30:23 AM	Bubbler valve closed
8/25/2011	10:30:23 AM	Main Vac valve opened
8/25/2011	10:30:23 AM	Helium MFC set to  0.000000
8/25/2011	10:30:23 AM	H2 MFC set to  0.000000
8/25/2011	10:30:23 AM	BCl3 MFC set to  0.000000
8/25/2011	10:30:23 AM	PHl3 MFC set to  0.000000
8/25/2011	10:30:23 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:30:23 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:30:23 AM	Tube furnace set to 0
8/25/2011	10:30:53 AM	H2 valve closed
8/25/2011	10:30:53 AM	BCl3 valve closed
8/25/2011	10:30:53 AM	PH3 valve closed
8/25/2011	10:30:53 AM	SiCl4 pre valve closed
8/25/2011	10:30:53 AM	SiCl4 post valve closed
8/25/2011	10:30:53 AM	Bypass valve closed
8/25/2011	10:30:53 AM	Bubbler valve closed
8/25/2011	10:30:53 AM	Helium valve opened
8/25/2011	10:30:53 AM	Main Vac valve opened
8/25/2011	10:30:53 AM	Helium MFC set to  20.000000
8/25/2011	10:30:53 AM	H2 MFC set to  0.000000
8/25/2011	10:30:53 AM	BCl3 MFC set to  0.000000
8/25/2011	10:30:53 AM	PHl3 MFC set to  0.000000
8/25/2011	10:30:53 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:30:53 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:30:54 AM	Tube furnace set to 0
8/25/2011	10:31:24 AM	Helium valve closed
8/25/2011	10:31:24 AM	H2 valve closed
8/25/2011	10:31:24 AM	BCl3 valve closed
8/25/2011	10:31:24 AM	PH3 valve closed
8/25/2011	10:31:24 AM	SiCl4 pre valve closed
8/25/2011	10:31:24 AM	SiCl4 post valve closed
8/25/2011	10:31:24 AM	Bypass valve closed
8/25/2011	10:31:24 AM	Bubbler valve closed
8/25/2011	10:31:24 AM	Main Vac valve opened
8/25/2011	10:31:24 AM	Helium MFC set to  0.000000
8/25/2011	10:31:24 AM	H2 MFC set to  0.000000
8/25/2011	10:31:24 AM	BCl3 MFC set to  0.000000
8/25/2011	10:31:24 AM	PHl3 MFC set to  0.000000
8/25/2011	10:31:24 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:31:24 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:31:24 AM	Tube furnace set to 0
8/25/2011	10:31:54 AM	H2 valve closed
8/25/2011	10:31:54 AM	BCl3 valve closed
8/25/2011	10:31:54 AM	PH3 valve closed
8/25/2011	10:31:54 AM	SiCl4 pre valve closed
8/25/2011	10:31:54 AM	SiCl4 post valve closed
8/25/2011	10:31:54 AM	Bypass valve closed
8/25/2011	10:31:54 AM	Bubbler valve closed
8/25/2011	10:31:54 AM	Helium valve opened
8/25/2011	10:31:54 AM	Main Vac valve opened
8/25/2011	10:31:54 AM	Helium MFC set to  20.000000
8/25/2011	10:31:54 AM	H2 MFC set to  0.000000
8/25/2011	10:31:54 AM	BCl3 MFC set to  0.000000
8/25/2011	10:31:54 AM	PHl3 MFC set to  0.000000
8/25/2011	10:31:54 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:31:54 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:31:54 AM	Tube furnace set to 0
8/25/2011	10:32:24 AM	Helium valve closed
8/25/2011	10:32:24 AM	H2 valve closed
8/25/2011	10:32:24 AM	BCl3 valve closed
8/25/2011	10:32:24 AM	PH3 valve closed
8/25/2011	10:32:24 AM	SiCl4 pre valve closed
8/25/2011	10:32:24 AM	SiCl4 post valve closed
8/25/2011	10:32:24 AM	Bypass valve closed
8/25/2011	10:32:24 AM	Bubbler valve closed
8/25/2011	10:32:24 AM	Main Vac valve opened
8/25/2011	10:32:24 AM	Helium MFC set to  0.000000
8/25/2011	10:32:24 AM	H2 MFC set to  0.000000
8/25/2011	10:32:24 AM	BCl3 MFC set to  0.000000
8/25/2011	10:32:24 AM	PHl3 MFC set to  0.000000
8/25/2011	10:32:24 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:32:24 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:32:24 AM	Tube furnace set to 0
8/25/2011	10:32:54 AM	H2 valve closed
8/25/2011	10:32:54 AM	BCl3 valve closed
8/25/2011	10:32:54 AM	PH3 valve closed
8/25/2011	10:32:54 AM	SiCl4 pre valve closed
8/25/2011	10:32:54 AM	SiCl4 post valve closed
8/25/2011	10:32:54 AM	Bypass valve closed
8/25/2011	10:32:54 AM	Bubbler valve closed
8/25/2011	10:32:54 AM	Helium valve opened
8/25/2011	10:32:54 AM	Main Vac valve opened
8/25/2011	10:32:54 AM	Helium MFC set to  20.000000
8/25/2011	10:32:54 AM	H2 MFC set to  0.000000
8/25/2011	10:32:54 AM	BCl3 MFC set to  0.000000
8/25/2011	10:32:54 AM	PHl3 MFC set to  0.000000
8/25/2011	10:32:54 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:32:54 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:32:54 AM	Tube furnace set to 0
8/25/2011	10:33:24 AM	Helium valve closed
8/25/2011	10:33:24 AM	H2 valve closed
8/25/2011	10:33:24 AM	BCl3 valve closed
8/25/2011	10:33:24 AM	PH3 valve closed
8/25/2011	10:33:24 AM	SiCl4 pre valve closed
8/25/2011	10:33:24 AM	SiCl4 post valve closed
8/25/2011	10:33:24 AM	Bypass valve closed
8/25/2011	10:33:24 AM	Bubbler valve closed
8/25/2011	10:33:24 AM	Main Vac valve opened
8/25/2011	10:33:24 AM	Helium MFC set to  0.000000
8/25/2011	10:33:24 AM	H2 MFC set to  0.000000
8/25/2011	10:33:24 AM	BCl3 MFC set to  0.000000
8/25/2011	10:33:24 AM	PHl3 MFC set to  0.000000
8/25/2011	10:33:24 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:33:24 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:33:25 AM	Tube furnace set to 0
8/25/2011	10:33:55 AM	H2 valve closed
8/25/2011	10:33:55 AM	BCl3 valve closed
8/25/2011	10:33:55 AM	PH3 valve closed
8/25/2011	10:33:55 AM	SiCl4 pre valve closed
8/25/2011	10:33:55 AM	SiCl4 post valve closed
8/25/2011	10:33:55 AM	Bypass valve closed
8/25/2011	10:33:55 AM	Bubbler valve closed
8/25/2011	10:33:55 AM	Helium valve opened
8/25/2011	10:33:55 AM	Main Vac valve opened
8/25/2011	10:33:55 AM	Helium MFC set to  20.000000
8/25/2011	10:33:55 AM	H2 MFC set to  0.000000
8/25/2011	10:33:55 AM	BCl3 MFC set to  0.000000
8/25/2011	10:33:55 AM	PHl3 MFC set to  0.000000
8/25/2011	10:33:55 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:33:55 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:33:55 AM	Tube furnace set to 0
8/25/2011	10:34:25 AM	Helium valve closed
8/25/2011	10:34:25 AM	H2 valve closed
8/25/2011	10:34:25 AM	BCl3 valve closed
8/25/2011	10:34:25 AM	PH3 valve closed
8/25/2011	10:34:25 AM	SiCl4 pre valve closed
8/25/2011	10:34:25 AM	SiCl4 post valve closed
8/25/2011	10:34:25 AM	Bypass valve closed
8/25/2011	10:34:25 AM	Bubbler valve closed
8/25/2011	10:34:25 AM	Main Vac valve opened
8/25/2011	10:34:25 AM	Helium MFC set to  0.000000
8/25/2011	10:34:25 AM	H2 MFC set to  0.000000
8/25/2011	10:34:25 AM	BCl3 MFC set to  0.000000
8/25/2011	10:34:25 AM	PHl3 MFC set to  0.000000
8/25/2011	10:34:25 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:34:25 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:34:25 AM	Tube furnace set to 0
8/25/2011	10:34:55 AM	H2 valve closed
8/25/2011	10:34:55 AM	BCl3 valve closed
8/25/2011	10:34:55 AM	PH3 valve closed
8/25/2011	10:34:55 AM	SiCl4 pre valve closed
8/25/2011	10:34:55 AM	SiCl4 post valve closed
8/25/2011	10:34:55 AM	Bypass valve closed
8/25/2011	10:34:55 AM	Bubbler valve closed
8/25/2011	10:34:55 AM	Helium valve opened
8/25/2011	10:34:55 AM	Main Vac valve opened
8/25/2011	10:34:55 AM	Helium MFC set to  20.000000
8/25/2011	10:34:55 AM	H2 MFC set to  0.000000
8/25/2011	10:34:55 AM	BCl3 MFC set to  0.000000
8/25/2011	10:34:55 AM	PHl3 MFC set to  0.000000
8/25/2011	10:34:55 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:34:55 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:34:55 AM	Tube furnace set to 0
8/25/2011	10:35:25 AM	Helium valve closed
8/25/2011	10:35:25 AM	H2 valve closed
8/25/2011	10:35:25 AM	BCl3 valve closed
8/25/2011	10:35:25 AM	PH3 valve closed
8/25/2011	10:35:25 AM	SiCl4 pre valve closed
8/25/2011	10:35:25 AM	SiCl4 post valve closed
8/25/2011	10:35:25 AM	Bypass valve closed
8/25/2011	10:35:25 AM	Bubbler valve closed
8/25/2011	10:35:25 AM	Main Vac valve opened
8/25/2011	10:35:25 AM	Helium MFC set to  0.000000
8/25/2011	10:35:25 AM	H2 MFC set to  0.000000
8/25/2011	10:35:25 AM	BCl3 MFC set to  0.000000
8/25/2011	10:35:25 AM	PHl3 MFC set to  0.000000
8/25/2011	10:35:25 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:35:25 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:35:25 AM	Tube furnace set to 0
8/25/2011	10:35:26 AM	Run finished at 10:35 AM
8/25/2011	10:35:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	10:40:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	10:40:01 AM	Recipe started at 10:40 AM
8/25/2011	10:40:01 AM	Helium valve closed
8/25/2011	10:40:01 AM	H2 valve closed
8/25/2011	10:40:01 AM	BCl3 valve closed
8/25/2011	10:40:01 AM	PH3 valve closed
8/25/2011	10:40:01 AM	SiCl4 pre valve closed
8/25/2011	10:40:01 AM	SiCl4 post valve closed
8/25/2011	10:40:01 AM	Main Vac valve closed
8/25/2011	10:40:01 AM	Bypass valve closed
8/25/2011	10:40:01 AM	Bubbler valve closed
8/25/2011	10:40:01 AM	Helium MFC set to  0.000000
8/25/2011	10:40:01 AM	H2 MFC set to  0.000000
8/25/2011	10:40:01 AM	BCl3 MFC set to  0.000000
8/25/2011	10:40:01 AM	PHl3 MFC set to  0.000000
8/25/2011	10:40:01 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:40:01 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:40:01 AM	Tube furnace set to 0
8/25/2011	10:40:01 AM	Run finished at 10:40 AM
8/25/2011	10:40:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	10:40:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:40:15 AM	Recipe started at 10:40 AM
8/25/2011	10:40:15 AM	Helium valve closed
8/25/2011	10:40:15 AM	H2 valve closed
8/25/2011	10:40:15 AM	BCl3 valve closed
8/25/2011	10:40:15 AM	PH3 valve closed
8/25/2011	10:40:15 AM	SiCl4 pre valve closed
8/25/2011	10:40:15 AM	SiCl4 post valve closed
8/25/2011	10:40:15 AM	Main Vac valve closed
8/25/2011	10:40:15 AM	Bubbler valve closed
8/25/2011	10:40:15 AM	Bypass valve opened
8/25/2011	10:40:15 AM	Helium MFC set to  0.000000
8/25/2011	10:40:15 AM	H2 MFC set to  0.000000
8/25/2011	10:40:15 AM	BCl3 MFC set to  0.000000
8/25/2011	10:40:15 AM	PHl3 MFC set to  0.000000
8/25/2011	10:40:15 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:40:15 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:40:15 AM	Tube furnace set to 0
8/25/2011	10:40:15 AM	Helium valve closed
8/25/2011	10:40:15 AM	H2 valve closed
8/25/2011	10:40:15 AM	BCl3 valve closed
8/25/2011	10:40:15 AM	PH3 valve closed
8/25/2011	10:40:15 AM	SiCl4 pre valve closed
8/25/2011	10:40:15 AM	SiCl4 post valve closed
8/25/2011	10:40:15 AM	Main Vac valve closed
8/25/2011	10:40:15 AM	Bubbler valve closed
8/25/2011	10:40:15 AM	Bypass valve opened
8/25/2011	10:40:15 AM	Helium MFC set to  0.000000
8/25/2011	10:40:15 AM	H2 MFC set to  0.000000
8/25/2011	10:40:15 AM	BCl3 MFC set to  0.000000
8/25/2011	10:40:15 AM	PHl3 MFC set to  0.000000
8/25/2011	10:40:15 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:40:15 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:40:16 AM	Tube furnace set to 0
8/25/2011	10:40:18 AM	Run aborted at 10:40 AM
8/25/2011	10:40:18 AM	Helium valve closed
8/25/2011	10:40:18 AM	H2 valve closed
8/25/2011	10:40:18 AM	BCl3 valve closed
8/25/2011	10:40:18 AM	PH3 valve closed
8/25/2011	10:40:18 AM	SiCl4 pre valve closed
8/25/2011	10:40:18 AM	SiCl4 post valve closed
8/25/2011	10:40:18 AM	Bypass valve closed
8/25/2011	10:40:18 AM	Main Vac valve closed
8/25/2011	10:40:18 AM	Bubbler valve closed
8/25/2011	10:40:18 AM	Helium MFC set to  0.000000
8/25/2011	10:40:18 AM	H2 MFC set to  0.000000
8/25/2011	10:40:18 AM	BCl3 MFC set to  0.000000
8/25/2011	10:40:18 AM	PHl3 MFC set to  0.000000
8/25/2011	10:40:18 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:40:19 AM	Tube furnace set to 0
8/25/2011	10:40:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	10:40:24 AM	Main Vac valve opened
8/25/2011	10:43:39 AM	Recipe started at 10:43 AM
8/25/2011	10:43:39 AM	Helium valve closed
8/25/2011	10:43:39 AM	H2 valve closed
8/25/2011	10:43:39 AM	BCl3 valve closed
8/25/2011	10:43:39 AM	PH3 valve closed
8/25/2011	10:43:39 AM	SiCl4 pre valve closed
8/25/2011	10:43:39 AM	SiCl4 post valve closed
8/25/2011	10:43:39 AM	Main Vac valve closed
8/25/2011	10:43:39 AM	Bypass valve closed
8/25/2011	10:43:39 AM	Bubbler valve closed
8/25/2011	10:43:39 AM	Helium MFC set to  0.000000
8/25/2011	10:43:39 AM	H2 MFC set to  0.000000
8/25/2011	10:43:39 AM	BCl3 MFC set to  0.000000
8/25/2011	10:43:39 AM	PHl3 MFC set to  0.000000
8/25/2011	10:43:39 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:43:39 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:43:40 AM	Tube furnace set to 0
8/25/2011	10:43:43 AM	Helium valve closed
8/25/2011	10:43:43 AM	BCl3 valve closed
8/25/2011	10:43:43 AM	PH3 valve closed
8/25/2011	10:43:43 AM	SiCl4 pre valve closed
8/25/2011	10:43:43 AM	SiCl4 post valve closed
8/25/2011	10:43:43 AM	Main Vac valve closed
8/25/2011	10:43:43 AM	Bypass valve closed
8/25/2011	10:43:43 AM	Bubbler valve closed
8/25/2011	10:43:43 AM	H2 valve opened
8/25/2011	10:43:43 AM	Helium MFC set to  0.000000
8/25/2011	10:43:43 AM	H2 MFC set to  500.000000
8/25/2011	10:43:43 AM	BCl3 MFC set to  0.000000
8/25/2011	10:43:43 AM	PHl3 MFC set to  0.000000
8/25/2011	10:43:43 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:43:43 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:43:43 AM	Tube furnace set to 0
8/25/2011	10:44:51 AM	Helium valve closed
8/25/2011	10:44:51 AM	BCl3 valve closed
8/25/2011	10:44:51 AM	PH3 valve closed
8/25/2011	10:44:51 AM	SiCl4 pre valve closed
8/25/2011	10:44:51 AM	SiCl4 post valve closed
8/25/2011	10:44:51 AM	Main Vac valve closed
8/25/2011	10:44:51 AM	Bypass valve closed
8/25/2011	10:44:51 AM	H2 valve opened
8/25/2011	10:44:51 AM	Bubbler valve opened
8/25/2011	10:44:51 AM	Helium MFC set to  0.000000
8/25/2011	10:44:51 AM	H2 MFC set to  500.000000
8/25/2011	10:44:51 AM	BCl3 MFC set to  0.000000
8/25/2011	10:44:51 AM	PHl3 MFC set to  0.000000
8/25/2011	10:44:51 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:44:51 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:44:51 AM	Tube furnace set to 0
8/25/2011	10:44:52 AM	Helium valve closed
8/25/2011	10:44:52 AM	BCl3 valve closed
8/25/2011	10:44:52 AM	PH3 valve closed
8/25/2011	10:44:52 AM	SiCl4 pre valve closed
8/25/2011	10:44:52 AM	SiCl4 post valve closed
8/25/2011	10:44:52 AM	Main Vac valve closed
8/25/2011	10:44:52 AM	Bypass valve closed
8/25/2011	10:44:52 AM	H2 valve opened
8/25/2011	10:44:52 AM	Bubbler valve opened
8/25/2011	10:44:52 AM	Helium MFC set to  0.000000
8/25/2011	10:44:52 AM	H2 MFC set to  500.000000
8/25/2011	10:44:52 AM	BCl3 MFC set to  0.000000
8/25/2011	10:44:52 AM	PHl3 MFC set to  0.000000
8/25/2011	10:44:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	10:44:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:44:52 AM	Tube furnace set to 1000
8/25/2011	11:04:52 AM	Helium valve closed
8/25/2011	11:04:52 AM	BCl3 valve closed
8/25/2011	11:04:52 AM	PH3 valve closed
8/25/2011	11:04:52 AM	Main Vac valve closed
8/25/2011	11:04:52 AM	Bypass valve closed
8/25/2011	11:04:52 AM	H2 valve opened
8/25/2011	11:04:52 AM	SiCl4 pre valve opened
8/25/2011	11:04:52 AM	SiCl4 post valve opened
8/25/2011	11:04:52 AM	Bubbler valve opened
8/25/2011	11:04:52 AM	Helium MFC set to  0.000000
8/25/2011	11:04:52 AM	H2 MFC set to  500.000000
8/25/2011	11:04:52 AM	BCl3 MFC set to  0.000000
8/25/2011	11:04:52 AM	PHl3 MFC set to  0.000000
8/25/2011	11:04:52 AM	SiCl4 MFC set to  50.000000
8/25/2011	11:04:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:04:52 AM	Tube furnace set to 1000
8/25/2011	11:24:52 AM	Helium valve closed
8/25/2011	11:24:52 AM	BCl3 valve closed
8/25/2011	11:24:52 AM	PH3 valve closed
8/25/2011	11:24:52 AM	SiCl4 pre valve closed
8/25/2011	11:24:52 AM	SiCl4 post valve closed
8/25/2011	11:24:52 AM	Main Vac valve closed
8/25/2011	11:24:52 AM	Bypass valve closed
8/25/2011	11:24:52 AM	H2 valve opened
8/25/2011	11:24:52 AM	Bubbler valve opened
8/25/2011	11:24:52 AM	Helium MFC set to  0.000000
8/25/2011	11:24:52 AM	H2 MFC set to  500.000000
8/25/2011	11:24:52 AM	BCl3 MFC set to  0.000000
8/25/2011	11:24:52 AM	PHl3 MFC set to  0.000000
8/25/2011	11:24:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	11:24:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:24:52 AM	Tube furnace set to 950
8/25/2011	11:29:52 AM	H2 valve closed
8/25/2011	11:29:52 AM	BCl3 valve closed
8/25/2011	11:29:52 AM	PH3 valve closed
8/25/2011	11:29:52 AM	SiCl4 pre valve closed
8/25/2011	11:29:52 AM	SiCl4 post valve closed
8/25/2011	11:29:52 AM	Main Vac valve closed
8/25/2011	11:29:52 AM	Bypass valve closed
8/25/2011	11:29:52 AM	Helium valve opened
8/25/2011	11:29:52 AM	Bubbler valve opened
8/25/2011	11:29:52 AM	Helium MFC set to  500.000000
8/25/2011	11:29:52 AM	H2 MFC set to  0.000000
8/25/2011	11:29:52 AM	BCl3 MFC set to  0.000000
8/25/2011	11:29:52 AM	PHl3 MFC set to  0.000000
8/25/2011	11:29:52 AM	SiCl4 MFC set to  0.000000
8/25/2011	11:29:52 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:29:52 AM	Tube furnace set to 0
8/25/2011	11:56:01 AM	Helium valve closed
8/25/2011	11:56:01 AM	H2 valve closed
8/25/2011	11:56:01 AM	BCl3 valve closed
8/25/2011	11:56:01 AM	PH3 valve closed
8/25/2011	11:56:01 AM	SiCl4 pre valve closed
8/25/2011	11:56:01 AM	SiCl4 post valve closed
8/25/2011	11:56:01 AM	Main Vac valve closed
8/25/2011	11:56:01 AM	Bypass valve closed
8/25/2011	11:56:01 AM	Bubbler valve closed
8/25/2011	11:56:01 AM	Helium MFC set to  0.000000
8/25/2011	11:56:01 AM	H2 MFC set to  0.000000
8/25/2011	11:56:01 AM	BCl3 MFC set to  0.000000
8/25/2011	11:56:01 AM	PHl3 MFC set to  0.000000
8/25/2011	11:56:01 AM	SiCl4 MFC set to  0.000000
8/25/2011	11:56:01 AM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:56:02 AM	Tube furnace set to 0
8/25/2011	11:56:03 AM	Run finished at 11:56 AM
8/25/2011	12:00:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	12:00:37 PM	Recipe started at 12:00 PM
8/25/2011	12:00:37 PM	Helium valve closed
8/25/2011	12:00:37 PM	H2 valve closed
8/25/2011	12:00:37 PM	BCl3 valve closed
8/25/2011	12:00:37 PM	PH3 valve closed
8/25/2011	12:00:37 PM	SiCl4 pre valve closed
8/25/2011	12:00:37 PM	SiCl4 post valve closed
8/25/2011	12:00:37 PM	Main Vac valve closed
8/25/2011	12:00:37 PM	Bubbler valve closed
8/25/2011	12:00:37 PM	Bypass valve opened
8/25/2011	12:00:37 PM	Helium MFC set to  0.000000
8/25/2011	12:00:37 PM	H2 MFC set to  0.000000
8/25/2011	12:00:37 PM	BCl3 MFC set to  0.000000
8/25/2011	12:00:37 PM	PHl3 MFC set to  0.000000
8/25/2011	12:00:37 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:00:37 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:00:37 PM	Tube furnace set to 0
8/25/2011	12:01:45 PM	Helium valve closed
8/25/2011	12:01:45 PM	H2 valve closed
8/25/2011	12:01:45 PM	BCl3 valve closed
8/25/2011	12:01:45 PM	PH3 valve closed
8/25/2011	12:01:45 PM	SiCl4 pre valve closed
8/25/2011	12:01:45 PM	SiCl4 post valve closed
8/25/2011	12:01:45 PM	Main Vac valve closed
8/25/2011	12:01:45 PM	Bubbler valve closed
8/25/2011	12:01:45 PM	Bypass valve opened
8/25/2011	12:01:45 PM	Helium MFC set to  0.000000
8/25/2011	12:01:45 PM	H2 MFC set to  0.000000
8/25/2011	12:01:45 PM	BCl3 MFC set to  0.000000
8/25/2011	12:01:45 PM	PHl3 MFC set to  0.000000
8/25/2011	12:01:45 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:01:45 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:01:45 PM	Tube furnace set to 0
8/25/2011	12:02:45 PM	Helium valve closed
8/25/2011	12:02:45 PM	H2 valve closed
8/25/2011	12:02:45 PM	BCl3 valve closed
8/25/2011	12:02:45 PM	PH3 valve closed
8/25/2011	12:02:45 PM	SiCl4 pre valve closed
8/25/2011	12:02:45 PM	SiCl4 post valve closed
8/25/2011	12:02:45 PM	Bypass valve closed
8/25/2011	12:02:45 PM	Bubbler valve closed
8/25/2011	12:02:45 PM	Main Vac valve opened
8/25/2011	12:02:45 PM	Helium MFC set to  0.000000
8/25/2011	12:02:45 PM	H2 MFC set to  0.000000
8/25/2011	12:02:45 PM	BCl3 MFC set to  0.000000
8/25/2011	12:02:45 PM	PHl3 MFC set to  0.000000
8/25/2011	12:02:45 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:02:45 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:02:45 PM	Tube furnace set to 0
8/25/2011	12:02:46 PM	Run finished at 12:02 PM
8/25/2011	12:02:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	12:13:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	12:13:16 PM	Recipe started at 12:13 PM
8/25/2011	12:13:16 PM	Helium valve closed
8/25/2011	12:13:16 PM	H2 valve closed
8/25/2011	12:13:16 PM	BCl3 valve closed
8/25/2011	12:13:16 PM	PH3 valve closed
8/25/2011	12:13:16 PM	SiCl4 pre valve closed
8/25/2011	12:13:16 PM	SiCl4 post valve closed
8/25/2011	12:13:16 PM	Main Vac valve closed
8/25/2011	12:13:16 PM	Bubbler valve closed
8/25/2011	12:13:16 PM	Bypass valve opened
8/25/2011	12:13:16 PM	Helium MFC set to  0.000000
8/25/2011	12:13:16 PM	H2 MFC set to  0.000000
8/25/2011	12:13:16 PM	BCl3 MFC set to  0.000000
8/25/2011	12:13:16 PM	PHl3 MFC set to  0.000000
8/25/2011	12:13:16 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:13:16 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:13:16 PM	Tube furnace set to 0
8/25/2011	12:13:17 PM	Helium valve closed
8/25/2011	12:13:17 PM	H2 valve closed
8/25/2011	12:13:17 PM	BCl3 valve closed
8/25/2011	12:13:17 PM	PH3 valve closed
8/25/2011	12:13:17 PM	SiCl4 pre valve closed
8/25/2011	12:13:17 PM	SiCl4 post valve closed
8/25/2011	12:13:17 PM	Main Vac valve closed
8/25/2011	12:13:17 PM	Bubbler valve closed
8/25/2011	12:13:17 PM	Bypass valve opened
8/25/2011	12:13:17 PM	Helium MFC set to  0.000000
8/25/2011	12:13:17 PM	H2 MFC set to  0.000000
8/25/2011	12:13:17 PM	BCl3 MFC set to  0.000000
8/25/2011	12:13:17 PM	PHl3 MFC set to  0.000000
8/25/2011	12:13:17 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:13:17 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:13:17 PM	Tube furnace set to 0
8/25/2011	12:13:20 PM	Helium valve closed
8/25/2011	12:13:20 PM	H2 valve closed
8/25/2011	12:13:20 PM	BCl3 valve closed
8/25/2011	12:13:20 PM	PH3 valve closed
8/25/2011	12:13:20 PM	SiCl4 pre valve closed
8/25/2011	12:13:20 PM	SiCl4 post valve closed
8/25/2011	12:13:20 PM	Bypass valve closed
8/25/2011	12:13:20 PM	Bubbler valve closed
8/25/2011	12:13:20 PM	Main Vac valve opened
8/25/2011	12:13:20 PM	Helium MFC set to  0.000000
8/25/2011	12:13:20 PM	H2 MFC set to  0.000000
8/25/2011	12:13:20 PM	BCl3 MFC set to  0.000000
8/25/2011	12:13:20 PM	PHl3 MFC set to  0.000000
8/25/2011	12:13:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:13:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:13:20 PM	Tube furnace set to 0
8/25/2011	12:13:50 PM	H2 valve closed
8/25/2011	12:13:50 PM	BCl3 valve closed
8/25/2011	12:13:50 PM	PH3 valve closed
8/25/2011	12:13:50 PM	SiCl4 pre valve closed
8/25/2011	12:13:50 PM	SiCl4 post valve closed
8/25/2011	12:13:50 PM	Bypass valve closed
8/25/2011	12:13:50 PM	Bubbler valve closed
8/25/2011	12:13:50 PM	Helium valve opened
8/25/2011	12:13:50 PM	Main Vac valve opened
8/25/2011	12:13:50 PM	Helium MFC set to  20.000000
8/25/2011	12:13:50 PM	H2 MFC set to  0.000000
8/25/2011	12:13:50 PM	BCl3 MFC set to  0.000000
8/25/2011	12:13:50 PM	PHl3 MFC set to  0.000000
8/25/2011	12:13:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:13:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:13:50 PM	Tube furnace set to 0
8/25/2011	12:14:20 PM	Helium valve closed
8/25/2011	12:14:20 PM	H2 valve closed
8/25/2011	12:14:20 PM	BCl3 valve closed
8/25/2011	12:14:20 PM	PH3 valve closed
8/25/2011	12:14:20 PM	SiCl4 pre valve closed
8/25/2011	12:14:20 PM	SiCl4 post valve closed
8/25/2011	12:14:20 PM	Bypass valve closed
8/25/2011	12:14:20 PM	Bubbler valve closed
8/25/2011	12:14:20 PM	Main Vac valve opened
8/25/2011	12:14:20 PM	Helium MFC set to  0.000000
8/25/2011	12:14:20 PM	H2 MFC set to  0.000000
8/25/2011	12:14:20 PM	BCl3 MFC set to  0.000000
8/25/2011	12:14:20 PM	PHl3 MFC set to  0.000000
8/25/2011	12:14:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:14:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:14:20 PM	Tube furnace set to 0
8/25/2011	12:14:50 PM	H2 valve closed
8/25/2011	12:14:50 PM	BCl3 valve closed
8/25/2011	12:14:50 PM	PH3 valve closed
8/25/2011	12:14:50 PM	SiCl4 pre valve closed
8/25/2011	12:14:50 PM	SiCl4 post valve closed
8/25/2011	12:14:50 PM	Bypass valve closed
8/25/2011	12:14:50 PM	Bubbler valve closed
8/25/2011	12:14:50 PM	Helium valve opened
8/25/2011	12:14:50 PM	Main Vac valve opened
8/25/2011	12:14:50 PM	Helium MFC set to  20.000000
8/25/2011	12:14:50 PM	H2 MFC set to  0.000000
8/25/2011	12:14:50 PM	BCl3 MFC set to  0.000000
8/25/2011	12:14:50 PM	PHl3 MFC set to  0.000000
8/25/2011	12:14:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:14:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:14:50 PM	Tube furnace set to 0
8/25/2011	12:15:20 PM	Helium valve closed
8/25/2011	12:15:20 PM	H2 valve closed
8/25/2011	12:15:20 PM	BCl3 valve closed
8/25/2011	12:15:20 PM	PH3 valve closed
8/25/2011	12:15:20 PM	SiCl4 pre valve closed
8/25/2011	12:15:20 PM	SiCl4 post valve closed
8/25/2011	12:15:20 PM	Bypass valve closed
8/25/2011	12:15:20 PM	Bubbler valve closed
8/25/2011	12:15:20 PM	Main Vac valve opened
8/25/2011	12:15:20 PM	Helium MFC set to  0.000000
8/25/2011	12:15:20 PM	H2 MFC set to  0.000000
8/25/2011	12:15:20 PM	BCl3 MFC set to  0.000000
8/25/2011	12:15:20 PM	PHl3 MFC set to  0.000000
8/25/2011	12:15:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:15:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:15:21 PM	Tube furnace set to 0
8/25/2011	12:15:51 PM	H2 valve closed
8/25/2011	12:15:51 PM	BCl3 valve closed
8/25/2011	12:15:51 PM	PH3 valve closed
8/25/2011	12:15:51 PM	SiCl4 pre valve closed
8/25/2011	12:15:51 PM	SiCl4 post valve closed
8/25/2011	12:15:51 PM	Bypass valve closed
8/25/2011	12:15:51 PM	Bubbler valve closed
8/25/2011	12:15:51 PM	Helium valve opened
8/25/2011	12:15:51 PM	Main Vac valve opened
8/25/2011	12:15:51 PM	Helium MFC set to  20.000000
8/25/2011	12:15:51 PM	H2 MFC set to  0.000000
8/25/2011	12:15:51 PM	BCl3 MFC set to  0.000000
8/25/2011	12:15:51 PM	PHl3 MFC set to  0.000000
8/25/2011	12:15:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:15:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:15:51 PM	Tube furnace set to 0
8/25/2011	12:16:21 PM	Helium valve closed
8/25/2011	12:16:21 PM	H2 valve closed
8/25/2011	12:16:21 PM	BCl3 valve closed
8/25/2011	12:16:21 PM	PH3 valve closed
8/25/2011	12:16:21 PM	SiCl4 pre valve closed
8/25/2011	12:16:21 PM	SiCl4 post valve closed
8/25/2011	12:16:21 PM	Bypass valve closed
8/25/2011	12:16:21 PM	Bubbler valve closed
8/25/2011	12:16:21 PM	Main Vac valve opened
8/25/2011	12:16:21 PM	Helium MFC set to  0.000000
8/25/2011	12:16:21 PM	H2 MFC set to  0.000000
8/25/2011	12:16:21 PM	BCl3 MFC set to  0.000000
8/25/2011	12:16:21 PM	PHl3 MFC set to  0.000000
8/25/2011	12:16:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:16:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:16:21 PM	Tube furnace set to 0
8/25/2011	12:16:51 PM	H2 valve closed
8/25/2011	12:16:51 PM	BCl3 valve closed
8/25/2011	12:16:51 PM	PH3 valve closed
8/25/2011	12:16:51 PM	SiCl4 pre valve closed
8/25/2011	12:16:51 PM	SiCl4 post valve closed
8/25/2011	12:16:51 PM	Bypass valve closed
8/25/2011	12:16:51 PM	Bubbler valve closed
8/25/2011	12:16:51 PM	Helium valve opened
8/25/2011	12:16:51 PM	Main Vac valve opened
8/25/2011	12:16:51 PM	Helium MFC set to  20.000000
8/25/2011	12:16:51 PM	H2 MFC set to  0.000000
8/25/2011	12:16:51 PM	BCl3 MFC set to  0.000000
8/25/2011	12:16:51 PM	PHl3 MFC set to  0.000000
8/25/2011	12:16:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:16:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:16:51 PM	Tube furnace set to 0
8/25/2011	12:17:21 PM	Helium valve closed
8/25/2011	12:17:21 PM	H2 valve closed
8/25/2011	12:17:21 PM	BCl3 valve closed
8/25/2011	12:17:21 PM	PH3 valve closed
8/25/2011	12:17:21 PM	SiCl4 pre valve closed
8/25/2011	12:17:21 PM	SiCl4 post valve closed
8/25/2011	12:17:21 PM	Bypass valve closed
8/25/2011	12:17:21 PM	Bubbler valve closed
8/25/2011	12:17:21 PM	Main Vac valve opened
8/25/2011	12:17:21 PM	Helium MFC set to  0.000000
8/25/2011	12:17:21 PM	H2 MFC set to  0.000000
8/25/2011	12:17:21 PM	BCl3 MFC set to  0.000000
8/25/2011	12:17:21 PM	PHl3 MFC set to  0.000000
8/25/2011	12:17:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:17:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:17:21 PM	Tube furnace set to 0
8/25/2011	12:17:51 PM	H2 valve closed
8/25/2011	12:17:51 PM	BCl3 valve closed
8/25/2011	12:17:51 PM	PH3 valve closed
8/25/2011	12:17:51 PM	SiCl4 pre valve closed
8/25/2011	12:17:51 PM	SiCl4 post valve closed
8/25/2011	12:17:51 PM	Bypass valve closed
8/25/2011	12:17:51 PM	Bubbler valve closed
8/25/2011	12:17:51 PM	Helium valve opened
8/25/2011	12:17:51 PM	Main Vac valve opened
8/25/2011	12:17:51 PM	Helium MFC set to  20.000000
8/25/2011	12:17:51 PM	H2 MFC set to  0.000000
8/25/2011	12:17:51 PM	BCl3 MFC set to  0.000000
8/25/2011	12:17:51 PM	PHl3 MFC set to  0.000000
8/25/2011	12:17:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:17:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:17:52 PM	Tube furnace set to 0
8/25/2011	12:18:22 PM	Helium valve closed
8/25/2011	12:18:22 PM	H2 valve closed
8/25/2011	12:18:22 PM	BCl3 valve closed
8/25/2011	12:18:22 PM	PH3 valve closed
8/25/2011	12:18:22 PM	SiCl4 pre valve closed
8/25/2011	12:18:22 PM	SiCl4 post valve closed
8/25/2011	12:18:22 PM	Bypass valve closed
8/25/2011	12:18:22 PM	Bubbler valve closed
8/25/2011	12:18:22 PM	Main Vac valve opened
8/25/2011	12:18:22 PM	Helium MFC set to  0.000000
8/25/2011	12:18:22 PM	H2 MFC set to  0.000000
8/25/2011	12:18:22 PM	BCl3 MFC set to  0.000000
8/25/2011	12:18:22 PM	PHl3 MFC set to  0.000000
8/25/2011	12:18:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:18:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:18:22 PM	Tube furnace set to 0
8/25/2011	12:18:52 PM	H2 valve closed
8/25/2011	12:18:52 PM	BCl3 valve closed
8/25/2011	12:18:52 PM	PH3 valve closed
8/25/2011	12:18:52 PM	SiCl4 pre valve closed
8/25/2011	12:18:52 PM	SiCl4 post valve closed
8/25/2011	12:18:52 PM	Bypass valve closed
8/25/2011	12:18:52 PM	Bubbler valve closed
8/25/2011	12:18:52 PM	Helium valve opened
8/25/2011	12:18:52 PM	Main Vac valve opened
8/25/2011	12:18:52 PM	Helium MFC set to  20.000000
8/25/2011	12:18:52 PM	H2 MFC set to  0.000000
8/25/2011	12:18:52 PM	BCl3 MFC set to  0.000000
8/25/2011	12:18:52 PM	PHl3 MFC set to  0.000000
8/25/2011	12:18:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:18:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:18:52 PM	Tube furnace set to 0
8/25/2011	12:19:22 PM	Helium valve closed
8/25/2011	12:19:22 PM	H2 valve closed
8/25/2011	12:19:22 PM	BCl3 valve closed
8/25/2011	12:19:22 PM	PH3 valve closed
8/25/2011	12:19:22 PM	SiCl4 pre valve closed
8/25/2011	12:19:22 PM	SiCl4 post valve closed
8/25/2011	12:19:22 PM	Bypass valve closed
8/25/2011	12:19:22 PM	Bubbler valve closed
8/25/2011	12:19:22 PM	Main Vac valve opened
8/25/2011	12:19:22 PM	Helium MFC set to  0.000000
8/25/2011	12:19:22 PM	H2 MFC set to  0.000000
8/25/2011	12:19:22 PM	BCl3 MFC set to  0.000000
8/25/2011	12:19:22 PM	PHl3 MFC set to  0.000000
8/25/2011	12:19:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:19:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:19:22 PM	Tube furnace set to 0
8/25/2011	12:19:42 PM	Run aborted at 12:19 PM
8/25/2011	12:19:42 PM	Helium valve closed
8/25/2011	12:19:42 PM	H2 valve closed
8/25/2011	12:19:42 PM	BCl3 valve closed
8/25/2011	12:19:42 PM	PH3 valve closed
8/25/2011	12:19:42 PM	SiCl4 pre valve closed
8/25/2011	12:19:42 PM	SiCl4 post valve closed
8/25/2011	12:19:42 PM	Bypass valve closed
8/25/2011	12:19:42 PM	Main Vac valve closed
8/25/2011	12:19:42 PM	Bubbler valve closed
8/25/2011	12:19:42 PM	Helium MFC set to  0.000000
8/25/2011	12:19:42 PM	H2 MFC set to  0.000000
8/25/2011	12:19:42 PM	BCl3 MFC set to  0.000000
8/25/2011	12:19:42 PM	PHl3 MFC set to  0.000000
8/25/2011	12:19:42 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:19:42 PM	Tube furnace set to 0
8/25/2011	12:19:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	12:19:44 PM	Main Vac valve opened
8/25/2011	12:24:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	12:25:03 PM	Recipe started at 12:24 PM
8/25/2011	12:25:03 PM	Helium valve closed
8/25/2011	12:25:03 PM	H2 valve closed
8/25/2011	12:25:03 PM	BCl3 valve closed
8/25/2011	12:25:03 PM	PH3 valve closed
8/25/2011	12:25:03 PM	SiCl4 pre valve closed
8/25/2011	12:25:03 PM	SiCl4 post valve closed
8/25/2011	12:25:03 PM	Main Vac valve closed
8/25/2011	12:25:03 PM	Bubbler valve closed
8/25/2011	12:25:03 PM	Bypass valve opened
8/25/2011	12:25:03 PM	Helium MFC set to  0.000000
8/25/2011	12:25:03 PM	H2 MFC set to  0.000000
8/25/2011	12:25:03 PM	BCl3 MFC set to  0.000000
8/25/2011	12:25:03 PM	PHl3 MFC set to  0.000000
8/25/2011	12:25:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:25:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:25:03 PM	Tube furnace set to 0
8/25/2011	12:25:03 PM	Helium valve closed
8/25/2011	12:25:03 PM	H2 valve closed
8/25/2011	12:25:03 PM	BCl3 valve closed
8/25/2011	12:25:03 PM	PH3 valve closed
8/25/2011	12:25:03 PM	SiCl4 pre valve closed
8/25/2011	12:25:03 PM	SiCl4 post valve closed
8/25/2011	12:25:03 PM	Main Vac valve closed
8/25/2011	12:25:03 PM	Bubbler valve closed
8/25/2011	12:25:03 PM	Bypass valve opened
8/25/2011	12:25:03 PM	Helium MFC set to  0.000000
8/25/2011	12:25:03 PM	H2 MFC set to  0.000000
8/25/2011	12:25:03 PM	BCl3 MFC set to  0.000000
8/25/2011	12:25:03 PM	PHl3 MFC set to  0.000000
8/25/2011	12:25:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:25:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:25:03 PM	Tube furnace set to 0
8/25/2011	12:25:06 PM	Helium valve closed
8/25/2011	12:25:06 PM	H2 valve closed
8/25/2011	12:25:06 PM	BCl3 valve closed
8/25/2011	12:25:06 PM	PH3 valve closed
8/25/2011	12:25:06 PM	SiCl4 pre valve closed
8/25/2011	12:25:06 PM	SiCl4 post valve closed
8/25/2011	12:25:06 PM	Bypass valve closed
8/25/2011	12:25:06 PM	Bubbler valve closed
8/25/2011	12:25:06 PM	Main Vac valve opened
8/25/2011	12:25:06 PM	Helium MFC set to  0.000000
8/25/2011	12:25:06 PM	H2 MFC set to  0.000000
8/25/2011	12:25:06 PM	BCl3 MFC set to  0.000000
8/25/2011	12:25:06 PM	PHl3 MFC set to  0.000000
8/25/2011	12:25:06 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:25:06 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:25:06 PM	Tube furnace set to 0
8/25/2011	12:25:36 PM	H2 valve closed
8/25/2011	12:25:36 PM	BCl3 valve closed
8/25/2011	12:25:36 PM	PH3 valve closed
8/25/2011	12:25:36 PM	SiCl4 pre valve closed
8/25/2011	12:25:36 PM	SiCl4 post valve closed
8/25/2011	12:25:36 PM	Bypass valve closed
8/25/2011	12:25:36 PM	Bubbler valve closed
8/25/2011	12:25:36 PM	Helium valve opened
8/25/2011	12:25:36 PM	Main Vac valve opened
8/25/2011	12:25:36 PM	Helium MFC set to  20.000000
8/25/2011	12:25:36 PM	H2 MFC set to  0.000000
8/25/2011	12:25:36 PM	BCl3 MFC set to  0.000000
8/25/2011	12:25:36 PM	PHl3 MFC set to  0.000000
8/25/2011	12:25:36 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:25:36 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:25:36 PM	Tube furnace set to 0
8/25/2011	12:26:06 PM	Helium valve closed
8/25/2011	12:26:06 PM	H2 valve closed
8/25/2011	12:26:06 PM	BCl3 valve closed
8/25/2011	12:26:06 PM	PH3 valve closed
8/25/2011	12:26:06 PM	SiCl4 pre valve closed
8/25/2011	12:26:06 PM	SiCl4 post valve closed
8/25/2011	12:26:06 PM	Bypass valve closed
8/25/2011	12:26:06 PM	Bubbler valve closed
8/25/2011	12:26:06 PM	Main Vac valve opened
8/25/2011	12:26:06 PM	Helium MFC set to  0.000000
8/25/2011	12:26:06 PM	H2 MFC set to  0.000000
8/25/2011	12:26:06 PM	BCl3 MFC set to  0.000000
8/25/2011	12:26:06 PM	PHl3 MFC set to  0.000000
8/25/2011	12:26:06 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:26:06 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:26:06 PM	Tube furnace set to 0
8/25/2011	12:26:36 PM	H2 valve closed
8/25/2011	12:26:36 PM	BCl3 valve closed
8/25/2011	12:26:36 PM	PH3 valve closed
8/25/2011	12:26:36 PM	SiCl4 pre valve closed
8/25/2011	12:26:36 PM	SiCl4 post valve closed
8/25/2011	12:26:36 PM	Bypass valve closed
8/25/2011	12:26:36 PM	Bubbler valve closed
8/25/2011	12:26:36 PM	Helium valve opened
8/25/2011	12:26:36 PM	Main Vac valve opened
8/25/2011	12:26:36 PM	Helium MFC set to  20.000000
8/25/2011	12:26:36 PM	H2 MFC set to  0.000000
8/25/2011	12:26:36 PM	BCl3 MFC set to  0.000000
8/25/2011	12:26:36 PM	PHl3 MFC set to  0.000000
8/25/2011	12:26:36 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:26:36 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:26:36 PM	Tube furnace set to 0
8/25/2011	12:27:07 PM	Helium valve closed
8/25/2011	12:27:07 PM	H2 valve closed
8/25/2011	12:27:07 PM	BCl3 valve closed
8/25/2011	12:27:07 PM	PH3 valve closed
8/25/2011	12:27:07 PM	SiCl4 pre valve closed
8/25/2011	12:27:07 PM	SiCl4 post valve closed
8/25/2011	12:27:07 PM	Bypass valve closed
8/25/2011	12:27:07 PM	Bubbler valve closed
8/25/2011	12:27:07 PM	Main Vac valve opened
8/25/2011	12:27:07 PM	Helium MFC set to  0.000000
8/25/2011	12:27:07 PM	H2 MFC set to  0.000000
8/25/2011	12:27:07 PM	BCl3 MFC set to  0.000000
8/25/2011	12:27:07 PM	PHl3 MFC set to  0.000000
8/25/2011	12:27:07 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:27:07 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:27:07 PM	Tube furnace set to 0
8/25/2011	12:27:37 PM	H2 valve closed
8/25/2011	12:27:37 PM	BCl3 valve closed
8/25/2011	12:27:37 PM	PH3 valve closed
8/25/2011	12:27:37 PM	SiCl4 pre valve closed
8/25/2011	12:27:37 PM	SiCl4 post valve closed
8/25/2011	12:27:37 PM	Bypass valve closed
8/25/2011	12:27:37 PM	Bubbler valve closed
8/25/2011	12:27:37 PM	Helium valve opened
8/25/2011	12:27:37 PM	Main Vac valve opened
8/25/2011	12:27:37 PM	Helium MFC set to  20.000000
8/25/2011	12:27:37 PM	H2 MFC set to  0.000000
8/25/2011	12:27:37 PM	BCl3 MFC set to  0.000000
8/25/2011	12:27:37 PM	PHl3 MFC set to  0.000000
8/25/2011	12:27:37 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:27:37 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:27:37 PM	Tube furnace set to 0
8/25/2011	12:28:07 PM	Helium valve closed
8/25/2011	12:28:07 PM	H2 valve closed
8/25/2011	12:28:07 PM	BCl3 valve closed
8/25/2011	12:28:07 PM	PH3 valve closed
8/25/2011	12:28:07 PM	SiCl4 pre valve closed
8/25/2011	12:28:07 PM	SiCl4 post valve closed
8/25/2011	12:28:07 PM	Bypass valve closed
8/25/2011	12:28:07 PM	Bubbler valve closed
8/25/2011	12:28:07 PM	Main Vac valve opened
8/25/2011	12:28:07 PM	Helium MFC set to  0.000000
8/25/2011	12:28:07 PM	H2 MFC set to  0.000000
8/25/2011	12:28:07 PM	BCl3 MFC set to  0.000000
8/25/2011	12:28:07 PM	PHl3 MFC set to  0.000000
8/25/2011	12:28:07 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:28:07 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:28:07 PM	Tube furnace set to 0
8/25/2011	12:28:37 PM	H2 valve closed
8/25/2011	12:28:37 PM	BCl3 valve closed
8/25/2011	12:28:37 PM	PH3 valve closed
8/25/2011	12:28:37 PM	SiCl4 pre valve closed
8/25/2011	12:28:37 PM	SiCl4 post valve closed
8/25/2011	12:28:37 PM	Bypass valve closed
8/25/2011	12:28:37 PM	Bubbler valve closed
8/25/2011	12:28:37 PM	Helium valve opened
8/25/2011	12:28:37 PM	Main Vac valve opened
8/25/2011	12:28:37 PM	Helium MFC set to  20.000000
8/25/2011	12:28:37 PM	H2 MFC set to  0.000000
8/25/2011	12:28:37 PM	BCl3 MFC set to  0.000000
8/25/2011	12:28:37 PM	PHl3 MFC set to  0.000000
8/25/2011	12:28:37 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:28:37 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:28:37 PM	Tube furnace set to 0
8/25/2011	12:29:07 PM	Helium valve closed
8/25/2011	12:29:07 PM	H2 valve closed
8/25/2011	12:29:07 PM	BCl3 valve closed
8/25/2011	12:29:07 PM	PH3 valve closed
8/25/2011	12:29:07 PM	SiCl4 pre valve closed
8/25/2011	12:29:07 PM	SiCl4 post valve closed
8/25/2011	12:29:07 PM	Bypass valve closed
8/25/2011	12:29:07 PM	Bubbler valve closed
8/25/2011	12:29:07 PM	Main Vac valve opened
8/25/2011	12:29:07 PM	Helium MFC set to  0.000000
8/25/2011	12:29:07 PM	H2 MFC set to  0.000000
8/25/2011	12:29:07 PM	BCl3 MFC set to  0.000000
8/25/2011	12:29:07 PM	PHl3 MFC set to  0.000000
8/25/2011	12:29:07 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:29:07 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:29:07 PM	Tube furnace set to 0
8/25/2011	12:29:38 PM	H2 valve closed
8/25/2011	12:29:38 PM	BCl3 valve closed
8/25/2011	12:29:38 PM	PH3 valve closed
8/25/2011	12:29:38 PM	SiCl4 pre valve closed
8/25/2011	12:29:38 PM	SiCl4 post valve closed
8/25/2011	12:29:38 PM	Bypass valve closed
8/25/2011	12:29:38 PM	Bubbler valve closed
8/25/2011	12:29:38 PM	Helium valve opened
8/25/2011	12:29:38 PM	Main Vac valve opened
8/25/2011	12:29:38 PM	Helium MFC set to  20.000000
8/25/2011	12:29:38 PM	H2 MFC set to  0.000000
8/25/2011	12:29:38 PM	BCl3 MFC set to  0.000000
8/25/2011	12:29:38 PM	PHl3 MFC set to  0.000000
8/25/2011	12:29:38 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:29:38 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:29:38 PM	Tube furnace set to 0
8/25/2011	12:30:08 PM	Helium valve closed
8/25/2011	12:30:08 PM	H2 valve closed
8/25/2011	12:30:08 PM	BCl3 valve closed
8/25/2011	12:30:08 PM	PH3 valve closed
8/25/2011	12:30:08 PM	SiCl4 pre valve closed
8/25/2011	12:30:08 PM	SiCl4 post valve closed
8/25/2011	12:30:08 PM	Bypass valve closed
8/25/2011	12:30:08 PM	Bubbler valve closed
8/25/2011	12:30:08 PM	Main Vac valve opened
8/25/2011	12:30:08 PM	Helium MFC set to  0.000000
8/25/2011	12:30:08 PM	H2 MFC set to  0.000000
8/25/2011	12:30:08 PM	BCl3 MFC set to  0.000000
8/25/2011	12:30:08 PM	PHl3 MFC set to  0.000000
8/25/2011	12:30:08 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:30:08 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:30:08 PM	Tube furnace set to 0
8/25/2011	12:30:38 PM	H2 valve closed
8/25/2011	12:30:38 PM	BCl3 valve closed
8/25/2011	12:30:38 PM	PH3 valve closed
8/25/2011	12:30:38 PM	SiCl4 pre valve closed
8/25/2011	12:30:38 PM	SiCl4 post valve closed
8/25/2011	12:30:38 PM	Bypass valve closed
8/25/2011	12:30:38 PM	Bubbler valve closed
8/25/2011	12:30:38 PM	Helium valve opened
8/25/2011	12:30:38 PM	Main Vac valve opened
8/25/2011	12:30:38 PM	Helium MFC set to  20.000000
8/25/2011	12:30:38 PM	H2 MFC set to  0.000000
8/25/2011	12:30:38 PM	BCl3 MFC set to  0.000000
8/25/2011	12:30:38 PM	PHl3 MFC set to  0.000000
8/25/2011	12:30:38 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:30:38 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:30:38 PM	Tube furnace set to 0
8/25/2011	12:31:08 PM	Helium valve closed
8/25/2011	12:31:08 PM	H2 valve closed
8/25/2011	12:31:08 PM	BCl3 valve closed
8/25/2011	12:31:08 PM	PH3 valve closed
8/25/2011	12:31:08 PM	SiCl4 pre valve closed
8/25/2011	12:31:08 PM	SiCl4 post valve closed
8/25/2011	12:31:08 PM	Bypass valve closed
8/25/2011	12:31:08 PM	Bubbler valve closed
8/25/2011	12:31:08 PM	Main Vac valve opened
8/25/2011	12:31:08 PM	Helium MFC set to  0.000000
8/25/2011	12:31:08 PM	H2 MFC set to  0.000000
8/25/2011	12:31:08 PM	BCl3 MFC set to  0.000000
8/25/2011	12:31:08 PM	PHl3 MFC set to  0.000000
8/25/2011	12:31:08 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:31:08 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:31:08 PM	Tube furnace set to 0
8/25/2011	12:31:38 PM	H2 valve closed
8/25/2011	12:31:38 PM	BCl3 valve closed
8/25/2011	12:31:38 PM	PH3 valve closed
8/25/2011	12:31:38 PM	SiCl4 pre valve closed
8/25/2011	12:31:38 PM	SiCl4 post valve closed
8/25/2011	12:31:38 PM	Bypass valve closed
8/25/2011	12:31:38 PM	Bubbler valve closed
8/25/2011	12:31:38 PM	Helium valve opened
8/25/2011	12:31:38 PM	Main Vac valve opened
8/25/2011	12:31:38 PM	Helium MFC set to  20.000000
8/25/2011	12:31:38 PM	H2 MFC set to  0.000000
8/25/2011	12:31:38 PM	BCl3 MFC set to  0.000000
8/25/2011	12:31:38 PM	PHl3 MFC set to  0.000000
8/25/2011	12:31:38 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:31:38 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:31:39 PM	Tube furnace set to 0
8/25/2011	12:32:09 PM	Helium valve closed
8/25/2011	12:32:09 PM	H2 valve closed
8/25/2011	12:32:09 PM	BCl3 valve closed
8/25/2011	12:32:09 PM	PH3 valve closed
8/25/2011	12:32:09 PM	SiCl4 pre valve closed
8/25/2011	12:32:09 PM	SiCl4 post valve closed
8/25/2011	12:32:09 PM	Bypass valve closed
8/25/2011	12:32:09 PM	Bubbler valve closed
8/25/2011	12:32:09 PM	Main Vac valve opened
8/25/2011	12:32:09 PM	Helium MFC set to  0.000000
8/25/2011	12:32:09 PM	H2 MFC set to  0.000000
8/25/2011	12:32:09 PM	BCl3 MFC set to  0.000000
8/25/2011	12:32:09 PM	PHl3 MFC set to  0.000000
8/25/2011	12:32:09 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:32:09 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:32:09 PM	Tube furnace set to 0
8/25/2011	12:32:39 PM	H2 valve closed
8/25/2011	12:32:39 PM	BCl3 valve closed
8/25/2011	12:32:39 PM	PH3 valve closed
8/25/2011	12:32:39 PM	SiCl4 pre valve closed
8/25/2011	12:32:39 PM	SiCl4 post valve closed
8/25/2011	12:32:39 PM	Bypass valve closed
8/25/2011	12:32:39 PM	Bubbler valve closed
8/25/2011	12:32:39 PM	Helium valve opened
8/25/2011	12:32:39 PM	Main Vac valve opened
8/25/2011	12:32:39 PM	Helium MFC set to  20.000000
8/25/2011	12:32:39 PM	H2 MFC set to  0.000000
8/25/2011	12:32:39 PM	BCl3 MFC set to  0.000000
8/25/2011	12:32:39 PM	PHl3 MFC set to  0.000000
8/25/2011	12:32:39 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:32:39 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:32:39 PM	Tube furnace set to 0
8/25/2011	12:33:09 PM	Helium valve closed
8/25/2011	12:33:09 PM	H2 valve closed
8/25/2011	12:33:09 PM	BCl3 valve closed
8/25/2011	12:33:09 PM	PH3 valve closed
8/25/2011	12:33:09 PM	SiCl4 pre valve closed
8/25/2011	12:33:09 PM	SiCl4 post valve closed
8/25/2011	12:33:09 PM	Bypass valve closed
8/25/2011	12:33:09 PM	Bubbler valve closed
8/25/2011	12:33:09 PM	Main Vac valve opened
8/25/2011	12:33:09 PM	Helium MFC set to  0.000000
8/25/2011	12:33:09 PM	H2 MFC set to  0.000000
8/25/2011	12:33:09 PM	BCl3 MFC set to  0.000000
8/25/2011	12:33:09 PM	PHl3 MFC set to  0.000000
8/25/2011	12:33:09 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:33:09 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:33:09 PM	Tube furnace set to 0
8/25/2011	12:33:39 PM	H2 valve closed
8/25/2011	12:33:39 PM	BCl3 valve closed
8/25/2011	12:33:39 PM	PH3 valve closed
8/25/2011	12:33:39 PM	SiCl4 pre valve closed
8/25/2011	12:33:39 PM	SiCl4 post valve closed
8/25/2011	12:33:39 PM	Bypass valve closed
8/25/2011	12:33:39 PM	Bubbler valve closed
8/25/2011	12:33:39 PM	Helium valve opened
8/25/2011	12:33:39 PM	Main Vac valve opened
8/25/2011	12:33:39 PM	Helium MFC set to  20.000000
8/25/2011	12:33:39 PM	H2 MFC set to  0.000000
8/25/2011	12:33:39 PM	BCl3 MFC set to  0.000000
8/25/2011	12:33:39 PM	PHl3 MFC set to  0.000000
8/25/2011	12:33:39 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:33:39 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:33:39 PM	Tube furnace set to 0
8/25/2011	12:34:09 PM	Helium valve closed
8/25/2011	12:34:09 PM	H2 valve closed
8/25/2011	12:34:09 PM	BCl3 valve closed
8/25/2011	12:34:09 PM	PH3 valve closed
8/25/2011	12:34:09 PM	SiCl4 pre valve closed
8/25/2011	12:34:09 PM	SiCl4 post valve closed
8/25/2011	12:34:09 PM	Bypass valve closed
8/25/2011	12:34:09 PM	Bubbler valve closed
8/25/2011	12:34:09 PM	Main Vac valve opened
8/25/2011	12:34:09 PM	Helium MFC set to  0.000000
8/25/2011	12:34:09 PM	H2 MFC set to  0.000000
8/25/2011	12:34:09 PM	BCl3 MFC set to  0.000000
8/25/2011	12:34:09 PM	PHl3 MFC set to  0.000000
8/25/2011	12:34:09 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:34:09 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:34:10 PM	Tube furnace set to 0
8/25/2011	12:34:19 PM	Run aborted at 12:34 PM
8/25/2011	12:34:19 PM	Helium valve closed
8/25/2011	12:34:19 PM	H2 valve closed
8/25/2011	12:34:19 PM	BCl3 valve closed
8/25/2011	12:34:19 PM	PH3 valve closed
8/25/2011	12:34:19 PM	SiCl4 pre valve closed
8/25/2011	12:34:19 PM	SiCl4 post valve closed
8/25/2011	12:34:19 PM	Bypass valve closed
8/25/2011	12:34:19 PM	Main Vac valve closed
8/25/2011	12:34:19 PM	Bubbler valve closed
8/25/2011	12:34:19 PM	Helium MFC set to  0.000000
8/25/2011	12:34:19 PM	H2 MFC set to  0.000000
8/25/2011	12:34:19 PM	BCl3 MFC set to  0.000000
8/25/2011	12:34:19 PM	PHl3 MFC set to  0.000000
8/25/2011	12:34:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:34:19 PM	Tube furnace set to 0
8/25/2011	12:34:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	12:34:21 PM	Main Vac valve opened
8/25/2011	12:40:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	12:40:41 PM	Recipe started at 12:40 PM
8/25/2011	12:40:41 PM	Helium valve closed
8/25/2011	12:40:41 PM	H2 valve closed
8/25/2011	12:40:41 PM	BCl3 valve closed
8/25/2011	12:40:41 PM	PH3 valve closed
8/25/2011	12:40:41 PM	SiCl4 pre valve closed
8/25/2011	12:40:41 PM	SiCl4 post valve closed
8/25/2011	12:40:41 PM	Main Vac valve closed
8/25/2011	12:40:41 PM	Bypass valve closed
8/25/2011	12:40:41 PM	Bubbler valve closed
8/25/2011	12:40:41 PM	Helium MFC set to  0.000000
8/25/2011	12:40:41 PM	H2 MFC set to  0.000000
8/25/2011	12:40:41 PM	BCl3 MFC set to  0.000000
8/25/2011	12:40:41 PM	PHl3 MFC set to  0.000000
8/25/2011	12:40:41 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:40:41 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:40:41 PM	Tube furnace set to 0
8/25/2011	12:40:41 PM	Run finished at 12:40 PM
8/25/2011	12:40:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	12:40:54 PM	Main Vac valve opened
8/25/2011	12:44:05 PM	Helium MFC set to  5.000000
8/25/2011	12:44:07 PM	Helium valve opened
8/25/2011	12:44:16 PM	Helium valve closed
8/25/2011	12:44:30 PM	Helium MFC set to  10.000000
8/25/2011	12:44:33 PM	Helium valve opened
8/25/2011	12:44:40 PM	Helium valve closed
8/25/2011	12:44:58 PM	Helium valve opened
8/25/2011	12:45:49 PM	Helium valve closed
8/25/2011	12:46:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	12:46:25 PM	Recipe started at 12:46 PM
8/25/2011	12:46:26 PM	Helium valve closed
8/25/2011	12:46:26 PM	H2 valve closed
8/25/2011	12:46:26 PM	BCl3 valve closed
8/25/2011	12:46:26 PM	PH3 valve closed
8/25/2011	12:46:26 PM	SiCl4 pre valve closed
8/25/2011	12:46:26 PM	SiCl4 post valve closed
8/25/2011	12:46:26 PM	Main Vac valve closed
8/25/2011	12:46:26 PM	Bypass valve closed
8/25/2011	12:46:26 PM	Bubbler valve closed
8/25/2011	12:46:26 PM	Helium MFC set to  0.000000
8/25/2011	12:46:26 PM	H2 MFC set to  0.000000
8/25/2011	12:46:26 PM	BCl3 MFC set to  0.000000
8/25/2011	12:46:26 PM	PHl3 MFC set to  0.000000
8/25/2011	12:46:26 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:46:26 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:46:26 PM	Tube furnace set to 0
8/25/2011	12:46:26 PM	Run finished at 12:46 PM
8/25/2011	12:46:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	12:46:43 PM	Main Vac valve opened
8/25/2011	12:50:08 PM	Recipe started at 12:50 PM
8/25/2011	12:50:08 PM	Helium valve closed
8/25/2011	12:50:08 PM	H2 valve closed
8/25/2011	12:50:08 PM	BCl3 valve closed
8/25/2011	12:50:08 PM	PH3 valve closed
8/25/2011	12:50:08 PM	SiCl4 pre valve closed
8/25/2011	12:50:08 PM	SiCl4 post valve closed
8/25/2011	12:50:08 PM	Main Vac valve closed
8/25/2011	12:50:08 PM	Bypass valve closed
8/25/2011	12:50:08 PM	Bubbler valve closed
8/25/2011	12:50:08 PM	Helium MFC set to  0.000000
8/25/2011	12:50:08 PM	H2 MFC set to  0.000000
8/25/2011	12:50:08 PM	BCl3 MFC set to  0.000000
8/25/2011	12:50:08 PM	PHl3 MFC set to  0.000000
8/25/2011	12:50:08 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:50:08 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:50:08 PM	Tube furnace set to 0
8/25/2011	12:50:11 PM	Helium valve closed
8/25/2011	12:50:11 PM	BCl3 valve closed
8/25/2011	12:50:11 PM	PH3 valve closed
8/25/2011	12:50:11 PM	SiCl4 pre valve closed
8/25/2011	12:50:11 PM	SiCl4 post valve closed
8/25/2011	12:50:11 PM	Main Vac valve closed
8/25/2011	12:50:11 PM	Bypass valve closed
8/25/2011	12:50:11 PM	Bubbler valve closed
8/25/2011	12:50:11 PM	H2 valve opened
8/25/2011	12:50:11 PM	Helium MFC set to  0.000000
8/25/2011	12:50:11 PM	H2 MFC set to  500.000000
8/25/2011	12:50:11 PM	BCl3 MFC set to  0.000000
8/25/2011	12:50:11 PM	PHl3 MFC set to  0.000000
8/25/2011	12:50:11 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:50:11 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:50:12 PM	Tube furnace set to 0
8/25/2011	12:51:19 PM	Helium valve closed
8/25/2011	12:51:19 PM	BCl3 valve closed
8/25/2011	12:51:19 PM	PH3 valve closed
8/25/2011	12:51:19 PM	SiCl4 pre valve closed
8/25/2011	12:51:19 PM	SiCl4 post valve closed
8/25/2011	12:51:19 PM	Main Vac valve closed
8/25/2011	12:51:19 PM	Bypass valve closed
8/25/2011	12:51:19 PM	H2 valve opened
8/25/2011	12:51:19 PM	Bubbler valve opened
8/25/2011	12:51:19 PM	Helium MFC set to  0.000000
8/25/2011	12:51:19 PM	H2 MFC set to  500.000000
8/25/2011	12:51:19 PM	BCl3 MFC set to  0.000000
8/25/2011	12:51:19 PM	PHl3 MFC set to  0.000000
8/25/2011	12:51:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:51:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:51:19 PM	Tube furnace set to 0
8/25/2011	12:51:20 PM	Helium valve closed
8/25/2011	12:51:20 PM	BCl3 valve closed
8/25/2011	12:51:20 PM	PH3 valve closed
8/25/2011	12:51:20 PM	SiCl4 pre valve closed
8/25/2011	12:51:20 PM	SiCl4 post valve closed
8/25/2011	12:51:20 PM	Main Vac valve closed
8/25/2011	12:51:20 PM	Bypass valve closed
8/25/2011	12:51:20 PM	H2 valve opened
8/25/2011	12:51:20 PM	Bubbler valve opened
8/25/2011	12:51:20 PM	Helium MFC set to  0.000000
8/25/2011	12:51:20 PM	H2 MFC set to  500.000000
8/25/2011	12:51:20 PM	BCl3 MFC set to  0.000000
8/25/2011	12:51:20 PM	PHl3 MFC set to  0.000000
8/25/2011	12:51:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	12:51:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	12:51:20 PM	Tube furnace set to 1000
8/25/2011	1:11:20 PM	Helium valve closed
8/25/2011	1:11:20 PM	BCl3 valve closed
8/25/2011	1:11:20 PM	PH3 valve closed
8/25/2011	1:11:20 PM	Main Vac valve closed
8/25/2011	1:11:20 PM	Bypass valve closed
8/25/2011	1:11:20 PM	H2 valve opened
8/25/2011	1:11:20 PM	SiCl4 pre valve opened
8/25/2011	1:11:20 PM	SiCl4 post valve opened
8/25/2011	1:11:20 PM	Bubbler valve opened
8/25/2011	1:11:20 PM	Helium MFC set to  0.000000
8/25/2011	1:11:20 PM	H2 MFC set to  500.000000
8/25/2011	1:11:20 PM	BCl3 MFC set to  0.000000
8/25/2011	1:11:20 PM	PHl3 MFC set to  0.000000
8/25/2011	1:11:20 PM	SiCl4 MFC set to  50.000000
8/25/2011	1:11:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	1:11:20 PM	Tube furnace set to 1000
8/25/2011	1:31:20 PM	Helium valve closed
8/25/2011	1:31:20 PM	BCl3 valve closed
8/25/2011	1:31:20 PM	PH3 valve closed
8/25/2011	1:31:20 PM	Main Vac valve closed
8/25/2011	1:31:20 PM	Bypass valve closed
8/25/2011	1:31:20 PM	H2 valve opened
8/25/2011	1:31:20 PM	SiCl4 pre valve opened
8/25/2011	1:31:20 PM	SiCl4 post valve opened
8/25/2011	1:31:20 PM	Bubbler valve opened
8/25/2011	1:31:20 PM	Helium MFC set to  0.000000
8/25/2011	1:31:20 PM	H2 MFC set to  500.000000
8/25/2011	1:31:20 PM	BCl3 MFC set to  0.000000
8/25/2011	1:31:20 PM	PHl3 MFC set to  0.000000
8/25/2011	1:31:20 PM	SiCl4 MFC set to  50.000000
8/25/2011	1:31:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	1:31:21 PM	Tube furnace set to 875
8/25/2011	1:41:20 PM	H2 valve closed
8/25/2011	1:41:20 PM	BCl3 valve closed
8/25/2011	1:41:21 PM	PH3 valve closed
8/25/2011	1:41:21 PM	SiCl4 pre valve closed
8/25/2011	1:41:21 PM	SiCl4 post valve closed
8/25/2011	1:41:21 PM	Main Vac valve closed
8/25/2011	1:41:21 PM	Bypass valve closed
8/25/2011	1:41:21 PM	Helium valve opened
8/25/2011	1:41:21 PM	Bubbler valve opened
8/25/2011	1:41:21 PM	Helium MFC set to  500.000000
8/25/2011	1:41:21 PM	H2 MFC set to  0.000000
8/25/2011	1:41:21 PM	BCl3 MFC set to  0.000000
8/25/2011	1:41:21 PM	PHl3 MFC set to  0.000000
8/25/2011	1:41:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	1:41:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	1:41:21 PM	Tube furnace set to 0
8/25/2011	2:18:20 PM	Run aborted at 2:18 PM
8/25/2011	2:18:20 PM	Helium valve closed
8/25/2011	2:18:20 PM	H2 valve closed
8/25/2011	2:18:20 PM	BCl3 valve closed
8/25/2011	2:18:20 PM	PH3 valve closed
8/25/2011	2:18:20 PM	SiCl4 pre valve closed
8/25/2011	2:18:20 PM	SiCl4 post valve closed
8/25/2011	2:18:20 PM	Bypass valve closed
8/25/2011	2:18:20 PM	Main Vac valve closed
8/25/2011	2:18:20 PM	Bubbler valve closed
8/25/2011	2:18:20 PM	Helium MFC set to  0.000000
8/25/2011	2:18:20 PM	H2 MFC set to  0.000000
8/25/2011	2:18:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:18:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:18:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:18:21 PM	Tube furnace set to 0
8/25/2011	2:22:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	2:22:46 PM	Recipe started at 2:22 PM
8/25/2011	2:22:46 PM	Helium valve closed
8/25/2011	2:22:46 PM	H2 valve closed
8/25/2011	2:22:46 PM	BCl3 valve closed
8/25/2011	2:22:46 PM	PH3 valve closed
8/25/2011	2:22:46 PM	SiCl4 pre valve closed
8/25/2011	2:22:46 PM	SiCl4 post valve closed
8/25/2011	2:22:46 PM	Main Vac valve closed
8/25/2011	2:22:46 PM	Bubbler valve closed
8/25/2011	2:22:47 PM	Bypass valve opened
8/25/2011	2:22:47 PM	Helium MFC set to  0.000000
8/25/2011	2:22:47 PM	H2 MFC set to  0.000000
8/25/2011	2:22:47 PM	BCl3 MFC set to  0.000000
8/25/2011	2:22:47 PM	PHl3 MFC set to  0.000000
8/25/2011	2:22:47 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:22:47 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:22:47 PM	Tube furnace set to 0
8/25/2011	2:23:56 PM	Helium valve closed
8/25/2011	2:23:56 PM	H2 valve closed
8/25/2011	2:23:56 PM	BCl3 valve closed
8/25/2011	2:23:56 PM	PH3 valve closed
8/25/2011	2:23:56 PM	SiCl4 pre valve closed
8/25/2011	2:23:56 PM	SiCl4 post valve closed
8/25/2011	2:23:56 PM	Main Vac valve closed
8/25/2011	2:23:56 PM	Bubbler valve closed
8/25/2011	2:23:56 PM	Bypass valve opened
8/25/2011	2:23:56 PM	Helium MFC set to  0.000000
8/25/2011	2:23:56 PM	H2 MFC set to  0.000000
8/25/2011	2:23:56 PM	BCl3 MFC set to  0.000000
8/25/2011	2:23:56 PM	PHl3 MFC set to  0.000000
8/25/2011	2:23:56 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:23:56 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:23:56 PM	Tube furnace set to 0
8/25/2011	2:24:56 PM	Helium valve closed
8/25/2011	2:24:56 PM	H2 valve closed
8/25/2011	2:24:56 PM	BCl3 valve closed
8/25/2011	2:24:56 PM	PH3 valve closed
8/25/2011	2:24:56 PM	SiCl4 pre valve closed
8/25/2011	2:24:56 PM	SiCl4 post valve closed
8/25/2011	2:24:56 PM	Bypass valve closed
8/25/2011	2:24:56 PM	Bubbler valve closed
8/25/2011	2:24:56 PM	Main Vac valve opened
8/25/2011	2:24:56 PM	Helium MFC set to  0.000000
8/25/2011	2:24:56 PM	H2 MFC set to  0.000000
8/25/2011	2:24:56 PM	BCl3 MFC set to  0.000000
8/25/2011	2:24:56 PM	PHl3 MFC set to  0.000000
8/25/2011	2:24:56 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:24:56 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:24:56 PM	Tube furnace set to 0
8/25/2011	2:24:57 PM	Run finished at 2:24 PM
8/25/2011	2:24:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	2:31:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	2:32:01 PM	Recipe started at 2:31 PM
8/25/2011	2:32:01 PM	Helium valve closed
8/25/2011	2:32:01 PM	H2 valve closed
8/25/2011	2:32:01 PM	BCl3 valve closed
8/25/2011	2:32:01 PM	PH3 valve closed
8/25/2011	2:32:01 PM	SiCl4 pre valve closed
8/25/2011	2:32:01 PM	SiCl4 post valve closed
8/25/2011	2:32:01 PM	Main Vac valve closed
8/25/2011	2:32:01 PM	Bubbler valve closed
8/25/2011	2:32:01 PM	Bypass valve opened
8/25/2011	2:32:01 PM	Helium MFC set to  0.000000
8/25/2011	2:32:01 PM	H2 MFC set to  0.000000
8/25/2011	2:32:01 PM	BCl3 MFC set to  0.000000
8/25/2011	2:32:01 PM	PHl3 MFC set to  0.000000
8/25/2011	2:32:01 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:32:01 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:32:01 PM	Tube furnace set to 0
8/25/2011	2:32:01 PM	Helium valve closed
8/25/2011	2:32:01 PM	H2 valve closed
8/25/2011	2:32:01 PM	BCl3 valve closed
8/25/2011	2:32:01 PM	PH3 valve closed
8/25/2011	2:32:01 PM	SiCl4 pre valve closed
8/25/2011	2:32:01 PM	SiCl4 post valve closed
8/25/2011	2:32:01 PM	Main Vac valve closed
8/25/2011	2:32:01 PM	Bubbler valve closed
8/25/2011	2:32:01 PM	Bypass valve opened
8/25/2011	2:32:01 PM	Helium MFC set to  0.000000
8/25/2011	2:32:01 PM	H2 MFC set to  0.000000
8/25/2011	2:32:01 PM	BCl3 MFC set to  0.000000
8/25/2011	2:32:01 PM	PHl3 MFC set to  0.000000
8/25/2011	2:32:01 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:32:01 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:32:01 PM	Tube furnace set to 0
8/25/2011	2:32:19 PM	Helium valve closed
8/25/2011	2:32:19 PM	H2 valve closed
8/25/2011	2:32:19 PM	BCl3 valve closed
8/25/2011	2:32:19 PM	PH3 valve closed
8/25/2011	2:32:19 PM	SiCl4 pre valve closed
8/25/2011	2:32:19 PM	SiCl4 post valve closed
8/25/2011	2:32:19 PM	Bypass valve closed
8/25/2011	2:32:19 PM	Bubbler valve closed
8/25/2011	2:32:19 PM	Main Vac valve opened
8/25/2011	2:32:19 PM	Helium MFC set to  0.000000
8/25/2011	2:32:19 PM	H2 MFC set to  0.000000
8/25/2011	2:32:19 PM	BCl3 MFC set to  0.000000
8/25/2011	2:32:19 PM	PHl3 MFC set to  0.000000
8/25/2011	2:32:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:32:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:32:20 PM	Tube furnace set to 0
8/25/2011	2:32:50 PM	H2 valve closed
8/25/2011	2:32:50 PM	BCl3 valve closed
8/25/2011	2:32:50 PM	PH3 valve closed
8/25/2011	2:32:50 PM	SiCl4 pre valve closed
8/25/2011	2:32:50 PM	SiCl4 post valve closed
8/25/2011	2:32:50 PM	Bypass valve closed
8/25/2011	2:32:50 PM	Bubbler valve closed
8/25/2011	2:32:50 PM	Helium valve opened
8/25/2011	2:32:50 PM	Main Vac valve opened
8/25/2011	2:32:50 PM	Helium MFC set to  20.000000
8/25/2011	2:32:50 PM	H2 MFC set to  0.000000
8/25/2011	2:32:50 PM	BCl3 MFC set to  0.000000
8/25/2011	2:32:50 PM	PHl3 MFC set to  0.000000
8/25/2011	2:32:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:32:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:32:50 PM	Tube furnace set to 0
8/25/2011	2:33:20 PM	Helium valve closed
8/25/2011	2:33:20 PM	H2 valve closed
8/25/2011	2:33:20 PM	BCl3 valve closed
8/25/2011	2:33:20 PM	PH3 valve closed
8/25/2011	2:33:20 PM	SiCl4 pre valve closed
8/25/2011	2:33:20 PM	SiCl4 post valve closed
8/25/2011	2:33:20 PM	Bypass valve closed
8/25/2011	2:33:20 PM	Bubbler valve closed
8/25/2011	2:33:20 PM	Main Vac valve opened
8/25/2011	2:33:20 PM	Helium MFC set to  0.000000
8/25/2011	2:33:20 PM	H2 MFC set to  0.000000
8/25/2011	2:33:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:33:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:33:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:33:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:33:20 PM	Tube furnace set to 0
8/25/2011	2:33:50 PM	H2 valve closed
8/25/2011	2:33:50 PM	BCl3 valve closed
8/25/2011	2:33:50 PM	PH3 valve closed
8/25/2011	2:33:50 PM	SiCl4 pre valve closed
8/25/2011	2:33:50 PM	SiCl4 post valve closed
8/25/2011	2:33:50 PM	Bypass valve closed
8/25/2011	2:33:50 PM	Bubbler valve closed
8/25/2011	2:33:50 PM	Helium valve opened
8/25/2011	2:33:50 PM	Main Vac valve opened
8/25/2011	2:33:50 PM	Helium MFC set to  20.000000
8/25/2011	2:33:50 PM	H2 MFC set to  0.000000
8/25/2011	2:33:50 PM	BCl3 MFC set to  0.000000
8/25/2011	2:33:50 PM	PHl3 MFC set to  0.000000
8/25/2011	2:33:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:33:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:33:50 PM	Tube furnace set to 0
8/25/2011	2:34:20 PM	Helium valve closed
8/25/2011	2:34:20 PM	H2 valve closed
8/25/2011	2:34:20 PM	BCl3 valve closed
8/25/2011	2:34:20 PM	PH3 valve closed
8/25/2011	2:34:20 PM	SiCl4 pre valve closed
8/25/2011	2:34:20 PM	SiCl4 post valve closed
8/25/2011	2:34:20 PM	Bypass valve closed
8/25/2011	2:34:20 PM	Bubbler valve closed
8/25/2011	2:34:20 PM	Main Vac valve opened
8/25/2011	2:34:20 PM	Helium MFC set to  0.000000
8/25/2011	2:34:20 PM	H2 MFC set to  0.000000
8/25/2011	2:34:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:34:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:34:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:34:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:34:20 PM	Tube furnace set to 0
8/25/2011	2:34:50 PM	H2 valve closed
8/25/2011	2:34:50 PM	BCl3 valve closed
8/25/2011	2:34:50 PM	PH3 valve closed
8/25/2011	2:34:50 PM	SiCl4 pre valve closed
8/25/2011	2:34:50 PM	SiCl4 post valve closed
8/25/2011	2:34:50 PM	Bypass valve closed
8/25/2011	2:34:50 PM	Bubbler valve closed
8/25/2011	2:34:50 PM	Helium valve opened
8/25/2011	2:34:50 PM	Main Vac valve opened
8/25/2011	2:34:50 PM	Helium MFC set to  20.000000
8/25/2011	2:34:50 PM	H2 MFC set to  0.000000
8/25/2011	2:34:50 PM	BCl3 MFC set to  0.000000
8/25/2011	2:34:50 PM	PHl3 MFC set to  0.000000
8/25/2011	2:34:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:34:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:34:51 PM	Tube furnace set to 0
8/25/2011	2:35:21 PM	Helium valve closed
8/25/2011	2:35:21 PM	H2 valve closed
8/25/2011	2:35:21 PM	BCl3 valve closed
8/25/2011	2:35:21 PM	PH3 valve closed
8/25/2011	2:35:21 PM	SiCl4 pre valve closed
8/25/2011	2:35:21 PM	SiCl4 post valve closed
8/25/2011	2:35:21 PM	Bypass valve closed
8/25/2011	2:35:21 PM	Bubbler valve closed
8/25/2011	2:35:21 PM	Main Vac valve opened
8/25/2011	2:35:21 PM	Helium MFC set to  0.000000
8/25/2011	2:35:21 PM	H2 MFC set to  0.000000
8/25/2011	2:35:21 PM	BCl3 MFC set to  0.000000
8/25/2011	2:35:21 PM	PHl3 MFC set to  0.000000
8/25/2011	2:35:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:35:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:35:21 PM	Tube furnace set to 0
8/25/2011	2:35:51 PM	H2 valve closed
8/25/2011	2:35:51 PM	BCl3 valve closed
8/25/2011	2:35:51 PM	PH3 valve closed
8/25/2011	2:35:51 PM	SiCl4 pre valve closed
8/25/2011	2:35:51 PM	SiCl4 post valve closed
8/25/2011	2:35:51 PM	Bypass valve closed
8/25/2011	2:35:51 PM	Bubbler valve closed
8/25/2011	2:35:51 PM	Helium valve opened
8/25/2011	2:35:51 PM	Main Vac valve opened
8/25/2011	2:35:51 PM	Helium MFC set to  20.000000
8/25/2011	2:35:51 PM	H2 MFC set to  0.000000
8/25/2011	2:35:51 PM	BCl3 MFC set to  0.000000
8/25/2011	2:35:51 PM	PHl3 MFC set to  0.000000
8/25/2011	2:35:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:35:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:35:51 PM	Tube furnace set to 0
8/25/2011	2:36:21 PM	Helium valve closed
8/25/2011	2:36:21 PM	H2 valve closed
8/25/2011	2:36:21 PM	BCl3 valve closed
8/25/2011	2:36:21 PM	PH3 valve closed
8/25/2011	2:36:21 PM	SiCl4 pre valve closed
8/25/2011	2:36:21 PM	SiCl4 post valve closed
8/25/2011	2:36:21 PM	Bypass valve closed
8/25/2011	2:36:21 PM	Bubbler valve closed
8/25/2011	2:36:21 PM	Main Vac valve opened
8/25/2011	2:36:21 PM	Helium MFC set to  0.000000
8/25/2011	2:36:21 PM	H2 MFC set to  0.000000
8/25/2011	2:36:21 PM	BCl3 MFC set to  0.000000
8/25/2011	2:36:21 PM	PHl3 MFC set to  0.000000
8/25/2011	2:36:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:36:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:36:21 PM	Tube furnace set to 0
8/25/2011	2:36:51 PM	H2 valve closed
8/25/2011	2:36:51 PM	BCl3 valve closed
8/25/2011	2:36:51 PM	PH3 valve closed
8/25/2011	2:36:51 PM	SiCl4 pre valve closed
8/25/2011	2:36:51 PM	SiCl4 post valve closed
8/25/2011	2:36:51 PM	Bypass valve closed
8/25/2011	2:36:51 PM	Bubbler valve closed
8/25/2011	2:36:51 PM	Helium valve opened
8/25/2011	2:36:51 PM	Main Vac valve opened
8/25/2011	2:36:51 PM	Helium MFC set to  20.000000
8/25/2011	2:36:51 PM	H2 MFC set to  0.000000
8/25/2011	2:36:51 PM	BCl3 MFC set to  0.000000
8/25/2011	2:36:51 PM	PHl3 MFC set to  0.000000
8/25/2011	2:36:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:36:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:36:51 PM	Tube furnace set to 0
8/25/2011	2:37:21 PM	Helium valve closed
8/25/2011	2:37:21 PM	H2 valve closed
8/25/2011	2:37:21 PM	BCl3 valve closed
8/25/2011	2:37:21 PM	PH3 valve closed
8/25/2011	2:37:21 PM	SiCl4 pre valve closed
8/25/2011	2:37:21 PM	SiCl4 post valve closed
8/25/2011	2:37:21 PM	Bypass valve closed
8/25/2011	2:37:21 PM	Bubbler valve closed
8/25/2011	2:37:21 PM	Main Vac valve opened
8/25/2011	2:37:21 PM	Helium MFC set to  0.000000
8/25/2011	2:37:22 PM	H2 MFC set to  0.000000
8/25/2011	2:37:22 PM	BCl3 MFC set to  0.000000
8/25/2011	2:37:22 PM	PHl3 MFC set to  0.000000
8/25/2011	2:37:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:37:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:37:22 PM	Tube furnace set to 0
8/25/2011	2:37:52 PM	H2 valve closed
8/25/2011	2:37:52 PM	BCl3 valve closed
8/25/2011	2:37:52 PM	PH3 valve closed
8/25/2011	2:37:52 PM	SiCl4 pre valve closed
8/25/2011	2:37:52 PM	SiCl4 post valve closed
8/25/2011	2:37:52 PM	Bypass valve closed
8/25/2011	2:37:52 PM	Bubbler valve closed
8/25/2011	2:37:52 PM	Helium valve opened
8/25/2011	2:37:52 PM	Main Vac valve opened
8/25/2011	2:37:52 PM	Helium MFC set to  20.000000
8/25/2011	2:37:52 PM	H2 MFC set to  0.000000
8/25/2011	2:37:52 PM	BCl3 MFC set to  0.000000
8/25/2011	2:37:52 PM	PHl3 MFC set to  0.000000
8/25/2011	2:37:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:37:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:37:52 PM	Tube furnace set to 0
8/25/2011	2:38:22 PM	Helium valve closed
8/25/2011	2:38:22 PM	H2 valve closed
8/25/2011	2:38:22 PM	BCl3 valve closed
8/25/2011	2:38:22 PM	PH3 valve closed
8/25/2011	2:38:22 PM	SiCl4 pre valve closed
8/25/2011	2:38:22 PM	SiCl4 post valve closed
8/25/2011	2:38:22 PM	Bypass valve closed
8/25/2011	2:38:22 PM	Bubbler valve closed
8/25/2011	2:38:22 PM	Main Vac valve opened
8/25/2011	2:38:22 PM	Helium MFC set to  0.000000
8/25/2011	2:38:22 PM	H2 MFC set to  0.000000
8/25/2011	2:38:22 PM	BCl3 MFC set to  0.000000
8/25/2011	2:38:22 PM	PHl3 MFC set to  0.000000
8/25/2011	2:38:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:38:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:38:22 PM	Tube furnace set to 0
8/25/2011	2:38:52 PM	H2 valve closed
8/25/2011	2:38:52 PM	BCl3 valve closed
8/25/2011	2:38:52 PM	PH3 valve closed
8/25/2011	2:38:52 PM	SiCl4 pre valve closed
8/25/2011	2:38:52 PM	SiCl4 post valve closed
8/25/2011	2:38:52 PM	Bypass valve closed
8/25/2011	2:38:52 PM	Bubbler valve closed
8/25/2011	2:38:52 PM	Helium valve opened
8/25/2011	2:38:52 PM	Main Vac valve opened
8/25/2011	2:38:52 PM	Helium MFC set to  20.000000
8/25/2011	2:38:52 PM	H2 MFC set to  0.000000
8/25/2011	2:38:52 PM	BCl3 MFC set to  0.000000
8/25/2011	2:38:52 PM	PHl3 MFC set to  0.000000
8/25/2011	2:38:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:38:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:38:52 PM	Tube furnace set to 0
8/25/2011	2:39:22 PM	Helium valve closed
8/25/2011	2:39:22 PM	H2 valve closed
8/25/2011	2:39:22 PM	BCl3 valve closed
8/25/2011	2:39:22 PM	PH3 valve closed
8/25/2011	2:39:22 PM	SiCl4 pre valve closed
8/25/2011	2:39:22 PM	SiCl4 post valve closed
8/25/2011	2:39:22 PM	Bypass valve closed
8/25/2011	2:39:22 PM	Bubbler valve closed
8/25/2011	2:39:22 PM	Main Vac valve opened
8/25/2011	2:39:22 PM	Helium MFC set to  0.000000
8/25/2011	2:39:22 PM	H2 MFC set to  0.000000
8/25/2011	2:39:22 PM	BCl3 MFC set to  0.000000
8/25/2011	2:39:22 PM	PHl3 MFC set to  0.000000
8/25/2011	2:39:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:39:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:39:23 PM	Tube furnace set to 0
8/25/2011	2:39:53 PM	H2 valve closed
8/25/2011	2:39:53 PM	BCl3 valve closed
8/25/2011	2:39:53 PM	PH3 valve closed
8/25/2011	2:39:53 PM	SiCl4 pre valve closed
8/25/2011	2:39:53 PM	SiCl4 post valve closed
8/25/2011	2:39:53 PM	Bypass valve closed
8/25/2011	2:39:53 PM	Bubbler valve closed
8/25/2011	2:39:53 PM	Helium valve opened
8/25/2011	2:39:53 PM	Main Vac valve opened
8/25/2011	2:39:53 PM	Helium MFC set to  20.000000
8/25/2011	2:39:53 PM	H2 MFC set to  0.000000
8/25/2011	2:39:53 PM	BCl3 MFC set to  0.000000
8/25/2011	2:39:53 PM	PHl3 MFC set to  0.000000
8/25/2011	2:39:53 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:39:53 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:39:53 PM	Tube furnace set to 0
8/25/2011	2:40:23 PM	Helium valve closed
8/25/2011	2:40:23 PM	H2 valve closed
8/25/2011	2:40:23 PM	BCl3 valve closed
8/25/2011	2:40:23 PM	PH3 valve closed
8/25/2011	2:40:23 PM	SiCl4 pre valve closed
8/25/2011	2:40:23 PM	SiCl4 post valve closed
8/25/2011	2:40:23 PM	Bypass valve closed
8/25/2011	2:40:23 PM	Bubbler valve closed
8/25/2011	2:40:23 PM	Main Vac valve opened
8/25/2011	2:40:23 PM	Helium MFC set to  0.000000
8/25/2011	2:40:23 PM	H2 MFC set to  0.000000
8/25/2011	2:40:23 PM	BCl3 MFC set to  0.000000
8/25/2011	2:40:23 PM	PHl3 MFC set to  0.000000
8/25/2011	2:40:23 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:40:23 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:40:23 PM	Tube furnace set to 0
8/25/2011	2:40:53 PM	H2 valve closed
8/25/2011	2:40:53 PM	BCl3 valve closed
8/25/2011	2:40:53 PM	PH3 valve closed
8/25/2011	2:40:53 PM	SiCl4 pre valve closed
8/25/2011	2:40:53 PM	SiCl4 post valve closed
8/25/2011	2:40:53 PM	Bypass valve closed
8/25/2011	2:40:53 PM	Bubbler valve closed
8/25/2011	2:40:53 PM	Helium valve opened
8/25/2011	2:40:53 PM	Main Vac valve opened
8/25/2011	2:40:53 PM	Helium MFC set to  20.000000
8/25/2011	2:40:53 PM	H2 MFC set to  0.000000
8/25/2011	2:40:53 PM	BCl3 MFC set to  0.000000
8/25/2011	2:40:53 PM	PHl3 MFC set to  0.000000
8/25/2011	2:40:53 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:40:53 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:40:53 PM	Tube furnace set to 0
8/25/2011	2:41:23 PM	Helium valve closed
8/25/2011	2:41:23 PM	H2 valve closed
8/25/2011	2:41:23 PM	BCl3 valve closed
8/25/2011	2:41:23 PM	PH3 valve closed
8/25/2011	2:41:23 PM	SiCl4 pre valve closed
8/25/2011	2:41:23 PM	SiCl4 post valve closed
8/25/2011	2:41:23 PM	Bypass valve closed
8/25/2011	2:41:23 PM	Bubbler valve closed
8/25/2011	2:41:23 PM	Main Vac valve opened
8/25/2011	2:41:23 PM	Helium MFC set to  0.000000
8/25/2011	2:41:23 PM	H2 MFC set to  0.000000
8/25/2011	2:41:23 PM	BCl3 MFC set to  0.000000
8/25/2011	2:41:23 PM	PHl3 MFC set to  0.000000
8/25/2011	2:41:23 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:41:23 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:41:23 PM	Tube furnace set to 0
8/25/2011	2:41:53 PM	H2 valve closed
8/25/2011	2:41:53 PM	BCl3 valve closed
8/25/2011	2:41:53 PM	PH3 valve closed
8/25/2011	2:41:53 PM	SiCl4 pre valve closed
8/25/2011	2:41:53 PM	SiCl4 post valve closed
8/25/2011	2:41:53 PM	Bypass valve closed
8/25/2011	2:41:53 PM	Bubbler valve closed
8/25/2011	2:41:53 PM	Helium valve opened
8/25/2011	2:41:53 PM	Main Vac valve opened
8/25/2011	2:41:53 PM	Helium MFC set to  20.000000
8/25/2011	2:41:53 PM	H2 MFC set to  0.000000
8/25/2011	2:41:53 PM	BCl3 MFC set to  0.000000
8/25/2011	2:41:53 PM	PHl3 MFC set to  0.000000
8/25/2011	2:41:53 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:41:53 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:41:54 PM	Tube furnace set to 0
8/25/2011	2:42:24 PM	Helium valve closed
8/25/2011	2:42:24 PM	H2 valve closed
8/25/2011	2:42:24 PM	BCl3 valve closed
8/25/2011	2:42:24 PM	PH3 valve closed
8/25/2011	2:42:24 PM	SiCl4 pre valve closed
8/25/2011	2:42:24 PM	SiCl4 post valve closed
8/25/2011	2:42:24 PM	Bypass valve closed
8/25/2011	2:42:24 PM	Bubbler valve closed
8/25/2011	2:42:24 PM	Main Vac valve opened
8/25/2011	2:42:24 PM	Helium MFC set to  0.000000
8/25/2011	2:42:24 PM	H2 MFC set to  0.000000
8/25/2011	2:42:24 PM	BCl3 MFC set to  0.000000
8/25/2011	2:42:24 PM	PHl3 MFC set to  0.000000
8/25/2011	2:42:24 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:42:24 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:42:24 PM	Tube furnace set to 0
8/25/2011	2:42:25 PM	Run finished at 2:42 PM
8/25/2011	2:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	2:54:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	2:54:18 PM	Recipe started at 2:54 PM
8/25/2011	2:54:18 PM	Helium valve closed
8/25/2011	2:54:18 PM	H2 valve closed
8/25/2011	2:54:18 PM	BCl3 valve closed
8/25/2011	2:54:18 PM	PH3 valve closed
8/25/2011	2:54:18 PM	SiCl4 pre valve closed
8/25/2011	2:54:18 PM	SiCl4 post valve closed
8/25/2011	2:54:18 PM	Main Vac valve closed
8/25/2011	2:54:18 PM	Bubbler valve closed
8/25/2011	2:54:18 PM	Bypass valve opened
8/25/2011	2:54:18 PM	Helium MFC set to  0.000000
8/25/2011	2:54:18 PM	H2 MFC set to  0.000000
8/25/2011	2:54:18 PM	BCl3 MFC set to  0.000000
8/25/2011	2:54:18 PM	PHl3 MFC set to  0.000000
8/25/2011	2:54:18 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:54:18 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:54:18 PM	Tube furnace set to 0
8/25/2011	2:54:18 PM	Helium valve closed
8/25/2011	2:54:18 PM	H2 valve closed
8/25/2011	2:54:18 PM	BCl3 valve closed
8/25/2011	2:54:18 PM	PH3 valve closed
8/25/2011	2:54:18 PM	SiCl4 pre valve closed
8/25/2011	2:54:18 PM	SiCl4 post valve closed
8/25/2011	2:54:18 PM	Main Vac valve closed
8/25/2011	2:54:18 PM	Bubbler valve closed
8/25/2011	2:54:18 PM	Bypass valve opened
8/25/2011	2:54:18 PM	Helium MFC set to  0.000000
8/25/2011	2:54:18 PM	H2 MFC set to  0.000000
8/25/2011	2:54:18 PM	BCl3 MFC set to  0.000000
8/25/2011	2:54:18 PM	PHl3 MFC set to  0.000000
8/25/2011	2:54:18 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:54:18 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:54:18 PM	Tube furnace set to 0
8/25/2011	2:54:19 PM	Helium valve closed
8/25/2011	2:54:19 PM	H2 valve closed
8/25/2011	2:54:19 PM	BCl3 valve closed
8/25/2011	2:54:19 PM	PH3 valve closed
8/25/2011	2:54:19 PM	SiCl4 pre valve closed
8/25/2011	2:54:19 PM	SiCl4 post valve closed
8/25/2011	2:54:19 PM	Bypass valve closed
8/25/2011	2:54:19 PM	Bubbler valve closed
8/25/2011	2:54:19 PM	Main Vac valve opened
8/25/2011	2:54:19 PM	Helium MFC set to  0.000000
8/25/2011	2:54:19 PM	H2 MFC set to  0.000000
8/25/2011	2:54:19 PM	BCl3 MFC set to  0.000000
8/25/2011	2:54:19 PM	PHl3 MFC set to  0.000000
8/25/2011	2:54:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:54:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:54:19 PM	Tube furnace set to 0
8/25/2011	2:54:49 PM	H2 valve closed
8/25/2011	2:54:49 PM	BCl3 valve closed
8/25/2011	2:54:49 PM	PH3 valve closed
8/25/2011	2:54:49 PM	SiCl4 pre valve closed
8/25/2011	2:54:49 PM	SiCl4 post valve closed
8/25/2011	2:54:49 PM	Bypass valve closed
8/25/2011	2:54:49 PM	Bubbler valve closed
8/25/2011	2:54:49 PM	Helium valve opened
8/25/2011	2:54:49 PM	Main Vac valve opened
8/25/2011	2:54:49 PM	Helium MFC set to  20.000000
8/25/2011	2:54:49 PM	H2 MFC set to  0.000000
8/25/2011	2:54:49 PM	BCl3 MFC set to  0.000000
8/25/2011	2:54:49 PM	PHl3 MFC set to  0.000000
8/25/2011	2:54:49 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:54:49 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:54:50 PM	Tube furnace set to 0
8/25/2011	2:55:20 PM	Helium valve closed
8/25/2011	2:55:20 PM	H2 valve closed
8/25/2011	2:55:20 PM	BCl3 valve closed
8/25/2011	2:55:20 PM	PH3 valve closed
8/25/2011	2:55:20 PM	SiCl4 pre valve closed
8/25/2011	2:55:20 PM	SiCl4 post valve closed
8/25/2011	2:55:20 PM	Bypass valve closed
8/25/2011	2:55:20 PM	Bubbler valve closed
8/25/2011	2:55:20 PM	Main Vac valve opened
8/25/2011	2:55:20 PM	Helium MFC set to  0.000000
8/25/2011	2:55:20 PM	H2 MFC set to  0.000000
8/25/2011	2:55:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:55:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:55:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:55:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:55:20 PM	Tube furnace set to 0
8/25/2011	2:55:50 PM	H2 valve closed
8/25/2011	2:55:50 PM	BCl3 valve closed
8/25/2011	2:55:50 PM	PH3 valve closed
8/25/2011	2:55:50 PM	SiCl4 pre valve closed
8/25/2011	2:55:50 PM	SiCl4 post valve closed
8/25/2011	2:55:50 PM	Bypass valve closed
8/25/2011	2:55:50 PM	Bubbler valve closed
8/25/2011	2:55:50 PM	Helium valve opened
8/25/2011	2:55:50 PM	Main Vac valve opened
8/25/2011	2:55:50 PM	Helium MFC set to  20.000000
8/25/2011	2:55:50 PM	H2 MFC set to  0.000000
8/25/2011	2:55:50 PM	BCl3 MFC set to  0.000000
8/25/2011	2:55:50 PM	PHl3 MFC set to  0.000000
8/25/2011	2:55:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:55:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:55:50 PM	Tube furnace set to 0
8/25/2011	2:56:20 PM	Helium valve closed
8/25/2011	2:56:20 PM	H2 valve closed
8/25/2011	2:56:20 PM	BCl3 valve closed
8/25/2011	2:56:20 PM	PH3 valve closed
8/25/2011	2:56:20 PM	SiCl4 pre valve closed
8/25/2011	2:56:20 PM	SiCl4 post valve closed
8/25/2011	2:56:20 PM	Bypass valve closed
8/25/2011	2:56:20 PM	Bubbler valve closed
8/25/2011	2:56:20 PM	Main Vac valve opened
8/25/2011	2:56:20 PM	Helium MFC set to  0.000000
8/25/2011	2:56:20 PM	H2 MFC set to  0.000000
8/25/2011	2:56:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:56:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:56:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:56:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:56:20 PM	Tube furnace set to 0
8/25/2011	2:56:50 PM	H2 valve closed
8/25/2011	2:56:50 PM	BCl3 valve closed
8/25/2011	2:56:50 PM	PH3 valve closed
8/25/2011	2:56:50 PM	SiCl4 pre valve closed
8/25/2011	2:56:50 PM	SiCl4 post valve closed
8/25/2011	2:56:50 PM	Bypass valve closed
8/25/2011	2:56:50 PM	Bubbler valve closed
8/25/2011	2:56:50 PM	Helium valve opened
8/25/2011	2:56:50 PM	Main Vac valve opened
8/25/2011	2:56:50 PM	Helium MFC set to  20.000000
8/25/2011	2:56:50 PM	H2 MFC set to  0.000000
8/25/2011	2:56:50 PM	BCl3 MFC set to  0.000000
8/25/2011	2:56:50 PM	PHl3 MFC set to  0.000000
8/25/2011	2:56:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:56:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:56:50 PM	Tube furnace set to 0
8/25/2011	2:57:20 PM	Helium valve closed
8/25/2011	2:57:20 PM	H2 valve closed
8/25/2011	2:57:20 PM	BCl3 valve closed
8/25/2011	2:57:20 PM	PH3 valve closed
8/25/2011	2:57:20 PM	SiCl4 pre valve closed
8/25/2011	2:57:20 PM	SiCl4 post valve closed
8/25/2011	2:57:20 PM	Bypass valve closed
8/25/2011	2:57:20 PM	Bubbler valve closed
8/25/2011	2:57:20 PM	Main Vac valve opened
8/25/2011	2:57:20 PM	Helium MFC set to  0.000000
8/25/2011	2:57:20 PM	H2 MFC set to  0.000000
8/25/2011	2:57:20 PM	BCl3 MFC set to  0.000000
8/25/2011	2:57:20 PM	PHl3 MFC set to  0.000000
8/25/2011	2:57:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:57:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:57:21 PM	Tube furnace set to 0
8/25/2011	2:57:51 PM	H2 valve closed
8/25/2011	2:57:51 PM	BCl3 valve closed
8/25/2011	2:57:51 PM	PH3 valve closed
8/25/2011	2:57:51 PM	SiCl4 pre valve closed
8/25/2011	2:57:51 PM	SiCl4 post valve closed
8/25/2011	2:57:51 PM	Bypass valve closed
8/25/2011	2:57:51 PM	Bubbler valve closed
8/25/2011	2:57:51 PM	Helium valve opened
8/25/2011	2:57:51 PM	Main Vac valve opened
8/25/2011	2:57:51 PM	Helium MFC set to  20.000000
8/25/2011	2:57:51 PM	H2 MFC set to  0.000000
8/25/2011	2:57:51 PM	BCl3 MFC set to  0.000000
8/25/2011	2:57:51 PM	PHl3 MFC set to  0.000000
8/25/2011	2:57:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:57:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:57:51 PM	Tube furnace set to 0
8/25/2011	2:58:21 PM	Helium valve closed
8/25/2011	2:58:21 PM	H2 valve closed
8/25/2011	2:58:21 PM	BCl3 valve closed
8/25/2011	2:58:21 PM	PH3 valve closed
8/25/2011	2:58:21 PM	SiCl4 pre valve closed
8/25/2011	2:58:21 PM	SiCl4 post valve closed
8/25/2011	2:58:21 PM	Bypass valve closed
8/25/2011	2:58:21 PM	Bubbler valve closed
8/25/2011	2:58:21 PM	Main Vac valve opened
8/25/2011	2:58:21 PM	Helium MFC set to  0.000000
8/25/2011	2:58:21 PM	H2 MFC set to  0.000000
8/25/2011	2:58:21 PM	BCl3 MFC set to  0.000000
8/25/2011	2:58:21 PM	PHl3 MFC set to  0.000000
8/25/2011	2:58:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:58:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:58:21 PM	Tube furnace set to 0
8/25/2011	2:58:51 PM	H2 valve closed
8/25/2011	2:58:51 PM	BCl3 valve closed
8/25/2011	2:58:51 PM	PH3 valve closed
8/25/2011	2:58:51 PM	SiCl4 pre valve closed
8/25/2011	2:58:51 PM	SiCl4 post valve closed
8/25/2011	2:58:51 PM	Bypass valve closed
8/25/2011	2:58:51 PM	Bubbler valve closed
8/25/2011	2:58:51 PM	Helium valve opened
8/25/2011	2:58:51 PM	Main Vac valve opened
8/25/2011	2:58:51 PM	Helium MFC set to  20.000000
8/25/2011	2:58:51 PM	H2 MFC set to  0.000000
8/25/2011	2:58:51 PM	BCl3 MFC set to  0.000000
8/25/2011	2:58:51 PM	PHl3 MFC set to  0.000000
8/25/2011	2:58:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:58:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:58:51 PM	Tube furnace set to 0
8/25/2011	2:59:21 PM	Helium valve closed
8/25/2011	2:59:21 PM	H2 valve closed
8/25/2011	2:59:21 PM	BCl3 valve closed
8/25/2011	2:59:21 PM	PH3 valve closed
8/25/2011	2:59:21 PM	SiCl4 pre valve closed
8/25/2011	2:59:21 PM	SiCl4 post valve closed
8/25/2011	2:59:21 PM	Bypass valve closed
8/25/2011	2:59:21 PM	Bubbler valve closed
8/25/2011	2:59:21 PM	Main Vac valve opened
8/25/2011	2:59:21 PM	Helium MFC set to  0.000000
8/25/2011	2:59:21 PM	H2 MFC set to  0.000000
8/25/2011	2:59:21 PM	BCl3 MFC set to  0.000000
8/25/2011	2:59:21 PM	PHl3 MFC set to  0.000000
8/25/2011	2:59:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:59:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:59:21 PM	Tube furnace set to 0
8/25/2011	2:59:51 PM	H2 valve closed
8/25/2011	2:59:51 PM	BCl3 valve closed
8/25/2011	2:59:51 PM	PH3 valve closed
8/25/2011	2:59:51 PM	SiCl4 pre valve closed
8/25/2011	2:59:51 PM	SiCl4 post valve closed
8/25/2011	2:59:51 PM	Bypass valve closed
8/25/2011	2:59:51 PM	Bubbler valve closed
8/25/2011	2:59:51 PM	Helium valve opened
8/25/2011	2:59:51 PM	Main Vac valve opened
8/25/2011	2:59:51 PM	Helium MFC set to  20.000000
8/25/2011	2:59:51 PM	H2 MFC set to  0.000000
8/25/2011	2:59:51 PM	BCl3 MFC set to  0.000000
8/25/2011	2:59:51 PM	PHl3 MFC set to  0.000000
8/25/2011	2:59:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	2:59:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	2:59:52 PM	Tube furnace set to 0
8/25/2011	3:00:22 PM	Helium valve closed
8/25/2011	3:00:22 PM	H2 valve closed
8/25/2011	3:00:22 PM	BCl3 valve closed
8/25/2011	3:00:22 PM	PH3 valve closed
8/25/2011	3:00:22 PM	SiCl4 pre valve closed
8/25/2011	3:00:22 PM	SiCl4 post valve closed
8/25/2011	3:00:22 PM	Bypass valve closed
8/25/2011	3:00:22 PM	Bubbler valve closed
8/25/2011	3:00:22 PM	Main Vac valve opened
8/25/2011	3:00:22 PM	Helium MFC set to  0.000000
8/25/2011	3:00:22 PM	H2 MFC set to  0.000000
8/25/2011	3:00:22 PM	BCl3 MFC set to  0.000000
8/25/2011	3:00:22 PM	PHl3 MFC set to  0.000000
8/25/2011	3:00:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:00:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:00:22 PM	Tube furnace set to 0
8/25/2011	3:00:52 PM	H2 valve closed
8/25/2011	3:00:52 PM	BCl3 valve closed
8/25/2011	3:00:52 PM	PH3 valve closed
8/25/2011	3:00:52 PM	SiCl4 pre valve closed
8/25/2011	3:00:52 PM	SiCl4 post valve closed
8/25/2011	3:00:52 PM	Bypass valve closed
8/25/2011	3:00:52 PM	Bubbler valve closed
8/25/2011	3:00:52 PM	Helium valve opened
8/25/2011	3:00:52 PM	Main Vac valve opened
8/25/2011	3:00:52 PM	Helium MFC set to  20.000000
8/25/2011	3:00:52 PM	H2 MFC set to  0.000000
8/25/2011	3:00:52 PM	BCl3 MFC set to  0.000000
8/25/2011	3:00:52 PM	PHl3 MFC set to  0.000000
8/25/2011	3:00:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:00:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:00:52 PM	Tube furnace set to 0
8/25/2011	3:01:22 PM	Helium valve closed
8/25/2011	3:01:22 PM	H2 valve closed
8/25/2011	3:01:22 PM	BCl3 valve closed
8/25/2011	3:01:22 PM	PH3 valve closed
8/25/2011	3:01:22 PM	SiCl4 pre valve closed
8/25/2011	3:01:22 PM	SiCl4 post valve closed
8/25/2011	3:01:22 PM	Bypass valve closed
8/25/2011	3:01:22 PM	Bubbler valve closed
8/25/2011	3:01:22 PM	Main Vac valve opened
8/25/2011	3:01:22 PM	Helium MFC set to  0.000000
8/25/2011	3:01:22 PM	H2 MFC set to  0.000000
8/25/2011	3:01:22 PM	BCl3 MFC set to  0.000000
8/25/2011	3:01:22 PM	PHl3 MFC set to  0.000000
8/25/2011	3:01:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:01:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:01:22 PM	Tube furnace set to 0
8/25/2011	3:01:52 PM	H2 valve closed
8/25/2011	3:01:52 PM	BCl3 valve closed
8/25/2011	3:01:52 PM	PH3 valve closed
8/25/2011	3:01:52 PM	SiCl4 pre valve closed
8/25/2011	3:01:52 PM	SiCl4 post valve closed
8/25/2011	3:01:52 PM	Bypass valve closed
8/25/2011	3:01:52 PM	Bubbler valve closed
8/25/2011	3:01:52 PM	Helium valve opened
8/25/2011	3:01:52 PM	Main Vac valve opened
8/25/2011	3:01:52 PM	Helium MFC set to  20.000000
8/25/2011	3:01:52 PM	H2 MFC set to  0.000000
8/25/2011	3:01:52 PM	BCl3 MFC set to  0.000000
8/25/2011	3:01:52 PM	PHl3 MFC set to  0.000000
8/25/2011	3:01:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:01:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:01:52 PM	Tube furnace set to 0
8/25/2011	3:02:22 PM	Helium valve closed
8/25/2011	3:02:22 PM	H2 valve closed
8/25/2011	3:02:22 PM	BCl3 valve closed
8/25/2011	3:02:22 PM	PH3 valve closed
8/25/2011	3:02:22 PM	SiCl4 pre valve closed
8/25/2011	3:02:22 PM	SiCl4 post valve closed
8/25/2011	3:02:22 PM	Bypass valve closed
8/25/2011	3:02:22 PM	Bubbler valve closed
8/25/2011	3:02:22 PM	Main Vac valve opened
8/25/2011	3:02:22 PM	Helium MFC set to  0.000000
8/25/2011	3:02:22 PM	H2 MFC set to  0.000000
8/25/2011	3:02:22 PM	BCl3 MFC set to  0.000000
8/25/2011	3:02:22 PM	PHl3 MFC set to  0.000000
8/25/2011	3:02:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:02:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:02:23 PM	Tube furnace set to 0
8/25/2011	3:02:53 PM	H2 valve closed
8/25/2011	3:02:53 PM	BCl3 valve closed
8/25/2011	3:02:53 PM	PH3 valve closed
8/25/2011	3:02:53 PM	SiCl4 pre valve closed
8/25/2011	3:02:53 PM	SiCl4 post valve closed
8/25/2011	3:02:53 PM	Bypass valve closed
8/25/2011	3:02:53 PM	Bubbler valve closed
8/25/2011	3:02:53 PM	Helium valve opened
8/25/2011	3:02:53 PM	Main Vac valve opened
8/25/2011	3:02:53 PM	Helium MFC set to  20.000000
8/25/2011	3:02:53 PM	H2 MFC set to  0.000000
8/25/2011	3:02:53 PM	BCl3 MFC set to  0.000000
8/25/2011	3:02:53 PM	PHl3 MFC set to  0.000000
8/25/2011	3:02:53 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:02:53 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:02:53 PM	Tube furnace set to 0
8/25/2011	3:03:23 PM	Helium valve closed
8/25/2011	3:03:23 PM	H2 valve closed
8/25/2011	3:03:23 PM	BCl3 valve closed
8/25/2011	3:03:23 PM	PH3 valve closed
8/25/2011	3:03:23 PM	SiCl4 pre valve closed
8/25/2011	3:03:23 PM	SiCl4 post valve closed
8/25/2011	3:03:23 PM	Bypass valve closed
8/25/2011	3:03:23 PM	Bubbler valve closed
8/25/2011	3:03:23 PM	Main Vac valve opened
8/25/2011	3:03:23 PM	Helium MFC set to  0.000000
8/25/2011	3:03:23 PM	H2 MFC set to  0.000000
8/25/2011	3:03:23 PM	BCl3 MFC set to  0.000000
8/25/2011	3:03:23 PM	PHl3 MFC set to  0.000000
8/25/2011	3:03:23 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:03:23 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:03:23 PM	Tube furnace set to 0
8/25/2011	3:03:53 PM	H2 valve closed
8/25/2011	3:03:53 PM	BCl3 valve closed
8/25/2011	3:03:53 PM	PH3 valve closed
8/25/2011	3:03:53 PM	SiCl4 pre valve closed
8/25/2011	3:03:53 PM	SiCl4 post valve closed
8/25/2011	3:03:53 PM	Bypass valve closed
8/25/2011	3:03:53 PM	Bubbler valve closed
8/25/2011	3:03:53 PM	Helium valve opened
8/25/2011	3:03:53 PM	Main Vac valve opened
8/25/2011	3:03:53 PM	Helium MFC set to  20.000000
8/25/2011	3:03:53 PM	H2 MFC set to  0.000000
8/25/2011	3:03:53 PM	BCl3 MFC set to  0.000000
8/25/2011	3:03:53 PM	PHl3 MFC set to  0.000000
8/25/2011	3:03:53 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:03:53 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:03:53 PM	Tube furnace set to 0
8/25/2011	3:04:23 PM	Helium valve closed
8/25/2011	3:04:23 PM	H2 valve closed
8/25/2011	3:04:23 PM	BCl3 valve closed
8/25/2011	3:04:23 PM	PH3 valve closed
8/25/2011	3:04:23 PM	SiCl4 pre valve closed
8/25/2011	3:04:23 PM	SiCl4 post valve closed
8/25/2011	3:04:23 PM	Bypass valve closed
8/25/2011	3:04:23 PM	Bubbler valve closed
8/25/2011	3:04:23 PM	Main Vac valve opened
8/25/2011	3:04:23 PM	Helium MFC set to  0.000000
8/25/2011	3:04:23 PM	H2 MFC set to  0.000000
8/25/2011	3:04:23 PM	BCl3 MFC set to  0.000000
8/25/2011	3:04:23 PM	PHl3 MFC set to  0.000000
8/25/2011	3:04:23 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:04:23 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:04:23 PM	Tube furnace set to 0
8/25/2011	3:04:24 PM	Run finished at 3:04 PM
8/25/2011	3:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	3:13:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	3:13:49 PM	Recipe started at 3:13 PM
8/25/2011	3:13:49 PM	Helium valve closed
8/25/2011	3:13:49 PM	H2 valve closed
8/25/2011	3:13:49 PM	BCl3 valve closed
8/25/2011	3:13:49 PM	PH3 valve closed
8/25/2011	3:13:49 PM	SiCl4 pre valve closed
8/25/2011	3:13:49 PM	SiCl4 post valve closed
8/25/2011	3:13:49 PM	Main Vac valve closed
8/25/2011	3:13:49 PM	Bypass valve closed
8/25/2011	3:13:49 PM	Bubbler valve closed
8/25/2011	3:13:49 PM	Helium MFC set to  0.000000
8/25/2011	3:13:49 PM	H2 MFC set to  0.000000
8/25/2011	3:13:49 PM	BCl3 MFC set to  0.000000
8/25/2011	3:13:49 PM	PHl3 MFC set to  0.000000
8/25/2011	3:13:49 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:13:49 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:13:49 PM	Tube furnace set to 0
8/25/2011	3:13:49 PM	Run finished at 3:13 PM
8/25/2011	3:13:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/25/2011	3:13:59 PM	Main Vac valve opened
8/25/2011	3:15:21 PM	Recipe started at 3:15 PM
8/25/2011	3:15:21 PM	Helium valve closed
8/25/2011	3:15:21 PM	H2 valve closed
8/25/2011	3:15:21 PM	BCl3 valve closed
8/25/2011	3:15:21 PM	PH3 valve closed
8/25/2011	3:15:21 PM	SiCl4 pre valve closed
8/25/2011	3:15:21 PM	SiCl4 post valve closed
8/25/2011	3:15:21 PM	Main Vac valve closed
8/25/2011	3:15:21 PM	Bypass valve closed
8/25/2011	3:15:21 PM	Bubbler valve closed
8/25/2011	3:15:21 PM	Helium MFC set to  0.000000
8/25/2011	3:15:21 PM	H2 MFC set to  0.000000
8/25/2011	3:15:21 PM	BCl3 MFC set to  0.000000
8/25/2011	3:15:21 PM	PHl3 MFC set to  0.000000
8/25/2011	3:15:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:15:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:15:21 PM	Tube furnace set to 0
8/25/2011	3:15:24 PM	Helium valve closed
8/25/2011	3:15:24 PM	BCl3 valve closed
8/25/2011	3:15:24 PM	PH3 valve closed
8/25/2011	3:15:24 PM	SiCl4 pre valve closed
8/25/2011	3:15:24 PM	SiCl4 post valve closed
8/25/2011	3:15:24 PM	Main Vac valve closed
8/25/2011	3:15:24 PM	Bypass valve closed
8/25/2011	3:15:24 PM	Bubbler valve closed
8/25/2011	3:15:24 PM	H2 valve opened
8/25/2011	3:15:24 PM	Helium MFC set to  0.000000
8/25/2011	3:15:24 PM	H2 MFC set to  500.000000
8/25/2011	3:15:24 PM	BCl3 MFC set to  0.000000
8/25/2011	3:15:24 PM	PHl3 MFC set to  0.000000
8/25/2011	3:15:24 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:15:24 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:15:24 PM	Tube furnace set to 0
8/25/2011	3:16:32 PM	Helium valve closed
8/25/2011	3:16:32 PM	BCl3 valve closed
8/25/2011	3:16:32 PM	PH3 valve closed
8/25/2011	3:16:32 PM	SiCl4 pre valve closed
8/25/2011	3:16:32 PM	SiCl4 post valve closed
8/25/2011	3:16:32 PM	Main Vac valve closed
8/25/2011	3:16:32 PM	Bypass valve closed
8/25/2011	3:16:32 PM	H2 valve opened
8/25/2011	3:16:32 PM	Bubbler valve opened
8/25/2011	3:16:32 PM	Helium MFC set to  0.000000
8/25/2011	3:16:32 PM	H2 MFC set to  500.000000
8/25/2011	3:16:32 PM	BCl3 MFC set to  0.000000
8/25/2011	3:16:32 PM	PHl3 MFC set to  0.000000
8/25/2011	3:16:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:16:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:16:32 PM	Tube furnace set to 0
8/25/2011	3:16:33 PM	Helium valve closed
8/25/2011	3:16:33 PM	BCl3 valve closed
8/25/2011	3:16:33 PM	PH3 valve closed
8/25/2011	3:16:33 PM	SiCl4 pre valve closed
8/25/2011	3:16:33 PM	SiCl4 post valve closed
8/25/2011	3:16:33 PM	Main Vac valve closed
8/25/2011	3:16:33 PM	Bypass valve closed
8/25/2011	3:16:33 PM	H2 valve opened
8/25/2011	3:16:33 PM	Bubbler valve opened
8/25/2011	3:16:33 PM	Helium MFC set to  0.000000
8/25/2011	3:16:33 PM	H2 MFC set to  500.000000
8/25/2011	3:16:33 PM	BCl3 MFC set to  0.000000
8/25/2011	3:16:33 PM	PHl3 MFC set to  0.000000
8/25/2011	3:16:33 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:16:33 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:16:34 PM	Tube furnace set to 1000
8/25/2011	3:24:09 PM	Run aborted at 3:24 PM
8/25/2011	3:24:09 PM	Helium valve closed
8/25/2011	3:24:09 PM	H2 valve closed
8/25/2011	3:24:09 PM	BCl3 valve closed
8/25/2011	3:24:09 PM	PH3 valve closed
8/25/2011	3:24:09 PM	SiCl4 pre valve closed
8/25/2011	3:24:09 PM	SiCl4 post valve closed
8/25/2011	3:24:09 PM	Bypass valve closed
8/25/2011	3:24:09 PM	Main Vac valve closed
8/25/2011	3:24:09 PM	Bubbler valve closed
8/25/2011	3:24:09 PM	Helium MFC set to  0.000000
8/25/2011	3:24:09 PM	H2 MFC set to  0.000000
8/25/2011	3:24:09 PM	BCl3 MFC set to  0.000000
8/25/2011	3:24:09 PM	PHl3 MFC set to  0.000000
8/25/2011	3:24:09 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:24:09 PM	Tube furnace set to 0
8/25/2011	3:24:27 PM	Recipe started at 3:24 PM
8/25/2011	3:24:27 PM	Helium valve closed
8/25/2011	3:24:27 PM	H2 valve closed
8/25/2011	3:24:27 PM	BCl3 valve closed
8/25/2011	3:24:27 PM	PH3 valve closed
8/25/2011	3:24:27 PM	SiCl4 pre valve closed
8/25/2011	3:24:27 PM	SiCl4 post valve closed
8/25/2011	3:24:27 PM	Main Vac valve closed
8/25/2011	3:24:27 PM	Bypass valve closed
8/25/2011	3:24:27 PM	Bubbler valve closed
8/25/2011	3:24:27 PM	Helium MFC set to  0.000000
8/25/2011	3:24:27 PM	H2 MFC set to  0.000000
8/25/2011	3:24:27 PM	BCl3 MFC set to  0.000000
8/25/2011	3:24:27 PM	PHl3 MFC set to  0.000000
8/25/2011	3:24:27 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:24:27 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:24:28 PM	Tube furnace set to 0
8/25/2011	3:24:31 PM	Helium valve closed
8/25/2011	3:24:31 PM	BCl3 valve closed
8/25/2011	3:24:31 PM	PH3 valve closed
8/25/2011	3:24:31 PM	SiCl4 pre valve closed
8/25/2011	3:24:31 PM	SiCl4 post valve closed
8/25/2011	3:24:31 PM	Main Vac valve closed
8/25/2011	3:24:31 PM	Bypass valve closed
8/25/2011	3:24:31 PM	Bubbler valve closed
8/25/2011	3:24:31 PM	H2 valve opened
8/25/2011	3:24:31 PM	Helium MFC set to  0.000000
8/25/2011	3:24:31 PM	H2 MFC set to  500.000000
8/25/2011	3:24:31 PM	BCl3 MFC set to  0.000000
8/25/2011	3:24:31 PM	PHl3 MFC set to  0.000000
8/25/2011	3:24:31 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:24:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:24:31 PM	Tube furnace set to 0
8/25/2011	3:24:33 PM	Helium valve closed
8/25/2011	3:24:33 PM	BCl3 valve closed
8/25/2011	3:24:33 PM	PH3 valve closed
8/25/2011	3:24:33 PM	SiCl4 pre valve closed
8/25/2011	3:24:33 PM	SiCl4 post valve closed
8/25/2011	3:24:33 PM	Main Vac valve closed
8/25/2011	3:24:33 PM	Bypass valve closed
8/25/2011	3:24:33 PM	H2 valve opened
8/25/2011	3:24:33 PM	Bubbler valve opened
8/25/2011	3:24:33 PM	Helium MFC set to  0.000000
8/25/2011	3:24:33 PM	H2 MFC set to  500.000000
8/25/2011	3:24:33 PM	BCl3 MFC set to  0.000000
8/25/2011	3:24:33 PM	PHl3 MFC set to  0.000000
8/25/2011	3:24:33 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:24:33 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:24:33 PM	Tube furnace set to 0
8/25/2011	3:24:34 PM	Helium valve closed
8/25/2011	3:24:34 PM	BCl3 valve closed
8/25/2011	3:24:34 PM	PH3 valve closed
8/25/2011	3:24:34 PM	SiCl4 pre valve closed
8/25/2011	3:24:34 PM	SiCl4 post valve closed
8/25/2011	3:24:34 PM	Main Vac valve closed
8/25/2011	3:24:34 PM	Bypass valve closed
8/25/2011	3:24:34 PM	H2 valve opened
8/25/2011	3:24:34 PM	Bubbler valve opened
8/25/2011	3:24:34 PM	Helium MFC set to  0.000000
8/25/2011	3:24:34 PM	H2 MFC set to  500.000000
8/25/2011	3:24:34 PM	BCl3 MFC set to  0.000000
8/25/2011	3:24:34 PM	PHl3 MFC set to  0.000000
8/25/2011	3:24:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	3:24:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:24:34 PM	Tube furnace set to 1000
8/25/2011	3:44:34 PM	Helium valve closed
8/25/2011	3:44:34 PM	BCl3 valve closed
8/25/2011	3:44:34 PM	PH3 valve closed
8/25/2011	3:44:34 PM	Main Vac valve closed
8/25/2011	3:44:34 PM	Bypass valve closed
8/25/2011	3:44:34 PM	H2 valve opened
8/25/2011	3:44:34 PM	SiCl4 pre valve opened
8/25/2011	3:44:34 PM	SiCl4 post valve opened
8/25/2011	3:44:34 PM	Bubbler valve opened
8/25/2011	3:44:34 PM	Helium MFC set to  0.000000
8/25/2011	3:44:34 PM	H2 MFC set to  500.000000
8/25/2011	3:44:34 PM	BCl3 MFC set to  0.000000
8/25/2011	3:44:34 PM	PHl3 MFC set to  0.000000
8/25/2011	3:44:34 PM	SiCl4 MFC set to  50.000000
8/25/2011	3:44:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	3:44:34 PM	Tube furnace set to 1000
8/25/2011	4:04:34 PM	Helium valve closed
8/25/2011	4:04:34 PM	BCl3 valve closed
8/25/2011	4:04:34 PM	PH3 valve closed
8/25/2011	4:04:34 PM	SiCl4 pre valve closed
8/25/2011	4:04:34 PM	SiCl4 post valve closed
8/25/2011	4:04:34 PM	Main Vac valve closed
8/25/2011	4:04:34 PM	Bypass valve closed
8/25/2011	4:04:34 PM	H2 valve opened
8/25/2011	4:04:34 PM	Bubbler valve opened
8/25/2011	4:04:34 PM	Helium MFC set to  0.000000
8/25/2011	4:04:34 PM	H2 MFC set to  500.000000
8/25/2011	4:04:34 PM	BCl3 MFC set to  0.000000
8/25/2011	4:04:34 PM	PHl3 MFC set to  0.000000
8/25/2011	4:04:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	4:04:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	4:04:34 PM	Tube furnace set to 950
8/25/2011	4:09:34 PM	Helium valve closed
8/25/2011	4:09:34 PM	BCl3 valve closed
8/25/2011	4:09:34 PM	PH3 valve closed
8/25/2011	4:09:34 PM	SiCl4 pre valve closed
8/25/2011	4:09:34 PM	SiCl4 post valve closed
8/25/2011	4:09:34 PM	Main Vac valve closed
8/25/2011	4:09:34 PM	Bypass valve closed
8/25/2011	4:09:34 PM	H2 valve opened
8/25/2011	4:09:34 PM	Bubbler valve opened
8/25/2011	4:09:34 PM	Helium MFC set to  0.000000
8/25/2011	4:09:34 PM	H2 MFC set to  500.000000
8/25/2011	4:09:34 PM	BCl3 MFC set to  0.000000
8/25/2011	4:09:34 PM	PHl3 MFC set to  0.000000
8/25/2011	4:09:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	4:09:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	4:09:34 PM	Tube furnace set to 850
8/25/2011	4:14:34 PM	H2 valve closed
8/25/2011	4:14:34 PM	BCl3 valve closed
8/25/2011	4:14:34 PM	PH3 valve closed
8/25/2011	4:14:34 PM	SiCl4 pre valve closed
8/25/2011	4:14:34 PM	SiCl4 post valve closed
8/25/2011	4:14:34 PM	Main Vac valve closed
8/25/2011	4:14:34 PM	Bypass valve closed
8/25/2011	4:14:34 PM	Helium valve opened
8/25/2011	4:14:34 PM	Bubbler valve opened
8/25/2011	4:14:34 PM	Helium MFC set to  500.000000
8/25/2011	4:14:34 PM	H2 MFC set to  0.000000
8/25/2011	4:14:34 PM	BCl3 MFC set to  0.000000
8/25/2011	4:14:34 PM	PHl3 MFC set to  0.000000
8/25/2011	4:14:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	4:14:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	4:14:35 PM	Tube furnace set to 0
8/25/2011	4:53:07 PM	Helium valve closed
8/25/2011	4:53:07 PM	H2 valve closed
8/25/2011	4:53:07 PM	BCl3 valve closed
8/25/2011	4:53:07 PM	PH3 valve closed
8/25/2011	4:53:07 PM	SiCl4 pre valve closed
8/25/2011	4:53:07 PM	SiCl4 post valve closed
8/25/2011	4:53:08 PM	Main Vac valve closed
8/25/2011	4:53:08 PM	Bypass valve closed
8/25/2011	4:53:08 PM	Bubbler valve closed
8/25/2011	4:53:08 PM	Helium MFC set to  0.000000
8/25/2011	4:53:08 PM	H2 MFC set to  0.000000
8/25/2011	4:53:08 PM	BCl3 MFC set to  0.000000
8/25/2011	4:53:08 PM	PHl3 MFC set to  0.000000
8/25/2011	4:53:08 PM	SiCl4 MFC set to  0.000000
8/25/2011	4:53:08 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	4:53:08 PM	Tube furnace set to 0
8/25/2011	4:53:09 PM	Run finished at 4:53 PM
8/25/2011	5:04:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	5:04:18 PM	Recipe started at 5:04 PM
8/25/2011	5:04:18 PM	Helium valve closed
8/25/2011	5:04:18 PM	H2 valve closed
8/25/2011	5:04:18 PM	BCl3 valve closed
8/25/2011	5:04:18 PM	PH3 valve closed
8/25/2011	5:04:18 PM	SiCl4 pre valve closed
8/25/2011	5:04:18 PM	SiCl4 post valve closed
8/25/2011	5:04:18 PM	Main Vac valve closed
8/25/2011	5:04:18 PM	Bubbler valve closed
8/25/2011	5:04:18 PM	Bypass valve opened
8/25/2011	5:04:18 PM	Helium MFC set to  0.000000
8/25/2011	5:04:18 PM	H2 MFC set to  0.000000
8/25/2011	5:04:18 PM	BCl3 MFC set to  0.000000
8/25/2011	5:04:18 PM	PHl3 MFC set to  0.000000
8/25/2011	5:04:18 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:04:18 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:04:18 PM	Tube furnace set to 0
8/25/2011	5:05:31 PM	Helium valve closed
8/25/2011	5:05:31 PM	H2 valve closed
8/25/2011	5:05:31 PM	BCl3 valve closed
8/25/2011	5:05:31 PM	PH3 valve closed
8/25/2011	5:05:31 PM	SiCl4 pre valve closed
8/25/2011	5:05:31 PM	SiCl4 post valve closed
8/25/2011	5:05:31 PM	Main Vac valve closed
8/25/2011	5:05:31 PM	Bubbler valve closed
8/25/2011	5:05:31 PM	Bypass valve opened
8/25/2011	5:05:31 PM	Helium MFC set to  0.000000
8/25/2011	5:05:31 PM	H2 MFC set to  0.000000
8/25/2011	5:05:31 PM	BCl3 MFC set to  0.000000
8/25/2011	5:05:31 PM	PHl3 MFC set to  0.000000
8/25/2011	5:05:31 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:05:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:05:31 PM	Tube furnace set to 0
8/25/2011	5:06:24 PM	Helium valve closed
8/25/2011	5:06:24 PM	H2 valve closed
8/25/2011	5:06:24 PM	BCl3 valve closed
8/25/2011	5:06:24 PM	PH3 valve closed
8/25/2011	5:06:25 PM	SiCl4 pre valve closed
8/25/2011	5:06:25 PM	SiCl4 post valve closed
8/25/2011	5:06:25 PM	Bypass valve closed
8/25/2011	5:06:25 PM	Bubbler valve closed
8/25/2011	5:06:25 PM	Main Vac valve opened
8/25/2011	5:06:25 PM	Helium MFC set to  0.000000
8/25/2011	5:06:25 PM	H2 MFC set to  0.000000
8/25/2011	5:06:25 PM	BCl3 MFC set to  0.000000
8/25/2011	5:06:25 PM	PHl3 MFC set to  0.000000
8/25/2011	5:06:25 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:06:25 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:06:25 PM	Tube furnace set to 0
8/25/2011	5:06:26 PM	Run finished at 5:06 PM
8/25/2011	5:06:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	5:28:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	5:28:59 PM	Recipe started at 5:28 PM
8/25/2011	5:28:59 PM	Helium valve closed
8/25/2011	5:28:59 PM	H2 valve closed
8/25/2011	5:28:59 PM	BCl3 valve closed
8/25/2011	5:28:59 PM	PH3 valve closed
8/25/2011	5:28:59 PM	SiCl4 pre valve closed
8/25/2011	5:28:59 PM	SiCl4 post valve closed
8/25/2011	5:28:59 PM	Main Vac valve closed
8/25/2011	5:28:59 PM	Bubbler valve closed
8/25/2011	5:28:59 PM	Bypass valve opened
8/25/2011	5:28:59 PM	Helium MFC set to  0.000000
8/25/2011	5:28:59 PM	H2 MFC set to  0.000000
8/25/2011	5:28:59 PM	BCl3 MFC set to  0.000000
8/25/2011	5:28:59 PM	PHl3 MFC set to  0.000000
8/25/2011	5:28:59 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:28:59 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:28:59 PM	Tube furnace set to 0
8/25/2011	5:28:59 PM	Helium valve closed
8/25/2011	5:28:59 PM	H2 valve closed
8/25/2011	5:28:59 PM	BCl3 valve closed
8/25/2011	5:28:59 PM	PH3 valve closed
8/25/2011	5:28:59 PM	SiCl4 pre valve closed
8/25/2011	5:28:59 PM	SiCl4 post valve closed
8/25/2011	5:28:59 PM	Main Vac valve closed
8/25/2011	5:28:59 PM	Bubbler valve closed
8/25/2011	5:28:59 PM	Bypass valve opened
8/25/2011	5:28:59 PM	Helium MFC set to  0.000000
8/25/2011	5:28:59 PM	H2 MFC set to  0.000000
8/25/2011	5:28:59 PM	BCl3 MFC set to  0.000000
8/25/2011	5:28:59 PM	PHl3 MFC set to  0.000000
8/25/2011	5:28:59 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:28:59 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:28:59 PM	Tube furnace set to 0
8/25/2011	5:29:00 PM	Helium valve closed
8/25/2011	5:29:00 PM	H2 valve closed
8/25/2011	5:29:00 PM	BCl3 valve closed
8/25/2011	5:29:00 PM	PH3 valve closed
8/25/2011	5:29:00 PM	SiCl4 pre valve closed
8/25/2011	5:29:00 PM	SiCl4 post valve closed
8/25/2011	5:29:00 PM	Bypass valve closed
8/25/2011	5:29:00 PM	Bubbler valve closed
8/25/2011	5:29:00 PM	Main Vac valve opened
8/25/2011	5:29:00 PM	Helium MFC set to  0.000000
8/25/2011	5:29:00 PM	H2 MFC set to  0.000000
8/25/2011	5:29:00 PM	BCl3 MFC set to  0.000000
8/25/2011	5:29:00 PM	PHl3 MFC set to  0.000000
8/25/2011	5:29:00 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:29:00 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:29:00 PM	Tube furnace set to 0
8/25/2011	5:29:30 PM	H2 valve closed
8/25/2011	5:29:30 PM	BCl3 valve closed
8/25/2011	5:29:30 PM	PH3 valve closed
8/25/2011	5:29:30 PM	SiCl4 pre valve closed
8/25/2011	5:29:30 PM	SiCl4 post valve closed
8/25/2011	5:29:30 PM	Bypass valve closed
8/25/2011	5:29:30 PM	Bubbler valve closed
8/25/2011	5:29:30 PM	Helium valve opened
8/25/2011	5:29:30 PM	Main Vac valve opened
8/25/2011	5:29:30 PM	Helium MFC set to  20.000000
8/25/2011	5:29:30 PM	H2 MFC set to  0.000000
8/25/2011	5:29:30 PM	BCl3 MFC set to  0.000000
8/25/2011	5:29:30 PM	PHl3 MFC set to  0.000000
8/25/2011	5:29:30 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:29:30 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:29:31 PM	Tube furnace set to 0
8/25/2011	5:30:01 PM	Helium valve closed
8/25/2011	5:30:01 PM	H2 valve closed
8/25/2011	5:30:01 PM	BCl3 valve closed
8/25/2011	5:30:01 PM	PH3 valve closed
8/25/2011	5:30:01 PM	SiCl4 pre valve closed
8/25/2011	5:30:01 PM	SiCl4 post valve closed
8/25/2011	5:30:01 PM	Bypass valve closed
8/25/2011	5:30:01 PM	Bubbler valve closed
8/25/2011	5:30:01 PM	Main Vac valve opened
8/25/2011	5:30:01 PM	Helium MFC set to  0.000000
8/25/2011	5:30:01 PM	H2 MFC set to  0.000000
8/25/2011	5:30:01 PM	BCl3 MFC set to  0.000000
8/25/2011	5:30:01 PM	PHl3 MFC set to  0.000000
8/25/2011	5:30:01 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:30:01 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:30:01 PM	Tube furnace set to 0
8/25/2011	5:30:31 PM	H2 valve closed
8/25/2011	5:30:31 PM	BCl3 valve closed
8/25/2011	5:30:31 PM	PH3 valve closed
8/25/2011	5:30:31 PM	SiCl4 pre valve closed
8/25/2011	5:30:31 PM	SiCl4 post valve closed
8/25/2011	5:30:31 PM	Bypass valve closed
8/25/2011	5:30:31 PM	Bubbler valve closed
8/25/2011	5:30:31 PM	Helium valve opened
8/25/2011	5:30:31 PM	Main Vac valve opened
8/25/2011	5:30:31 PM	Helium MFC set to  20.000000
8/25/2011	5:30:31 PM	H2 MFC set to  0.000000
8/25/2011	5:30:31 PM	BCl3 MFC set to  0.000000
8/25/2011	5:30:31 PM	PHl3 MFC set to  0.000000
8/25/2011	5:30:31 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:30:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:30:31 PM	Tube furnace set to 0
8/25/2011	5:31:01 PM	Helium valve closed
8/25/2011	5:31:01 PM	H2 valve closed
8/25/2011	5:31:01 PM	BCl3 valve closed
8/25/2011	5:31:01 PM	PH3 valve closed
8/25/2011	5:31:01 PM	SiCl4 pre valve closed
8/25/2011	5:31:01 PM	SiCl4 post valve closed
8/25/2011	5:31:01 PM	Bypass valve closed
8/25/2011	5:31:01 PM	Bubbler valve closed
8/25/2011	5:31:01 PM	Main Vac valve opened
8/25/2011	5:31:01 PM	Helium MFC set to  0.000000
8/25/2011	5:31:01 PM	H2 MFC set to  0.000000
8/25/2011	5:31:01 PM	BCl3 MFC set to  0.000000
8/25/2011	5:31:01 PM	PHl3 MFC set to  0.000000
8/25/2011	5:31:01 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:31:01 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:31:01 PM	Tube furnace set to 0
8/25/2011	5:31:31 PM	H2 valve closed
8/25/2011	5:31:31 PM	BCl3 valve closed
8/25/2011	5:31:31 PM	PH3 valve closed
8/25/2011	5:31:31 PM	SiCl4 pre valve closed
8/25/2011	5:31:31 PM	SiCl4 post valve closed
8/25/2011	5:31:31 PM	Bypass valve closed
8/25/2011	5:31:31 PM	Bubbler valve closed
8/25/2011	5:31:31 PM	Helium valve opened
8/25/2011	5:31:31 PM	Main Vac valve opened
8/25/2011	5:31:31 PM	Helium MFC set to  20.000000
8/25/2011	5:31:31 PM	H2 MFC set to  0.000000
8/25/2011	5:31:31 PM	BCl3 MFC set to  0.000000
8/25/2011	5:31:31 PM	PHl3 MFC set to  0.000000
8/25/2011	5:31:31 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:31:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:31:31 PM	Tube furnace set to 0
8/25/2011	5:32:01 PM	Helium valve closed
8/25/2011	5:32:01 PM	H2 valve closed
8/25/2011	5:32:01 PM	BCl3 valve closed
8/25/2011	5:32:01 PM	PH3 valve closed
8/25/2011	5:32:01 PM	SiCl4 pre valve closed
8/25/2011	5:32:01 PM	SiCl4 post valve closed
8/25/2011	5:32:01 PM	Bypass valve closed
8/25/2011	5:32:01 PM	Bubbler valve closed
8/25/2011	5:32:01 PM	Main Vac valve opened
8/25/2011	5:32:01 PM	Helium MFC set to  0.000000
8/25/2011	5:32:01 PM	H2 MFC set to  0.000000
8/25/2011	5:32:01 PM	BCl3 MFC set to  0.000000
8/25/2011	5:32:01 PM	PHl3 MFC set to  0.000000
8/25/2011	5:32:01 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:32:01 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:32:02 PM	Tube furnace set to 0
8/25/2011	5:32:32 PM	H2 valve closed
8/25/2011	5:32:32 PM	BCl3 valve closed
8/25/2011	5:32:32 PM	PH3 valve closed
8/25/2011	5:32:32 PM	SiCl4 pre valve closed
8/25/2011	5:32:32 PM	SiCl4 post valve closed
8/25/2011	5:32:32 PM	Bypass valve closed
8/25/2011	5:32:32 PM	Bubbler valve closed
8/25/2011	5:32:32 PM	Helium valve opened
8/25/2011	5:32:32 PM	Main Vac valve opened
8/25/2011	5:32:32 PM	Helium MFC set to  20.000000
8/25/2011	5:32:32 PM	H2 MFC set to  0.000000
8/25/2011	5:32:32 PM	BCl3 MFC set to  0.000000
8/25/2011	5:32:32 PM	PHl3 MFC set to  0.000000
8/25/2011	5:32:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:32:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:32:32 PM	Tube furnace set to 0
8/25/2011	5:33:02 PM	Helium valve closed
8/25/2011	5:33:02 PM	H2 valve closed
8/25/2011	5:33:02 PM	BCl3 valve closed
8/25/2011	5:33:02 PM	PH3 valve closed
8/25/2011	5:33:02 PM	SiCl4 pre valve closed
8/25/2011	5:33:02 PM	SiCl4 post valve closed
8/25/2011	5:33:02 PM	Bypass valve closed
8/25/2011	5:33:02 PM	Bubbler valve closed
8/25/2011	5:33:02 PM	Main Vac valve opened
8/25/2011	5:33:02 PM	Helium MFC set to  0.000000
8/25/2011	5:33:02 PM	H2 MFC set to  0.000000
8/25/2011	5:33:02 PM	BCl3 MFC set to  0.000000
8/25/2011	5:33:02 PM	PHl3 MFC set to  0.000000
8/25/2011	5:33:02 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:33:02 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:33:02 PM	Tube furnace set to 0
8/25/2011	5:33:32 PM	H2 valve closed
8/25/2011	5:33:32 PM	BCl3 valve closed
8/25/2011	5:33:32 PM	PH3 valve closed
8/25/2011	5:33:32 PM	SiCl4 pre valve closed
8/25/2011	5:33:32 PM	SiCl4 post valve closed
8/25/2011	5:33:32 PM	Bypass valve closed
8/25/2011	5:33:32 PM	Bubbler valve closed
8/25/2011	5:33:32 PM	Helium valve opened
8/25/2011	5:33:32 PM	Main Vac valve opened
8/25/2011	5:33:32 PM	Helium MFC set to  20.000000
8/25/2011	5:33:32 PM	H2 MFC set to  0.000000
8/25/2011	5:33:32 PM	BCl3 MFC set to  0.000000
8/25/2011	5:33:32 PM	PHl3 MFC set to  0.000000
8/25/2011	5:33:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:33:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:33:32 PM	Tube furnace set to 0
8/25/2011	5:34:02 PM	Helium valve closed
8/25/2011	5:34:02 PM	H2 valve closed
8/25/2011	5:34:02 PM	BCl3 valve closed
8/25/2011	5:34:02 PM	PH3 valve closed
8/25/2011	5:34:02 PM	SiCl4 pre valve closed
8/25/2011	5:34:02 PM	SiCl4 post valve closed
8/25/2011	5:34:02 PM	Bypass valve closed
8/25/2011	5:34:02 PM	Bubbler valve closed
8/25/2011	5:34:02 PM	Main Vac valve opened
8/25/2011	5:34:02 PM	Helium MFC set to  0.000000
8/25/2011	5:34:02 PM	H2 MFC set to  0.000000
8/25/2011	5:34:02 PM	BCl3 MFC set to  0.000000
8/25/2011	5:34:02 PM	PHl3 MFC set to  0.000000
8/25/2011	5:34:02 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:34:02 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:34:02 PM	Tube furnace set to 0
8/25/2011	5:34:32 PM	H2 valve closed
8/25/2011	5:34:32 PM	BCl3 valve closed
8/25/2011	5:34:32 PM	PH3 valve closed
8/25/2011	5:34:32 PM	SiCl4 pre valve closed
8/25/2011	5:34:32 PM	SiCl4 post valve closed
8/25/2011	5:34:32 PM	Bypass valve closed
8/25/2011	5:34:32 PM	Bubbler valve closed
8/25/2011	5:34:32 PM	Helium valve opened
8/25/2011	5:34:32 PM	Main Vac valve opened
8/25/2011	5:34:32 PM	Helium MFC set to  20.000000
8/25/2011	5:34:32 PM	H2 MFC set to  0.000000
8/25/2011	5:34:32 PM	BCl3 MFC set to  0.000000
8/25/2011	5:34:32 PM	PHl3 MFC set to  0.000000
8/25/2011	5:34:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:34:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:34:33 PM	Tube furnace set to 0
8/25/2011	5:35:03 PM	Helium valve closed
8/25/2011	5:35:03 PM	H2 valve closed
8/25/2011	5:35:03 PM	BCl3 valve closed
8/25/2011	5:35:03 PM	PH3 valve closed
8/25/2011	5:35:03 PM	SiCl4 pre valve closed
8/25/2011	5:35:03 PM	SiCl4 post valve closed
8/25/2011	5:35:03 PM	Bypass valve closed
8/25/2011	5:35:03 PM	Bubbler valve closed
8/25/2011	5:35:03 PM	Main Vac valve opened
8/25/2011	5:35:03 PM	Helium MFC set to  0.000000
8/25/2011	5:35:03 PM	H2 MFC set to  0.000000
8/25/2011	5:35:03 PM	BCl3 MFC set to  0.000000
8/25/2011	5:35:03 PM	PHl3 MFC set to  0.000000
8/25/2011	5:35:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:35:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:35:03 PM	Tube furnace set to 0
8/25/2011	5:35:33 PM	H2 valve closed
8/25/2011	5:35:33 PM	BCl3 valve closed
8/25/2011	5:35:33 PM	PH3 valve closed
8/25/2011	5:35:33 PM	SiCl4 pre valve closed
8/25/2011	5:35:33 PM	SiCl4 post valve closed
8/25/2011	5:35:33 PM	Bypass valve closed
8/25/2011	5:35:33 PM	Bubbler valve closed
8/25/2011	5:35:33 PM	Helium valve opened
8/25/2011	5:35:33 PM	Main Vac valve opened
8/25/2011	5:35:33 PM	Helium MFC set to  20.000000
8/25/2011	5:35:33 PM	H2 MFC set to  0.000000
8/25/2011	5:35:33 PM	BCl3 MFC set to  0.000000
8/25/2011	5:35:33 PM	PHl3 MFC set to  0.000000
8/25/2011	5:35:33 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:35:33 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:35:33 PM	Tube furnace set to 0
8/25/2011	5:36:03 PM	Helium valve closed
8/25/2011	5:36:03 PM	H2 valve closed
8/25/2011	5:36:03 PM	BCl3 valve closed
8/25/2011	5:36:03 PM	PH3 valve closed
8/25/2011	5:36:03 PM	SiCl4 pre valve closed
8/25/2011	5:36:03 PM	SiCl4 post valve closed
8/25/2011	5:36:03 PM	Bypass valve closed
8/25/2011	5:36:03 PM	Bubbler valve closed
8/25/2011	5:36:03 PM	Main Vac valve opened
8/25/2011	5:36:03 PM	Helium MFC set to  0.000000
8/25/2011	5:36:03 PM	H2 MFC set to  0.000000
8/25/2011	5:36:03 PM	BCl3 MFC set to  0.000000
8/25/2011	5:36:03 PM	PHl3 MFC set to  0.000000
8/25/2011	5:36:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:36:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:36:03 PM	Tube furnace set to 0
8/25/2011	5:36:33 PM	H2 valve closed
8/25/2011	5:36:33 PM	BCl3 valve closed
8/25/2011	5:36:33 PM	PH3 valve closed
8/25/2011	5:36:33 PM	SiCl4 pre valve closed
8/25/2011	5:36:33 PM	SiCl4 post valve closed
8/25/2011	5:36:33 PM	Bypass valve closed
8/25/2011	5:36:33 PM	Bubbler valve closed
8/25/2011	5:36:33 PM	Helium valve opened
8/25/2011	5:36:33 PM	Main Vac valve opened
8/25/2011	5:36:33 PM	Helium MFC set to  20.000000
8/25/2011	5:36:33 PM	H2 MFC set to  0.000000
8/25/2011	5:36:33 PM	BCl3 MFC set to  0.000000
8/25/2011	5:36:33 PM	PHl3 MFC set to  0.000000
8/25/2011	5:36:33 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:36:33 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:36:33 PM	Tube furnace set to 0
8/25/2011	5:37:03 PM	Helium valve closed
8/25/2011	5:37:03 PM	H2 valve closed
8/25/2011	5:37:03 PM	BCl3 valve closed
8/25/2011	5:37:03 PM	PH3 valve closed
8/25/2011	5:37:03 PM	SiCl4 pre valve closed
8/25/2011	5:37:03 PM	SiCl4 post valve closed
8/25/2011	5:37:03 PM	Bypass valve closed
8/25/2011	5:37:03 PM	Bubbler valve closed
8/25/2011	5:37:03 PM	Main Vac valve opened
8/25/2011	5:37:03 PM	Helium MFC set to  0.000000
8/25/2011	5:37:03 PM	H2 MFC set to  0.000000
8/25/2011	5:37:03 PM	BCl3 MFC set to  0.000000
8/25/2011	5:37:03 PM	PHl3 MFC set to  0.000000
8/25/2011	5:37:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:37:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:37:04 PM	Tube furnace set to 0
8/25/2011	5:37:34 PM	H2 valve closed
8/25/2011	5:37:34 PM	BCl3 valve closed
8/25/2011	5:37:34 PM	PH3 valve closed
8/25/2011	5:37:34 PM	SiCl4 pre valve closed
8/25/2011	5:37:34 PM	SiCl4 post valve closed
8/25/2011	5:37:34 PM	Bypass valve closed
8/25/2011	5:37:34 PM	Bubbler valve closed
8/25/2011	5:37:34 PM	Helium valve opened
8/25/2011	5:37:34 PM	Main Vac valve opened
8/25/2011	5:37:34 PM	Helium MFC set to  20.000000
8/25/2011	5:37:34 PM	H2 MFC set to  0.000000
8/25/2011	5:37:34 PM	BCl3 MFC set to  0.000000
8/25/2011	5:37:34 PM	PHl3 MFC set to  0.000000
8/25/2011	5:37:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:37:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:37:34 PM	Tube furnace set to 0
8/25/2011	5:38:04 PM	Helium valve closed
8/25/2011	5:38:04 PM	H2 valve closed
8/25/2011	5:38:04 PM	BCl3 valve closed
8/25/2011	5:38:04 PM	PH3 valve closed
8/25/2011	5:38:04 PM	SiCl4 pre valve closed
8/25/2011	5:38:04 PM	SiCl4 post valve closed
8/25/2011	5:38:04 PM	Bypass valve closed
8/25/2011	5:38:04 PM	Bubbler valve closed
8/25/2011	5:38:04 PM	Main Vac valve opened
8/25/2011	5:38:04 PM	Helium MFC set to  0.000000
8/25/2011	5:38:04 PM	H2 MFC set to  0.000000
8/25/2011	5:38:04 PM	BCl3 MFC set to  0.000000
8/25/2011	5:38:04 PM	PHl3 MFC set to  0.000000
8/25/2011	5:38:04 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:38:04 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:38:04 PM	Tube furnace set to 0
8/25/2011	5:38:34 PM	H2 valve closed
8/25/2011	5:38:34 PM	BCl3 valve closed
8/25/2011	5:38:34 PM	PH3 valve closed
8/25/2011	5:38:34 PM	SiCl4 pre valve closed
8/25/2011	5:38:34 PM	SiCl4 post valve closed
8/25/2011	5:38:34 PM	Bypass valve closed
8/25/2011	5:38:34 PM	Bubbler valve closed
8/25/2011	5:38:34 PM	Helium valve opened
8/25/2011	5:38:34 PM	Main Vac valve opened
8/25/2011	5:38:34 PM	Helium MFC set to  20.000000
8/25/2011	5:38:34 PM	H2 MFC set to  0.000000
8/25/2011	5:38:34 PM	BCl3 MFC set to  0.000000
8/25/2011	5:38:34 PM	PHl3 MFC set to  0.000000
8/25/2011	5:38:34 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:38:34 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:38:34 PM	Tube furnace set to 0
8/25/2011	5:39:04 PM	Helium valve closed
8/25/2011	5:39:04 PM	H2 valve closed
8/25/2011	5:39:04 PM	BCl3 valve closed
8/25/2011	5:39:04 PM	PH3 valve closed
8/25/2011	5:39:04 PM	SiCl4 pre valve closed
8/25/2011	5:39:04 PM	SiCl4 post valve closed
8/25/2011	5:39:04 PM	Bypass valve closed
8/25/2011	5:39:04 PM	Bubbler valve closed
8/25/2011	5:39:04 PM	Main Vac valve opened
8/25/2011	5:39:04 PM	Helium MFC set to  0.000000
8/25/2011	5:39:04 PM	H2 MFC set to  0.000000
8/25/2011	5:39:04 PM	BCl3 MFC set to  0.000000
8/25/2011	5:39:04 PM	PHl3 MFC set to  0.000000
8/25/2011	5:39:04 PM	SiCl4 MFC set to  0.000000
8/25/2011	5:39:04 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	5:39:04 PM	Tube furnace set to 0
8/25/2011	5:39:05 PM	Run finished at 5:39 PM
8/25/2011	5:39:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	5:50:01 PM	Helium MFC set to  15.000000
8/25/2011	5:50:04 PM	Helium valve opened
8/25/2011	6:03:11 PM	Helium valve closed
8/25/2011	6:22:19 PM	Recipe started at 6:22 PM
8/25/2011	6:22:19 PM	Helium valve closed
8/25/2011	6:22:19 PM	H2 valve closed
8/25/2011	6:22:19 PM	BCl3 valve closed
8/25/2011	6:22:19 PM	PH3 valve closed
8/25/2011	6:22:19 PM	SiCl4 pre valve closed
8/25/2011	6:22:19 PM	SiCl4 post valve closed
8/25/2011	6:22:19 PM	Main Vac valve closed
8/25/2011	6:22:19 PM	Bypass valve closed
8/25/2011	6:22:19 PM	Bubbler valve closed
8/25/2011	6:22:19 PM	Helium MFC set to  0.000000
8/25/2011	6:22:19 PM	H2 MFC set to  0.000000
8/25/2011	6:22:19 PM	BCl3 MFC set to  0.000000
8/25/2011	6:22:19 PM	PHl3 MFC set to  0.000000
8/25/2011	6:22:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	6:22:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	6:22:19 PM	Tube furnace set to 0
8/25/2011	6:22:22 PM	Helium valve closed
8/25/2011	6:22:22 PM	BCl3 valve closed
8/25/2011	6:22:22 PM	PH3 valve closed
8/25/2011	6:22:22 PM	SiCl4 pre valve closed
8/25/2011	6:22:22 PM	SiCl4 post valve closed
8/25/2011	6:22:22 PM	Main Vac valve closed
8/25/2011	6:22:22 PM	Bypass valve closed
8/25/2011	6:22:22 PM	Bubbler valve closed
8/25/2011	6:22:22 PM	H2 valve opened
8/25/2011	6:22:22 PM	Helium MFC set to  0.000000
8/25/2011	6:22:22 PM	H2 MFC set to  500.000000
8/25/2011	6:22:22 PM	BCl3 MFC set to  0.000000
8/25/2011	6:22:22 PM	PHl3 MFC set to  0.000000
8/25/2011	6:22:22 PM	SiCl4 MFC set to  0.000000
8/25/2011	6:22:22 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	6:22:22 PM	Tube furnace set to 0
8/25/2011	6:23:30 PM	Helium valve closed
8/25/2011	6:23:30 PM	BCl3 valve closed
8/25/2011	6:23:30 PM	PH3 valve closed
8/25/2011	6:23:30 PM	SiCl4 pre valve closed
8/25/2011	6:23:30 PM	SiCl4 post valve closed
8/25/2011	6:23:30 PM	Main Vac valve closed
8/25/2011	6:23:30 PM	Bypass valve closed
8/25/2011	6:23:30 PM	H2 valve opened
8/25/2011	6:23:30 PM	Bubbler valve opened
8/25/2011	6:23:30 PM	Helium MFC set to  0.000000
8/25/2011	6:23:30 PM	H2 MFC set to  500.000000
8/25/2011	6:23:30 PM	BCl3 MFC set to  0.000000
8/25/2011	6:23:30 PM	PHl3 MFC set to  0.000000
8/25/2011	6:23:30 PM	SiCl4 MFC set to  0.000000
8/25/2011	6:23:30 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	6:23:30 PM	Tube furnace set to 0
8/25/2011	6:23:31 PM	Helium valve closed
8/25/2011	6:23:31 PM	BCl3 valve closed
8/25/2011	6:23:31 PM	PH3 valve closed
8/25/2011	6:23:31 PM	SiCl4 pre valve closed
8/25/2011	6:23:31 PM	SiCl4 post valve closed
8/25/2011	6:23:31 PM	Main Vac valve closed
8/25/2011	6:23:31 PM	Bypass valve closed
8/25/2011	6:23:31 PM	H2 valve opened
8/25/2011	6:23:31 PM	Bubbler valve opened
8/25/2011	6:23:31 PM	Helium MFC set to  0.000000
8/25/2011	6:23:31 PM	H2 MFC set to  500.000000
8/25/2011	6:23:31 PM	BCl3 MFC set to  0.000000
8/25/2011	6:23:31 PM	PHl3 MFC set to  0.000000
8/25/2011	6:23:31 PM	SiCl4 MFC set to  0.000000
8/25/2011	6:23:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	6:23:31 PM	Tube furnace set to 1000
8/25/2011	6:43:31 PM	Helium valve closed
8/25/2011	6:43:31 PM	BCl3 valve closed
8/25/2011	6:43:31 PM	PH3 valve closed
8/25/2011	6:43:31 PM	Main Vac valve closed
8/25/2011	6:43:31 PM	Bypass valve closed
8/25/2011	6:43:31 PM	H2 valve opened
8/25/2011	6:43:31 PM	SiCl4 pre valve opened
8/25/2011	6:43:31 PM	SiCl4 post valve opened
8/25/2011	6:43:31 PM	Bubbler valve opened
8/25/2011	6:43:31 PM	Helium MFC set to  0.000000
8/25/2011	6:43:31 PM	H2 MFC set to  500.000000
8/25/2011	6:43:31 PM	BCl3 MFC set to  0.000000
8/25/2011	6:43:31 PM	PHl3 MFC set to  0.000000
8/25/2011	6:43:31 PM	SiCl4 MFC set to  50.000000
8/25/2011	6:43:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	6:43:31 PM	Tube furnace set to 1000
8/25/2011	7:03:31 PM	Helium valve closed
8/25/2011	7:03:31 PM	BCl3 valve closed
8/25/2011	7:03:31 PM	PH3 valve closed
8/25/2011	7:03:31 PM	Main Vac valve closed
8/25/2011	7:03:31 PM	Bypass valve closed
8/25/2011	7:03:31 PM	H2 valve opened
8/25/2011	7:03:31 PM	SiCl4 pre valve opened
8/25/2011	7:03:31 PM	SiCl4 post valve opened
8/25/2011	7:03:31 PM	Bubbler valve opened
8/25/2011	7:03:31 PM	Helium MFC set to  0.000000
8/25/2011	7:03:31 PM	H2 MFC set to  500.000000
8/25/2011	7:03:31 PM	BCl3 MFC set to  0.000000
8/25/2011	7:03:31 PM	PHl3 MFC set to  0.000000
8/25/2011	7:03:31 PM	SiCl4 MFC set to  50.000000
8/25/2011	7:03:31 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	7:03:31 PM	Tube furnace set to 875
8/25/2011	7:13:31 PM	H2 valve closed
8/25/2011	7:13:31 PM	BCl3 valve closed
8/25/2011	7:13:31 PM	PH3 valve closed
8/25/2011	7:13:31 PM	SiCl4 pre valve closed
8/25/2011	7:13:31 PM	SiCl4 post valve closed
8/25/2011	7:13:31 PM	Main Vac valve closed
8/25/2011	7:13:31 PM	Bypass valve closed
8/25/2011	7:13:31 PM	Helium valve opened
8/25/2011	7:13:31 PM	Bubbler valve opened
8/25/2011	7:13:31 PM	Helium MFC set to  500.000000
8/25/2011	7:13:32 PM	H2 MFC set to  0.000000
8/25/2011	7:13:32 PM	BCl3 MFC set to  0.000000
8/25/2011	7:13:32 PM	PHl3 MFC set to  0.000000
8/25/2011	7:13:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	7:13:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	7:13:32 PM	Tube furnace set to 0
8/25/2011	7:53:32 PM	Helium valve closed
8/25/2011	7:53:32 PM	H2 valve closed
8/25/2011	7:53:32 PM	BCl3 valve closed
8/25/2011	7:53:32 PM	PH3 valve closed
8/25/2011	7:53:32 PM	SiCl4 pre valve closed
8/25/2011	7:53:32 PM	SiCl4 post valve closed
8/25/2011	7:53:32 PM	Main Vac valve closed
8/25/2011	7:53:32 PM	Bypass valve closed
8/25/2011	7:53:32 PM	Bubbler valve closed
8/25/2011	7:53:32 PM	Helium MFC set to  0.000000
8/25/2011	7:53:32 PM	H2 MFC set to  0.000000
8/25/2011	7:53:32 PM	BCl3 MFC set to  0.000000
8/25/2011	7:53:32 PM	PHl3 MFC set to  0.000000
8/25/2011	7:53:32 PM	SiCl4 MFC set to  0.000000
8/25/2011	7:53:32 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	7:53:32 PM	Tube furnace set to 0
8/25/2011	7:53:33 PM	Run finished at 7:53 PM
8/25/2011	8:20:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	8:20:04 PM	Recipe started at 8:20 PM
8/25/2011	8:20:04 PM	Helium valve closed
8/25/2011	8:20:04 PM	H2 valve closed
8/25/2011	8:20:04 PM	BCl3 valve closed
8/25/2011	8:20:04 PM	PH3 valve closed
8/25/2011	8:20:04 PM	SiCl4 pre valve closed
8/25/2011	8:20:04 PM	SiCl4 post valve closed
8/25/2011	8:20:04 PM	Main Vac valve closed
8/25/2011	8:20:04 PM	Bypass valve closed
8/25/2011	8:20:04 PM	Bubbler valve closed
8/25/2011	8:20:04 PM	Helium MFC set to  0.000000
8/25/2011	8:20:04 PM	H2 MFC set to  0.000000
8/25/2011	8:20:04 PM	BCl3 MFC set to  0.000000
8/25/2011	8:20:04 PM	PHl3 MFC set to  0.000000
8/25/2011	8:20:04 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:20:04 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:20:04 PM	Tube furnace set to 0
8/25/2011	8:20:07 PM	H2 valve closed
8/25/2011	8:20:07 PM	BCl3 valve closed
8/25/2011	8:20:07 PM	PH3 valve closed
8/25/2011	8:20:07 PM	SiCl4 pre valve closed
8/25/2011	8:20:07 PM	SiCl4 post valve closed
8/25/2011	8:20:07 PM	Main Vac valve closed
8/25/2011	8:20:07 PM	Bypass valve closed
8/25/2011	8:20:07 PM	Bubbler valve closed
8/25/2011	8:20:07 PM	Helium valve opened
8/25/2011	8:20:07 PM	Helium MFC set to  500.000000
8/25/2011	8:20:07 PM	H2 MFC set to  0.000000
8/25/2011	8:20:07 PM	BCl3 MFC set to  0.000000
8/25/2011	8:20:07 PM	PHl3 MFC set to  0.000000
8/25/2011	8:20:07 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:20:07 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:20:07 PM	Tube furnace set to 0
8/25/2011	8:20:13 PM	Helium valve closed
8/25/2011	8:20:13 PM	H2 valve closed
8/25/2011	8:20:13 PM	BCl3 valve closed
8/25/2011	8:20:13 PM	PH3 valve closed
8/25/2011	8:20:13 PM	SiCl4 pre valve closed
8/25/2011	8:20:13 PM	SiCl4 post valve closed
8/25/2011	8:20:13 PM	Main Vac valve closed
8/25/2011	8:20:13 PM	Bypass valve closed
8/25/2011	8:20:13 PM	Bubbler valve closed
8/25/2011	8:20:13 PM	Helium MFC set to  0.000000
8/25/2011	8:20:13 PM	H2 MFC set to  0.000000
8/25/2011	8:20:13 PM	BCl3 MFC set to  0.000000
8/25/2011	8:20:13 PM	PHl3 MFC set to  0.000000
8/25/2011	8:20:13 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:20:13 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:20:14 PM	Tube furnace set to 0
8/25/2011	8:20:15 PM	Run finished at 8:20 PM
8/25/2011	8:20:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/25/2011	8:25:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	8:25:54 PM	Recipe started at 8:25 PM
8/25/2011	8:25:54 PM	Helium valve closed
8/25/2011	8:25:54 PM	H2 valve closed
8/25/2011	8:25:54 PM	BCl3 valve closed
8/25/2011	8:25:54 PM	PH3 valve closed
8/25/2011	8:25:54 PM	SiCl4 pre valve closed
8/25/2011	8:25:54 PM	SiCl4 post valve closed
8/25/2011	8:25:54 PM	Main Vac valve closed
8/25/2011	8:25:54 PM	Bubbler valve closed
8/25/2011	8:25:54 PM	Bypass valve opened
8/25/2011	8:25:54 PM	Helium MFC set to  0.000000
8/25/2011	8:25:54 PM	H2 MFC set to  0.000000
8/25/2011	8:25:54 PM	BCl3 MFC set to  0.000000
8/25/2011	8:25:54 PM	PHl3 MFC set to  0.000000
8/25/2011	8:25:54 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:25:54 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:25:54 PM	Tube furnace set to 0
8/25/2011	8:27:03 PM	Helium valve closed
8/25/2011	8:27:03 PM	H2 valve closed
8/25/2011	8:27:03 PM	BCl3 valve closed
8/25/2011	8:27:03 PM	PH3 valve closed
8/25/2011	8:27:03 PM	SiCl4 pre valve closed
8/25/2011	8:27:03 PM	SiCl4 post valve closed
8/25/2011	8:27:03 PM	Main Vac valve closed
8/25/2011	8:27:03 PM	Bubbler valve closed
8/25/2011	8:27:03 PM	Bypass valve opened
8/25/2011	8:27:03 PM	Helium MFC set to  0.000000
8/25/2011	8:27:03 PM	H2 MFC set to  0.000000
8/25/2011	8:27:03 PM	BCl3 MFC set to  0.000000
8/25/2011	8:27:03 PM	PHl3 MFC set to  0.000000
8/25/2011	8:27:03 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:27:03 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:27:04 PM	Tube furnace set to 0
8/25/2011	8:28:04 PM	Helium valve closed
8/25/2011	8:28:04 PM	H2 valve closed
8/25/2011	8:28:04 PM	BCl3 valve closed
8/25/2011	8:28:04 PM	PH3 valve closed
8/25/2011	8:28:04 PM	SiCl4 pre valve closed
8/25/2011	8:28:04 PM	SiCl4 post valve closed
8/25/2011	8:28:04 PM	Bypass valve closed
8/25/2011	8:28:04 PM	Bubbler valve closed
8/25/2011	8:28:04 PM	Main Vac valve opened
8/25/2011	8:28:04 PM	Helium MFC set to  0.000000
8/25/2011	8:28:04 PM	H2 MFC set to  0.000000
8/25/2011	8:28:04 PM	BCl3 MFC set to  0.000000
8/25/2011	8:28:04 PM	PHl3 MFC set to  0.000000
8/25/2011	8:28:04 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:28:04 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:28:04 PM	Tube furnace set to 0
8/25/2011	8:28:05 PM	Run finished at 8:28 PM
8/25/2011	8:28:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	8:31:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	8:31:44 PM	Recipe started at 8:31 PM
8/25/2011	8:31:44 PM	Helium valve closed
8/25/2011	8:31:44 PM	H2 valve closed
8/25/2011	8:31:44 PM	BCl3 valve closed
8/25/2011	8:31:44 PM	PH3 valve closed
8/25/2011	8:31:44 PM	SiCl4 pre valve closed
8/25/2011	8:31:44 PM	SiCl4 post valve closed
8/25/2011	8:31:44 PM	Main Vac valve closed
8/25/2011	8:31:44 PM	Bubbler valve closed
8/25/2011	8:31:44 PM	Bypass valve opened
8/25/2011	8:31:44 PM	Helium MFC set to  0.000000
8/25/2011	8:31:44 PM	H2 MFC set to  0.000000
8/25/2011	8:31:44 PM	BCl3 MFC set to  0.000000
8/25/2011	8:31:44 PM	PHl3 MFC set to  0.000000
8/25/2011	8:31:44 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:31:44 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:31:44 PM	Tube furnace set to 0
8/25/2011	8:31:44 PM	Helium valve closed
8/25/2011	8:31:44 PM	H2 valve closed
8/25/2011	8:31:44 PM	BCl3 valve closed
8/25/2011	8:31:44 PM	PH3 valve closed
8/25/2011	8:31:44 PM	SiCl4 pre valve closed
8/25/2011	8:31:44 PM	SiCl4 post valve closed
8/25/2011	8:31:44 PM	Main Vac valve closed
8/25/2011	8:31:44 PM	Bubbler valve closed
8/25/2011	8:31:44 PM	Bypass valve opened
8/25/2011	8:31:44 PM	Helium MFC set to  0.000000
8/25/2011	8:31:44 PM	H2 MFC set to  0.000000
8/25/2011	8:31:44 PM	BCl3 MFC set to  0.000000
8/25/2011	8:31:44 PM	PHl3 MFC set to  0.000000
8/25/2011	8:31:44 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:31:44 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:31:44 PM	Tube furnace set to 0
8/25/2011	8:31:47 PM	Helium valve closed
8/25/2011	8:31:47 PM	H2 valve closed
8/25/2011	8:31:47 PM	BCl3 valve closed
8/25/2011	8:31:47 PM	PH3 valve closed
8/25/2011	8:31:47 PM	SiCl4 pre valve closed
8/25/2011	8:31:47 PM	SiCl4 post valve closed
8/25/2011	8:31:47 PM	Bypass valve closed
8/25/2011	8:31:47 PM	Bubbler valve closed
8/25/2011	8:31:47 PM	Main Vac valve opened
8/25/2011	8:31:47 PM	Helium MFC set to  0.000000
8/25/2011	8:31:47 PM	H2 MFC set to  0.000000
8/25/2011	8:31:47 PM	BCl3 MFC set to  0.000000
8/25/2011	8:31:47 PM	PHl3 MFC set to  0.000000
8/25/2011	8:31:47 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:31:47 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:31:47 PM	Tube furnace set to 0
8/25/2011	8:32:17 PM	H2 valve closed
8/25/2011	8:32:17 PM	BCl3 valve closed
8/25/2011	8:32:17 PM	PH3 valve closed
8/25/2011	8:32:17 PM	SiCl4 pre valve closed
8/25/2011	8:32:17 PM	SiCl4 post valve closed
8/25/2011	8:32:17 PM	Bypass valve closed
8/25/2011	8:32:17 PM	Bubbler valve closed
8/25/2011	8:32:17 PM	Helium valve opened
8/25/2011	8:32:17 PM	Main Vac valve opened
8/25/2011	8:32:17 PM	Helium MFC set to  20.000000
8/25/2011	8:32:17 PM	H2 MFC set to  0.000000
8/25/2011	8:32:17 PM	BCl3 MFC set to  0.000000
8/25/2011	8:32:17 PM	PHl3 MFC set to  0.000000
8/25/2011	8:32:17 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:32:17 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:32:17 PM	Tube furnace set to 0
8/25/2011	8:32:47 PM	Helium valve closed
8/25/2011	8:32:47 PM	H2 valve closed
8/25/2011	8:32:47 PM	BCl3 valve closed
8/25/2011	8:32:47 PM	PH3 valve closed
8/25/2011	8:32:47 PM	SiCl4 pre valve closed
8/25/2011	8:32:47 PM	SiCl4 post valve closed
8/25/2011	8:32:47 PM	Bypass valve closed
8/25/2011	8:32:47 PM	Bubbler valve closed
8/25/2011	8:32:47 PM	Main Vac valve opened
8/25/2011	8:32:47 PM	Helium MFC set to  0.000000
8/25/2011	8:32:47 PM	H2 MFC set to  0.000000
8/25/2011	8:32:47 PM	BCl3 MFC set to  0.000000
8/25/2011	8:32:47 PM	PHl3 MFC set to  0.000000
8/25/2011	8:32:47 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:32:47 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:32:47 PM	Tube furnace set to 0
8/25/2011	8:33:17 PM	H2 valve closed
8/25/2011	8:33:17 PM	BCl3 valve closed
8/25/2011	8:33:17 PM	PH3 valve closed
8/25/2011	8:33:17 PM	SiCl4 pre valve closed
8/25/2011	8:33:17 PM	SiCl4 post valve closed
8/25/2011	8:33:17 PM	Bypass valve closed
8/25/2011	8:33:17 PM	Bubbler valve closed
8/25/2011	8:33:17 PM	Helium valve opened
8/25/2011	8:33:17 PM	Main Vac valve opened
8/25/2011	8:33:17 PM	Helium MFC set to  20.000000
8/25/2011	8:33:17 PM	H2 MFC set to  0.000000
8/25/2011	8:33:17 PM	BCl3 MFC set to  0.000000
8/25/2011	8:33:17 PM	PHl3 MFC set to  0.000000
8/25/2011	8:33:17 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:33:17 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:33:18 PM	Tube furnace set to 0
8/25/2011	8:33:48 PM	Helium valve closed
8/25/2011	8:33:48 PM	H2 valve closed
8/25/2011	8:33:48 PM	BCl3 valve closed
8/25/2011	8:33:48 PM	PH3 valve closed
8/25/2011	8:33:48 PM	SiCl4 pre valve closed
8/25/2011	8:33:48 PM	SiCl4 post valve closed
8/25/2011	8:33:48 PM	Bypass valve closed
8/25/2011	8:33:48 PM	Bubbler valve closed
8/25/2011	8:33:48 PM	Main Vac valve opened
8/25/2011	8:33:48 PM	Helium MFC set to  0.000000
8/25/2011	8:33:48 PM	H2 MFC set to  0.000000
8/25/2011	8:33:48 PM	BCl3 MFC set to  0.000000
8/25/2011	8:33:48 PM	PHl3 MFC set to  0.000000
8/25/2011	8:33:48 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:33:48 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:33:48 PM	Tube furnace set to 0
8/25/2011	8:34:18 PM	H2 valve closed
8/25/2011	8:34:18 PM	BCl3 valve closed
8/25/2011	8:34:18 PM	PH3 valve closed
8/25/2011	8:34:18 PM	SiCl4 pre valve closed
8/25/2011	8:34:18 PM	SiCl4 post valve closed
8/25/2011	8:34:18 PM	Bypass valve closed
8/25/2011	8:34:18 PM	Bubbler valve closed
8/25/2011	8:34:18 PM	Helium valve opened
8/25/2011	8:34:18 PM	Main Vac valve opened
8/25/2011	8:34:18 PM	Helium MFC set to  20.000000
8/25/2011	8:34:18 PM	H2 MFC set to  0.000000
8/25/2011	8:34:18 PM	BCl3 MFC set to  0.000000
8/25/2011	8:34:18 PM	PHl3 MFC set to  0.000000
8/25/2011	8:34:18 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:34:18 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:34:18 PM	Tube furnace set to 0
8/25/2011	8:34:48 PM	Helium valve closed
8/25/2011	8:34:48 PM	H2 valve closed
8/25/2011	8:34:48 PM	BCl3 valve closed
8/25/2011	8:34:48 PM	PH3 valve closed
8/25/2011	8:34:48 PM	SiCl4 pre valve closed
8/25/2011	8:34:48 PM	SiCl4 post valve closed
8/25/2011	8:34:48 PM	Bypass valve closed
8/25/2011	8:34:48 PM	Bubbler valve closed
8/25/2011	8:34:48 PM	Main Vac valve opened
8/25/2011	8:34:48 PM	Helium MFC set to  0.000000
8/25/2011	8:34:48 PM	H2 MFC set to  0.000000
8/25/2011	8:34:48 PM	BCl3 MFC set to  0.000000
8/25/2011	8:34:48 PM	PHl3 MFC set to  0.000000
8/25/2011	8:34:48 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:34:48 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:34:48 PM	Tube furnace set to 0
8/25/2011	8:35:18 PM	H2 valve closed
8/25/2011	8:35:18 PM	BCl3 valve closed
8/25/2011	8:35:18 PM	PH3 valve closed
8/25/2011	8:35:18 PM	SiCl4 pre valve closed
8/25/2011	8:35:18 PM	SiCl4 post valve closed
8/25/2011	8:35:18 PM	Bypass valve closed
8/25/2011	8:35:18 PM	Bubbler valve closed
8/25/2011	8:35:18 PM	Helium valve opened
8/25/2011	8:35:18 PM	Main Vac valve opened
8/25/2011	8:35:18 PM	Helium MFC set to  20.000000
8/25/2011	8:35:18 PM	H2 MFC set to  0.000000
8/25/2011	8:35:18 PM	BCl3 MFC set to  0.000000
8/25/2011	8:35:18 PM	PHl3 MFC set to  0.000000
8/25/2011	8:35:18 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:35:18 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:35:18 PM	Tube furnace set to 0
8/25/2011	8:35:48 PM	Helium valve closed
8/25/2011	8:35:48 PM	H2 valve closed
8/25/2011	8:35:48 PM	BCl3 valve closed
8/25/2011	8:35:48 PM	PH3 valve closed
8/25/2011	8:35:48 PM	SiCl4 pre valve closed
8/25/2011	8:35:48 PM	SiCl4 post valve closed
8/25/2011	8:35:48 PM	Bypass valve closed
8/25/2011	8:35:48 PM	Bubbler valve closed
8/25/2011	8:35:48 PM	Main Vac valve opened
8/25/2011	8:35:48 PM	Helium MFC set to  0.000000
8/25/2011	8:35:48 PM	H2 MFC set to  0.000000
8/25/2011	8:35:48 PM	BCl3 MFC set to  0.000000
8/25/2011	8:35:48 PM	PHl3 MFC set to  0.000000
8/25/2011	8:35:48 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:35:48 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:35:49 PM	Tube furnace set to 0
8/25/2011	8:36:19 PM	H2 valve closed
8/25/2011	8:36:19 PM	BCl3 valve closed
8/25/2011	8:36:19 PM	PH3 valve closed
8/25/2011	8:36:19 PM	SiCl4 pre valve closed
8/25/2011	8:36:19 PM	SiCl4 post valve closed
8/25/2011	8:36:19 PM	Bypass valve closed
8/25/2011	8:36:19 PM	Bubbler valve closed
8/25/2011	8:36:19 PM	Helium valve opened
8/25/2011	8:36:19 PM	Main Vac valve opened
8/25/2011	8:36:19 PM	Helium MFC set to  20.000000
8/25/2011	8:36:19 PM	H2 MFC set to  0.000000
8/25/2011	8:36:19 PM	BCl3 MFC set to  0.000000
8/25/2011	8:36:19 PM	PHl3 MFC set to  0.000000
8/25/2011	8:36:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:36:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:36:19 PM	Tube furnace set to 0
8/25/2011	8:36:49 PM	Helium valve closed
8/25/2011	8:36:49 PM	H2 valve closed
8/25/2011	8:36:49 PM	BCl3 valve closed
8/25/2011	8:36:49 PM	PH3 valve closed
8/25/2011	8:36:49 PM	SiCl4 pre valve closed
8/25/2011	8:36:49 PM	SiCl4 post valve closed
8/25/2011	8:36:49 PM	Bypass valve closed
8/25/2011	8:36:49 PM	Bubbler valve closed
8/25/2011	8:36:49 PM	Main Vac valve opened
8/25/2011	8:36:49 PM	Helium MFC set to  0.000000
8/25/2011	8:36:49 PM	H2 MFC set to  0.000000
8/25/2011	8:36:49 PM	BCl3 MFC set to  0.000000
8/25/2011	8:36:49 PM	PHl3 MFC set to  0.000000
8/25/2011	8:36:49 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:36:49 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:36:49 PM	Tube furnace set to 0
8/25/2011	8:37:19 PM	H2 valve closed
8/25/2011	8:37:19 PM	BCl3 valve closed
8/25/2011	8:37:19 PM	PH3 valve closed
8/25/2011	8:37:19 PM	SiCl4 pre valve closed
8/25/2011	8:37:19 PM	SiCl4 post valve closed
8/25/2011	8:37:19 PM	Bypass valve closed
8/25/2011	8:37:19 PM	Bubbler valve closed
8/25/2011	8:37:19 PM	Helium valve opened
8/25/2011	8:37:19 PM	Main Vac valve opened
8/25/2011	8:37:19 PM	Helium MFC set to  20.000000
8/25/2011	8:37:19 PM	H2 MFC set to  0.000000
8/25/2011	8:37:19 PM	BCl3 MFC set to  0.000000
8/25/2011	8:37:19 PM	PHl3 MFC set to  0.000000
8/25/2011	8:37:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:37:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:37:19 PM	Tube furnace set to 0
8/25/2011	8:37:49 PM	Helium valve closed
8/25/2011	8:37:49 PM	H2 valve closed
8/25/2011	8:37:49 PM	BCl3 valve closed
8/25/2011	8:37:49 PM	PH3 valve closed
8/25/2011	8:37:49 PM	SiCl4 pre valve closed
8/25/2011	8:37:49 PM	SiCl4 post valve closed
8/25/2011	8:37:49 PM	Bypass valve closed
8/25/2011	8:37:49 PM	Bubbler valve closed
8/25/2011	8:37:49 PM	Main Vac valve opened
8/25/2011	8:37:49 PM	Helium MFC set to  0.000000
8/25/2011	8:37:49 PM	H2 MFC set to  0.000000
8/25/2011	8:37:49 PM	BCl3 MFC set to  0.000000
8/25/2011	8:37:49 PM	PHl3 MFC set to  0.000000
8/25/2011	8:37:49 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:37:49 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:37:49 PM	Tube furnace set to 0
8/25/2011	8:38:19 PM	H2 valve closed
8/25/2011	8:38:19 PM	BCl3 valve closed
8/25/2011	8:38:19 PM	PH3 valve closed
8/25/2011	8:38:19 PM	SiCl4 pre valve closed
8/25/2011	8:38:19 PM	SiCl4 post valve closed
8/25/2011	8:38:19 PM	Bypass valve closed
8/25/2011	8:38:19 PM	Bubbler valve closed
8/25/2011	8:38:19 PM	Helium valve opened
8/25/2011	8:38:19 PM	Main Vac valve opened
8/25/2011	8:38:19 PM	Helium MFC set to  20.000000
8/25/2011	8:38:19 PM	H2 MFC set to  0.000000
8/25/2011	8:38:19 PM	BCl3 MFC set to  0.000000
8/25/2011	8:38:19 PM	PHl3 MFC set to  0.000000
8/25/2011	8:38:19 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:38:19 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:38:20 PM	Tube furnace set to 0
8/25/2011	8:38:50 PM	Helium valve closed
8/25/2011	8:38:50 PM	H2 valve closed
8/25/2011	8:38:50 PM	BCl3 valve closed
8/25/2011	8:38:50 PM	PH3 valve closed
8/25/2011	8:38:50 PM	SiCl4 pre valve closed
8/25/2011	8:38:50 PM	SiCl4 post valve closed
8/25/2011	8:38:50 PM	Bypass valve closed
8/25/2011	8:38:50 PM	Bubbler valve closed
8/25/2011	8:38:50 PM	Main Vac valve opened
8/25/2011	8:38:50 PM	Helium MFC set to  0.000000
8/25/2011	8:38:50 PM	H2 MFC set to  0.000000
8/25/2011	8:38:50 PM	BCl3 MFC set to  0.000000
8/25/2011	8:38:50 PM	PHl3 MFC set to  0.000000
8/25/2011	8:38:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:38:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:38:50 PM	Tube furnace set to 0
8/25/2011	8:39:20 PM	H2 valve closed
8/25/2011	8:39:20 PM	BCl3 valve closed
8/25/2011	8:39:20 PM	PH3 valve closed
8/25/2011	8:39:20 PM	SiCl4 pre valve closed
8/25/2011	8:39:20 PM	SiCl4 post valve closed
8/25/2011	8:39:20 PM	Bypass valve closed
8/25/2011	8:39:20 PM	Bubbler valve closed
8/25/2011	8:39:20 PM	Helium valve opened
8/25/2011	8:39:20 PM	Main Vac valve opened
8/25/2011	8:39:20 PM	Helium MFC set to  20.000000
8/25/2011	8:39:20 PM	H2 MFC set to  0.000000
8/25/2011	8:39:20 PM	BCl3 MFC set to  0.000000
8/25/2011	8:39:20 PM	PHl3 MFC set to  0.000000
8/25/2011	8:39:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:39:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:39:20 PM	Tube furnace set to 0
8/25/2011	8:39:50 PM	Helium valve closed
8/25/2011	8:39:50 PM	H2 valve closed
8/25/2011	8:39:50 PM	BCl3 valve closed
8/25/2011	8:39:50 PM	PH3 valve closed
8/25/2011	8:39:50 PM	SiCl4 pre valve closed
8/25/2011	8:39:50 PM	SiCl4 post valve closed
8/25/2011	8:39:50 PM	Bypass valve closed
8/25/2011	8:39:50 PM	Bubbler valve closed
8/25/2011	8:39:50 PM	Main Vac valve opened
8/25/2011	8:39:50 PM	Helium MFC set to  0.000000
8/25/2011	8:39:50 PM	H2 MFC set to  0.000000
8/25/2011	8:39:50 PM	BCl3 MFC set to  0.000000
8/25/2011	8:39:50 PM	PHl3 MFC set to  0.000000
8/25/2011	8:39:50 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:39:50 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:39:50 PM	Tube furnace set to 0
8/25/2011	8:40:20 PM	H2 valve closed
8/25/2011	8:40:20 PM	BCl3 valve closed
8/25/2011	8:40:20 PM	PH3 valve closed
8/25/2011	8:40:20 PM	SiCl4 pre valve closed
8/25/2011	8:40:20 PM	SiCl4 post valve closed
8/25/2011	8:40:20 PM	Bypass valve closed
8/25/2011	8:40:20 PM	Bubbler valve closed
8/25/2011	8:40:20 PM	Helium valve opened
8/25/2011	8:40:20 PM	Main Vac valve opened
8/25/2011	8:40:20 PM	Helium MFC set to  20.000000
8/25/2011	8:40:20 PM	H2 MFC set to  0.000000
8/25/2011	8:40:20 PM	BCl3 MFC set to  0.000000
8/25/2011	8:40:20 PM	PHl3 MFC set to  0.000000
8/25/2011	8:40:20 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:40:20 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:40:21 PM	Tube furnace set to 0
8/25/2011	8:40:51 PM	Helium valve closed
8/25/2011	8:40:51 PM	H2 valve closed
8/25/2011	8:40:51 PM	BCl3 valve closed
8/25/2011	8:40:51 PM	PH3 valve closed
8/25/2011	8:40:51 PM	SiCl4 pre valve closed
8/25/2011	8:40:51 PM	SiCl4 post valve closed
8/25/2011	8:40:51 PM	Bypass valve closed
8/25/2011	8:40:51 PM	Bubbler valve closed
8/25/2011	8:40:51 PM	Main Vac valve opened
8/25/2011	8:40:51 PM	Helium MFC set to  0.000000
8/25/2011	8:40:51 PM	H2 MFC set to  0.000000
8/25/2011	8:40:51 PM	BCl3 MFC set to  0.000000
8/25/2011	8:40:51 PM	PHl3 MFC set to  0.000000
8/25/2011	8:40:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:40:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:40:51 PM	Tube furnace set to 0
8/25/2011	8:41:21 PM	H2 valve closed
8/25/2011	8:41:21 PM	BCl3 valve closed
8/25/2011	8:41:21 PM	PH3 valve closed
8/25/2011	8:41:21 PM	SiCl4 pre valve closed
8/25/2011	8:41:21 PM	SiCl4 post valve closed
8/25/2011	8:41:21 PM	Bypass valve closed
8/25/2011	8:41:21 PM	Bubbler valve closed
8/25/2011	8:41:21 PM	Helium valve opened
8/25/2011	8:41:21 PM	Main Vac valve opened
8/25/2011	8:41:21 PM	Helium MFC set to  20.000000
8/25/2011	8:41:21 PM	H2 MFC set to  0.000000
8/25/2011	8:41:21 PM	BCl3 MFC set to  0.000000
8/25/2011	8:41:21 PM	PHl3 MFC set to  0.000000
8/25/2011	8:41:21 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:41:21 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:41:21 PM	Tube furnace set to 0
8/25/2011	8:41:51 PM	Helium valve closed
8/25/2011	8:41:51 PM	H2 valve closed
8/25/2011	8:41:51 PM	BCl3 valve closed
8/25/2011	8:41:51 PM	PH3 valve closed
8/25/2011	8:41:51 PM	SiCl4 pre valve closed
8/25/2011	8:41:51 PM	SiCl4 post valve closed
8/25/2011	8:41:51 PM	Bypass valve closed
8/25/2011	8:41:51 PM	Bubbler valve closed
8/25/2011	8:41:51 PM	Main Vac valve opened
8/25/2011	8:41:51 PM	Helium MFC set to  0.000000
8/25/2011	8:41:51 PM	H2 MFC set to  0.000000
8/25/2011	8:41:51 PM	BCl3 MFC set to  0.000000
8/25/2011	8:41:51 PM	PHl3 MFC set to  0.000000
8/25/2011	8:41:51 PM	SiCl4 MFC set to  0.000000
8/25/2011	8:41:51 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	8:41:51 PM	Tube furnace set to 0
8/25/2011	8:41:52 PM	Run finished at 8:41 PM
8/25/2011	8:41:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/25/2011	10:15:44 PM	Recipe started at 10:15 PM
8/25/2011	10:15:44 PM	Helium valve closed
8/25/2011	10:15:44 PM	H2 valve closed
8/25/2011	10:15:44 PM	BCl3 valve closed
8/25/2011	10:15:44 PM	PH3 valve closed
8/25/2011	10:15:44 PM	SiCl4 pre valve closed
8/25/2011	10:15:44 PM	SiCl4 post valve closed
8/25/2011	10:15:44 PM	Main Vac valve closed
8/25/2011	10:15:44 PM	Bypass valve closed
8/25/2011	10:15:44 PM	Bubbler valve closed
8/25/2011	10:15:44 PM	Helium MFC set to  0.000000
8/25/2011	10:15:44 PM	H2 MFC set to  0.000000
8/25/2011	10:15:44 PM	BCl3 MFC set to  0.000000
8/25/2011	10:15:44 PM	PHl3 MFC set to  0.000000
8/25/2011	10:15:44 PM	SiCl4 MFC set to  0.000000
8/25/2011	10:15:44 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:15:45 PM	Tube furnace set to 0
8/25/2011	10:15:48 PM	Helium valve closed
8/25/2011	10:15:48 PM	BCl3 valve closed
8/25/2011	10:15:48 PM	PH3 valve closed
8/25/2011	10:15:48 PM	SiCl4 pre valve closed
8/25/2011	10:15:48 PM	SiCl4 post valve closed
8/25/2011	10:15:48 PM	Main Vac valve closed
8/25/2011	10:15:48 PM	Bypass valve closed
8/25/2011	10:15:48 PM	Bubbler valve closed
8/25/2011	10:15:48 PM	H2 valve opened
8/25/2011	10:15:48 PM	Helium MFC set to  0.000000
8/25/2011	10:15:48 PM	H2 MFC set to  500.000000
8/25/2011	10:15:48 PM	BCl3 MFC set to  0.000000
8/25/2011	10:15:48 PM	PHl3 MFC set to  0.000000
8/25/2011	10:15:48 PM	SiCl4 MFC set to  0.000000
8/25/2011	10:15:48 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:15:48 PM	Tube furnace set to 0
8/25/2011	10:16:56 PM	Helium valve closed
8/25/2011	10:16:56 PM	BCl3 valve closed
8/25/2011	10:16:56 PM	PH3 valve closed
8/25/2011	10:16:56 PM	SiCl4 pre valve closed
8/25/2011	10:16:56 PM	SiCl4 post valve closed
8/25/2011	10:16:56 PM	Main Vac valve closed
8/25/2011	10:16:56 PM	Bypass valve closed
8/25/2011	10:16:56 PM	H2 valve opened
8/25/2011	10:16:56 PM	Bubbler valve opened
8/25/2011	10:16:56 PM	Helium MFC set to  0.000000
8/25/2011	10:16:56 PM	H2 MFC set to  500.000000
8/25/2011	10:16:56 PM	BCl3 MFC set to  0.000000
8/25/2011	10:16:56 PM	PHl3 MFC set to  0.000000
8/25/2011	10:16:56 PM	SiCl4 MFC set to  0.000000
8/25/2011	10:16:56 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:16:56 PM	Tube furnace set to 0
8/25/2011	10:16:58 PM	Helium valve closed
8/25/2011	10:16:58 PM	BCl3 valve closed
8/25/2011	10:16:58 PM	PH3 valve closed
8/25/2011	10:16:58 PM	SiCl4 pre valve closed
8/25/2011	10:16:58 PM	SiCl4 post valve closed
8/25/2011	10:16:58 PM	Main Vac valve closed
8/25/2011	10:16:58 PM	Bypass valve closed
8/25/2011	10:16:58 PM	H2 valve opened
8/25/2011	10:16:58 PM	Bubbler valve opened
8/25/2011	10:16:58 PM	Helium MFC set to  0.000000
8/25/2011	10:16:58 PM	H2 MFC set to  500.000000
8/25/2011	10:16:58 PM	BCl3 MFC set to  0.000000
8/25/2011	10:16:58 PM	PHl3 MFC set to  0.000000
8/25/2011	10:16:58 PM	SiCl4 MFC set to  0.000000
8/25/2011	10:16:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:16:58 PM	Tube furnace set to 1000
8/25/2011	10:36:58 PM	Helium valve closed
8/25/2011	10:36:58 PM	BCl3 valve closed
8/25/2011	10:36:58 PM	PH3 valve closed
8/25/2011	10:36:58 PM	Main Vac valve closed
8/25/2011	10:36:58 PM	Bypass valve closed
8/25/2011	10:36:58 PM	H2 valve opened
8/25/2011	10:36:58 PM	SiCl4 pre valve opened
8/25/2011	10:36:58 PM	SiCl4 post valve opened
8/25/2011	10:36:58 PM	Bubbler valve opened
8/25/2011	10:36:58 PM	Helium MFC set to  0.000000
8/25/2011	10:36:58 PM	H2 MFC set to  500.000000
8/25/2011	10:36:58 PM	BCl3 MFC set to  0.000000
8/25/2011	10:36:58 PM	PHl3 MFC set to  0.000000
8/25/2011	10:36:58 PM	SiCl4 MFC set to  50.000000
8/25/2011	10:36:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	10:36:58 PM	Tube furnace set to 1000
8/25/2011	11:06:58 PM	Helium valve closed
8/25/2011	11:06:58 PM	BCl3 valve closed
8/25/2011	11:06:58 PM	PH3 valve closed
8/25/2011	11:06:58 PM	SiCl4 pre valve closed
8/25/2011	11:06:58 PM	SiCl4 post valve closed
8/25/2011	11:06:58 PM	Main Vac valve closed
8/25/2011	11:06:58 PM	Bypass valve closed
8/25/2011	11:06:58 PM	H2 valve opened
8/25/2011	11:06:58 PM	Bubbler valve opened
8/25/2011	11:06:58 PM	Helium MFC set to  0.000000
8/25/2011	11:06:58 PM	H2 MFC set to  500.000000
8/25/2011	11:06:58 PM	BCl3 MFC set to  0.000000
8/25/2011	11:06:58 PM	PHl3 MFC set to  0.000000
8/25/2011	11:06:58 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:06:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:06:58 PM	Tube furnace set to 950
8/25/2011	11:11:58 PM	Helium valve closed
8/25/2011	11:11:58 PM	BCl3 valve closed
8/25/2011	11:11:58 PM	PH3 valve closed
8/25/2011	11:11:58 PM	SiCl4 pre valve closed
8/25/2011	11:11:58 PM	SiCl4 post valve closed
8/25/2011	11:11:58 PM	Main Vac valve closed
8/25/2011	11:11:58 PM	Bypass valve closed
8/25/2011	11:11:58 PM	H2 valve opened
8/25/2011	11:11:58 PM	Bubbler valve opened
8/25/2011	11:11:58 PM	Helium MFC set to  0.000000
8/25/2011	11:11:58 PM	H2 MFC set to  500.000000
8/25/2011	11:11:58 PM	BCl3 MFC set to  0.000000
8/25/2011	11:11:58 PM	PHl3 MFC set to  0.000000
8/25/2011	11:11:58 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:11:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:11:58 PM	Tube furnace set to 850
8/25/2011	11:16:58 PM	H2 valve closed
8/25/2011	11:16:58 PM	BCl3 valve closed
8/25/2011	11:16:58 PM	PH3 valve closed
8/25/2011	11:16:58 PM	SiCl4 pre valve closed
8/25/2011	11:16:58 PM	SiCl4 post valve closed
8/25/2011	11:16:58 PM	Main Vac valve closed
8/25/2011	11:16:58 PM	Bypass valve closed
8/25/2011	11:16:58 PM	Helium valve opened
8/25/2011	11:16:58 PM	Bubbler valve opened
8/25/2011	11:16:58 PM	Helium MFC set to  500.000000
8/25/2011	11:16:58 PM	H2 MFC set to  0.000000
8/25/2011	11:16:58 PM	BCl3 MFC set to  0.000000
8/25/2011	11:16:58 PM	PHl3 MFC set to  0.000000
8/25/2011	11:16:58 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:16:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:16:58 PM	Tube furnace set to 0
8/25/2011	11:46:23 PM	Helium valve closed
8/25/2011	11:46:23 PM	H2 valve closed
8/25/2011	11:46:23 PM	BCl3 valve closed
8/25/2011	11:46:23 PM	PH3 valve closed
8/25/2011	11:46:23 PM	SiCl4 pre valve closed
8/25/2011	11:46:23 PM	SiCl4 post valve closed
8/25/2011	11:46:23 PM	Main Vac valve closed
8/25/2011	11:46:23 PM	Bypass valve closed
8/25/2011	11:46:23 PM	Bubbler valve closed
8/25/2011	11:46:23 PM	Helium MFC set to  0.000000
8/25/2011	11:46:23 PM	H2 MFC set to  0.000000
8/25/2011	11:46:23 PM	BCl3 MFC set to  0.000000
8/25/2011	11:46:23 PM	PHl3 MFC set to  0.000000
8/25/2011	11:46:23 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:46:23 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:46:23 PM	Tube furnace set to 0
8/25/2011	11:46:24 PM	Run finished at 11:46 PM
8/25/2011	11:53:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/25/2011	11:53:58 PM	Recipe started at 11:53 PM
8/25/2011	11:53:58 PM	Helium valve closed
8/25/2011	11:53:58 PM	H2 valve closed
8/25/2011	11:53:58 PM	BCl3 valve closed
8/25/2011	11:53:58 PM	PH3 valve closed
8/25/2011	11:53:58 PM	SiCl4 pre valve closed
8/25/2011	11:53:58 PM	SiCl4 post valve closed
8/25/2011	11:53:58 PM	Main Vac valve closed
8/25/2011	11:53:58 PM	Bubbler valve closed
8/25/2011	11:53:58 PM	Bypass valve opened
8/25/2011	11:53:58 PM	Helium MFC set to  0.000000
8/25/2011	11:53:58 PM	H2 MFC set to  0.000000
8/25/2011	11:53:58 PM	BCl3 MFC set to  0.000000
8/25/2011	11:53:58 PM	PHl3 MFC set to  0.000000
8/25/2011	11:53:58 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:53:58 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:53:58 PM	Tube furnace set to 0
8/25/2011	11:55:08 PM	Helium valve closed
8/25/2011	11:55:08 PM	H2 valve closed
8/25/2011	11:55:08 PM	BCl3 valve closed
8/25/2011	11:55:08 PM	PH3 valve closed
8/25/2011	11:55:08 PM	SiCl4 pre valve closed
8/25/2011	11:55:08 PM	SiCl4 post valve closed
8/25/2011	11:55:08 PM	Main Vac valve closed
8/25/2011	11:55:08 PM	Bubbler valve closed
8/25/2011	11:55:08 PM	Bypass valve opened
8/25/2011	11:55:08 PM	Helium MFC set to  0.000000
8/25/2011	11:55:08 PM	H2 MFC set to  0.000000
8/25/2011	11:55:08 PM	BCl3 MFC set to  0.000000
8/25/2011	11:55:08 PM	PHl3 MFC set to  0.000000
8/25/2011	11:55:08 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:55:08 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:55:08 PM	Tube furnace set to 0
8/25/2011	11:55:52 PM	Helium valve closed
8/25/2011	11:55:52 PM	H2 valve closed
8/25/2011	11:55:52 PM	BCl3 valve closed
8/25/2011	11:55:52 PM	PH3 valve closed
8/25/2011	11:55:52 PM	SiCl4 pre valve closed
8/25/2011	11:55:52 PM	SiCl4 post valve closed
8/25/2011	11:55:52 PM	Bypass valve closed
8/25/2011	11:55:52 PM	Bubbler valve closed
8/25/2011	11:55:52 PM	Main Vac valve opened
8/25/2011	11:55:52 PM	Helium MFC set to  0.000000
8/25/2011	11:55:52 PM	H2 MFC set to  0.000000
8/25/2011	11:55:52 PM	BCl3 MFC set to  0.000000
8/25/2011	11:55:52 PM	PHl3 MFC set to  0.000000
8/25/2011	11:55:52 PM	SiCl4 MFC set to  0.000000
8/25/2011	11:55:52 PM	Bypass solenoid MFC set to  0.000000
8/25/2011	11:55:52 PM	Tube furnace set to 0
8/25/2011	11:55:53 PM	Run finished at 11:55 PM
8/25/2011	11:55:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
